A

www.stevenengineering.com I 5.5 AIR PREPARATION MODULAR TYPE D I M E N S I O N S NAR1000~NAR5000 D I M E N S I O N S NAR6000 Model A B C D E F G H J K L M N NAR1000 25 61.5 11 25 26 25 18 30 4.5 6.5 40 2 20.5 NAR2000 40 95 17 40 56.8 30 30 45 5.4 15.4 55 2.3 33.5 NAR2500 53 102.5 25 48 60.8 30 34 44 5.4 15.4 55 2.3 33.5 NAR3000 53 127.5 35 53 60.8 41 40 46 6.5 8 53 2.3 42.5 NAR4000 70 149.5

Modular Design with Uniform Body Style

S N F A F N N M J M J S R R K C B C B V2 V1 Q1 Q1 V1 V2 Q2 Q1 Q1 K IN OUT OUT IN EXH U U EXH P3 (Port size) P2 G Clearance for maintenance (Pressure gauge port size) Drain E P3 (Port size) P2 G Clearance for maintenance (Pressure gauge port size) Drain AC40-V-D to AC40-06-V-D A N S N F M J R B C V2 V1 Q2 Q1 Q1 OUT IN 2 x P1 (Port size) U EXH E P2 P3 (Port size) G Clearance for maintenance

Compact and Lightweight

DIN rail mounting bracket (Brackets on both sides) L x n pcs.+ J x 2 L ZH15DA-09-N03-11 ZH15DA-N02-N03-N03 ZH18DA-11-N03-13 ZH18DA-N03-N03-N03 ZH20DA-10-04-12 ZH20DA-03-04-04 ZH20DA-11-N04-13 ZH20DA-N03-N04-N04 The above shown products cannot be mounted closely together, as width across flats of the screw-in connection will interfere with each other.

V

or less Exhaust Center NVFS5400 55 or less 3 Position Pressure Center NVFS5500 55 or less Perfect (Double Check) NVFS5600 60 or less T E C H N I C A L SPECIFICATIONS O P T I O N A L T E C H N I C A L SPECIFICATIONS S T A N D A R D Pilot Type External Pilot Type Fluid Air and Inert Gas Manual Override Main Valve Direct Manual Override Type Max Operating Pressure 150 PSI (1MPa) Pilot Operator

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

17 27.8 39.3 6 12.8 3/8" 17.9 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 8 15.2 1/4" 13.2 17 55 23 35.2 40.4 45.4 19 40.2 R 3/8 19.8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 29.5 19.8 19 41 59 21 45.4 31.8 43.3 40.2 40.4 10 18.5 5/16" 15.2 35.2 18.5 57 23 AS321FG-03-12 AS321FG-N03-11 31.8 43.3 61 22 32.8 44.3 12 20.9 3/8" 17.9 21 59 AS421FG-04-10 AS421FG-N04-11 33.6 47.9 100

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

17 27.8 39.3 12.8 17.9 6 3/8" 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 15.2 13.2 8 1/4" 17 55 23 41.5 46.5 20.9 19 40.2 35.2 R 3/8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19 29.5 20.9 41 59 21 31.8 43.3 18.5 15.2 10 5/16" 46.5 41.5 40.2 35.2 18.5 57 23 AS321FG-03-12 AS321FG-N03-11 31.8 43.3 61 22 32.8 44.3 20.9 17.9 12 3/8" 21 59 AS421FG-04-10 AS421FG-N04-11 33.6 47.9 100

44

alcohol Propylene glycol MQR Bromochloroethane T n-Hexane IDK n-Hexyl alcohol Note 1) [ ] denotes the concentration.

AS-FG/ASD-FG

17 27.8 39.3 12.8 6 17.9 3/8" 21 67 27.8 39.3 AS321FG-03-08 AS321FG-N03-07 57 18.5 29.5 41 15.2 8 13.2 1/4" 17 55 R(PT) 3/8 23 41.5 46.5 20.9 19 40.2 35.2 NPT 3/8 19 20.9 29.5 41 AS321FG-03-10 AS321FG-N03-09 59 21 31.8 43.3 18.5 10 15.2 5/16" 46.5 41.5 40.2 35.2 18.5 57 23 31.8 43.3 AS321FG-03-12 AS321FG-N03-11 61 22 32.8 44.3 20.9 12 17.9 3/8" 21 59 33.6 47.9 AS421FG-04-10 AS421FG-N04-11

Process Pump

N is entered as a thread symbol.)

