VQ5000

-00-A-1 A VQ50 (plug-in type) ARBQ5000-00-B-1 B ARBQ5000-00-P-1 P ARBQ5000-00-A-5 A VQ55 (plug lead type) ARBQ5000-00-B-5 B ARBQ5000-00-P-5 P Circuit Diagrams Reduced pressure port: A Reduced pressure port: B Reduced pressure port: P 39 Series VQ5000 Base Mounted Type Specifications ARBQ5000 Interface regulator model Reduced pressure port P A B Plug-in Plug lead Plug-in Plug lead Plug-in

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

-00-A-1 A VQ50 (plug-in type) ARBQ5000-00-B-1 B ARBQ5000-00-P-1 P ARBQ5000-00-A-5 A VQ55 (plug lead type) ARBQ5000-00-B-5 B ARBQ5000-00-P-5 P Circuit Diagrams Reduced pressure port: A Reduced pressure port: B Reduced pressure port: P 39 Series VQ5000 Base Mounted Type Specifications ARBQ5000 Interface regulator model Reduced pressure port P A B Plug-in Plug lead Plug-in Plug lead Plug-in

VQ5000

S ] Interface regulator ARBQ5000-00-1 A B P D U Refer to pages 2-6-34 to 2-6-38 for detailed dimensions of each option.

Model: ARBQ5000, Port: A (Regulating Port A)

Model: ARBQ5000, Port: P (Regulating Port P)

Model: ARBQ5000, Port: Regulating Port A

Model: ARBQ5000, Port: Regulating Port P

Table of Contents

(inch) H2 (Width across flats) T D Note) B E Mounting hole M Weight (g) H1 (Width across flats) Min. port size Model KQ2LE01-00 KQ2LE03-00 KQ2LE05-00 KQ2LE07-00 KQ2LE09-00 KQ2LE11-00 KQ2LE13-00 1 8 1/2-20 UNF 1/2-20 UNF 9/16-18 UNF 9/16-18 UNF 3/4-16 UNF 7/8-14 UNF 1-12 UNF 13.5 13.5 15 15 20 23 26 9.6 10.4 11.4 13.2 15.2 17.9 21.7 27 26 32 29 53 85 105 2.5 3 3.5 4.6 6 7 9.6 15.5 16 16.5

Table of Contents

B (9.5) B (12.7) B (19.1) B (25.4) B (31.8) B (38.1) B (50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 3 8 1 2 3 4 10A 15A 20A 25A 32A 40A 50A 1 2 VNA01 VNA02 VNA03 VNA1 Port 12 (P1) 1 1 1 2 External pilot External pilot External pilot External pilot External pilot Pilot exhaust Bleed port Bleed port 1 4 1 2 10 (P2) Installing a silencer to the

Table of Contents

Body type Plug-in type ARBF5050-00-P-1 Non plug-in type ARBF5050-00-P-2 P port regulation ARBF5050-00-A-1 ARBF5050-00-A-2 A port regulation ARBF5050-00-B-1 ARBF5050-00-B-2 B port regulation Body type Plug-in type AXT512-14-1A Non plug-in type Part no. For details, refer to Serial Transmission catalog separately.

CATALOG

D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away

KJ

(mm) 4 T B E M Model hole Urethane 4.2 M12 x 1 18 16 6 8 10 12 14 17 14 17 18.5 31 10.4 13 KQ2LE06-00 12.8 11.4 21.6 9.0 14.9 25 15 17 18.5 21 22 M14 x 1 M16 x 1 20.5 23.5 34 38.5 KQ2LE08-00 17 19 15.2 33 17 KQ2LE10-00 M20 x 1 63 22 24 24 27 26.5 43.5 18.5 21 25.0 39.7 35.2 50.2 KQ2LE12-00 20.9 M22 x 1 28.5 77 23 45.5 Note) D: Max. diameter Mounting plate thickness 7 mm or less Bulkhead Connector

Air Fittings & Tubing

T B E M D M12 X 1 18 4 KQ2LE04-00 14 17 14 17 18.5 31 10.4 4.2 16 6 8 10 12 13 4.2 M14 X 1 M16 X 1 KQ2LE06-00 12.8 11.4 21.6 9.0 14.9 25 15 17 18.5 21 22 20.5 23.5 34 38.5 19 15.2 33 17 KQ2LE08-00 17 M20 X 1 63 KQ2LE10-00 26.5 43.5 18.5 21 35.2 50.2 22 24 24 27 25.0 39.7 M22 X 1 28.5 77 23 KQ2LE12-00 20.9 45.5 Note1) D: max. diameter SKQ20, #21 to #25 Bulkhead connector: KQ2E Tube O.D.

VM

A) 2 (A) 54 46 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc 3/4 4-Rc 1/4, 3/8, 1/2 5-8-14 9 Hand Valve Series VH Precautions Be sure to read before handling.

2/3 Port Valve

base V Common SUP Individual SUP (For vacuum) Class B Class H G C D, T G, C S(1) _ S L, Z _ S L, Z T Manifold base Mark Applicable valve VX21l1-00 VVX21 VVX22 VVX23 Port size VX22l1-00 VX23l1-00 1 2 Rc(PT) Rc(PT) 1 8 1 4 AC All common ports are 3/8.

VM

4 NBR y u Brass 5-7-1 59 Series VR4151/4152 How to Order A 01 5 1 1 VR41 Indicator light 0 No 1 Yes Sub-plate Side piping B A Bottom piping Port size W/o sub-plate 00 Rc 01 1 8 NPT N01 1 8 G F01 1 8 Number of pilot ports Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

F

-00 3/16-18 17.46 34 15.08 16.5 3.5 6 KQE06-00 M14x1 17 34.5 15 17 13.1/13.1 1/4 KQE07-00 5/16-18 17.46 34.5 15.08 17 4.6 8 KQE08-00 M16x1 19 38 17 18.5 26.1/18 5/16 KQE09-00 3/4-16 22.23 38 19.8 18.5 6 10 KQE10-00 M20x1 24 42.5 21 21 41.5/29.5 3/8 KQE11-00 1/8-14 25.4 42.5 23 21 7 12 KQE12-00 M22x1 27 44.5 23 22 58.3/46.1 1/2 KQE13-00 1-12 28.6 44.5 26.2 22 9.6 16 KQE16-00 M26x1.5 30 49.5

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

on option V, M (non-leak, medium vacuum) Note) Dew point temperature: 10C or less 17 18 Direct Operated 2 Port Solenoid Valve Series VX21/22/23 For Air/Manifold How to Order (Solenoid Valve for Manifold) VX 2 1 1 1 21 G VX 2 3 00 00 1 1 21 G Normally Closed (N.C.)

VFS

Body type Plug-in type ARBF5050-00-P-1 Non plug-in type ARBF5050-00-P-2 P port regulation ARBF5050-00-A-1 ARBF5050-00-A-2 A port regulation ARBF5050-00-B-1 ARBF5050-00-B-2 B port regulation Body type Plug-in type AXT512-14-1A Non plug-in type Part no. For details, refer to Serial Transmission catalog separately.

VFR

VVFS3000-R-03-1 VVFS3000-R-03-2 VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Body type Plug-in type Non plug-in type P port regulation ARBF3050-00-P-1 ARBF3050-00-P-2 VZS A port regulation ARBF3050-00-A-1 ARBF3050-00-A-2 VFS B port regulation ARBF3050-00-B-