Pulse Valve

470 910 1850 Direct piping type 290 500 1230 55-JSXFA Pilot port Port size: 3/4, 1 1 No condensation Replacement Parts Model Replacement part number Main valve assembly (Main valve + O-ring) Sub-valve assembly (Sub-valve + O-ring) Silencer 55-JSXFA(E, F)-06m-B-m JSXF-06B-KT 55-JSXFA(E, F)-06m-B-mA JSXF-06B-A-KT 55-JSXFA(E, F)-10m-B-m JSXF-10B-KT 55-JSXFA(E, F)-10m-B-mA JSXF-10B-A-KT

NARM Series

Bracket ass'y n pcs. (2) When ordering regulators, end plate assembly and bracket assembly are assembled to make the manifold of n stations. Regulator n pcs. Bracket ass'y n pcs.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

17 27.8 39.3 6 12.8 3/8" 17.9 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 8 15.2 1/4" 13.2 17 55 23 35.2 40.4 45.4 19 40.2 R 3/8 19.8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19.8 29.5 19 41 59 21 45.4 31.8 43.3 40.4 40.2 10 18.5 5/16" 15.2 35.2 18.5 57 23 AS321FG-03-12 AS321FG-N03-11 31.8 43.3 61 22 32.8 44.3 12 20.9 3/8" 17.9 21 59 AS421FG-04-10 AS421FG-N04-11 33.6 47.9 100

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

17 27.8 39.3 12.8 17.9 6 3/8" 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 15.2 13.2 8 1/4" 17 55 23 41.5 46.5 20.9 19 40.2 35.2 R 3/8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19 29.5 20.9 41 59 21 31.8 43.3 18.5 15.2 10 5/16" 46.5 41.5 40.2 35.2 18.5 57 23 AS321FG-03-12 AS321FG-N03-11 31.8 43.3 61 22 32.8 44.3 20.9 17.9 12 3/8" 21 59 AS421FG-04-10 AS421FG-N04-11 33.6 47.9 100

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

17 27.8 39.3 6 12.8 3/8" 17.9 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 8 15.2 1/4" 13.2 17 55 23 35.2 40.4 45.4 19 40.2 R 3/8 19.8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19.8 29.5 19 41 59 21 45.4 31.8 43.3 40.4 40.2 10 18.5 5/16" 15.2 35.2 18.5 57 23 AS321FG-03-12 AS321FG-N03-11 31.8 43.3 61 22 32.8 44.3 12 20.9 3/8" 17.9 21 59 AS421FG-04-10 AS421FG-N04-11 33.6 47.9 100

Dual Speed Controller with One-touch Fitting Series ASD 1

18.5 5/16" ASD430F-N02-09S 46.5 28.2 41.7 NPT 1/4 17.5 15.2 15 18.5 36.7 29.6 34.6 11 40.4 35.4 21 3/8" ASD430F-N02-11S 49.3 31 19.7 62 18.5 17 1/4" ASD530F-N02-07S 48.7 25.6 13.2 20.3 76 18.5 5/16" ASD530F-N02-09S 51.3 28.2 46.9 NPT 1/4 38 19 15.2 19.8 23 43 15.4 41.9 48.8 43.8 21 3/8" ASD530F-N02-11S 54.1 84 32.6 23.1 18.5 17 1/4" ASD530F-N03-07S 48.7 25.6 13.2 93 20.3 18.5 5/16" ASD530F-N03

VH Series, 4 Way Hand Valve

(Exhaust center) 1/4" 17(0.9) Exhaust center VH302-N02, N03 VH312-N02, N03 2 (Position) 2 1 1.56 (0.71) (A) 2 (B) 4 VH3 1/4", 3/8" VH320-N02, N03 VH330-N02, N03 3 (Closed center) 3/8" 20(1.1) 1 (P) 3 (R) VH321-N02, N03 VH331-N02, N03 3 (Exhaust center) VH322-N02, N03 VH332-N02, N03 2 1 3 4 2 (Position) VH400-N02 to N06 VH410-N02 to N06 3 (Closed center) 1/4" 45(2.5) 4 3 VH401-N02 to N06 VH411

ASD

/8 ASD530F-N03-09S 18.5 15.2 51.3 28.2 41.9 46.5 35.3 41.5 14 46.9 40.3 19 23 19.8 3/8" 102 ASD530F-N03-11S 54.1 23.1 21 18.5 32.6 NPT1/2 57.6 42.1 50.1 18.6 3/8" 180 49.6 23.8 64.3 ASD630F-N04-11S 57.3 28.6 26.5 25.9 64.8 Reference dimensions of M5 X 0.8, R(PT) thread after being screwed in. 4.1-16 Series ASD Construction ASD230F ASD330F/430F ASD530F/630F ASD530F-02 !

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

N Symbol Electroless nickel plated Control type If more than one option is required, write option part numbers in the order of S, N.

Table of Contents

OFF n-3 Accumulated flow rate Note 1) n Note 1) Output mode is set to inverted output at the factory before shipment.

Vacuum System Peripherals:

D 6 N ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com r Stations ZL Indicate ejector/valve, etc for X. (When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)