XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

IP8001 Series

Please see ATEX Intrinsic Safety Type of Explosion Protected Construction (52-IP8001-0*4).

Direct Solenoid

Perl t Nns 4024 ilVS /1034 l'll/S 4044 2 PGition 3 Podtoo 2 Posilion 3 Poition 2 Poition 1121.42244324,4424 r13,,42344334, 4/|i|{ 4144,4244 12 VDC A06-51 AO9-51 A07-51 A10-51 A08-51 24 VDC A06-52 409-52 A07-52 A10-52 A08-52 48 VDC A06-53 A09-53 A07-53 A10-53 A08-53 Powar Conaumptlon: (13.2 WEtts) D.C. solenoidE alwaF draw the same amount of powsr, regardless of th6 posltlon of the plunger

Table of Contents

3 !5 @3 !0 !

Slide Unit Series CX2/CXWM/CXWL

2.5 3 Plate mounting 3 3 2.5 Since this is a guideline including hysteresis, not meant to be guaranteed.

Slide Unit Series CX2/CXWM/CXWL

2.5 3 Plate mounting 3 3 2.5 Since this is a guideline including hysteresis, not meant to be guaranteed.

CXWM/CXWL

3, !4, !5.

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: None (Standard), External Scale Plate: None, LCD Window: None, Connection, Air - Electric: 3 (NPT1/4 - NPT1/2)

Type: Relay Device, Type: Smart rotary type, Specification: With Intrinsically safe explosion-proof (ATEX) + Output function + HART communication function, Pressure(MPa): 1.0, Fork lever type fitting: N/A, Lever unit: N/A, External scale plate: N/A, Body cover with window for LCD: N/A, Air connection port: 1/4NPT, Conduit connection port: 1/2NPT, Explosion-proof structure: ATEX Directive

ZP

Pad type Symbol HB Type Heavy-duty (Bellows) Dimensions: Pad Unit ZP2-32HB ZP2-150HB 109 4 x 14 4 x 9 26 3 x 5 3 x 3 9 3 66 47 18.5 13 5 12 40 14 22 105 32 150 152 33 35 154 35 Symbol/Type HW: Heavy-duty (Oval) Heavy-duty Pad Pad size 30 x 50 For heavy or large work pieces How to Order ZP2 3050 HW N Pad unit Pad size Pad material Symbol Symbol Material NBR Silicone rubber FKM CR Pad size

ZP

Pad type Symbol HB Type Heavy-duty (Bellows) Dimensions: Pad Unit ZP2-32HB ZP2-150HB 109 4 x 14 4 x 9 26 3 x 5 3 x 3 9 3 66 47 18.5 13 5 12 40 14 22 105 32 150 152 33 35 154 35 Symbol/Type HW: Heavy-duty (Oval) Heavy-duty Pad Pad size 30 x 50 For heavy or large work pieces How to Order ZP2 3050 HW N Pad unit Pad size Pad material Symbol Symbol Material NBR Silicone rubber FKM CR Pad size

Air Cylinder Series CA2

Without rod boot With rod boot P CS2 Bore size (mm) K KA M MM N S H ZZ d e f h ZZ l 1/4 stroke 6 14 11 M14 x 1.5 27 1/4 84 51 146 52 43 15 59 154 40 7 18 11 M18 x 1.5 30 3/8 90 58 159 58 52 15 66 167 1/4 stroke 50 7 18 14 M18 x 1.5 31 3/8 98 58 170 58 52 17.5 66 178 1/4 stroke 63 10 22 17 M22 x 1.5 37 1/2 116 71 204 80 65 21.5 80 213 1/4 stroke 80 1/4 stroke 10 26 17 M26 x 1.5 40 1/2 126

CA2

Without rod boot With rod boot P Bore size (mm) K KA M MM N S H l ZZ d e f h ZZ C76 6 84 15 14 11 M14 x 1.5 27 1/4 51 146 52 43 59 1/4 stroke 154 40 7 90 15 18 11 M18 x 1.5 30 3/8 58 159 58 52 66 1/4 stroke 167 50 C85 7 98 17.5 18 14 M18 x 1.5 31 3/8 58 170 58 52 66 178 1/4 stroke 63 10 116 21.5 22 17 M22 x 1.5 37 1/2 71 204 80 65 80 213 1/4 stroke 80 C95 10 126 21.5 26 17 M26 x 1.5 40 1

ZP

Pad type Symbol HB Type Heavy-duty (Bellows) Dimensions: Pad Unit ZP2-32HB ZP2-150HB 109 4 x 14 4 x 9 26 3 x 5 3 x 3 9 3 66 47 18.5 13 5 12 40 14 22 105 32 150 152 33 35 154 35 Symbol/Type HW: Heavy-duty (Oval) Heavy-duty Pad Pad size 30 x 50 For heavy or large work pieces How to Order ZP2 3050 HW N Pad unit Pad size Pad material Symbol Symbol Material NBR Silicone rubber FKM CR Pad size

Vacuum Pad

Pad type Symbol HB Type Heavy-duty (Bellows) Dimensions: Pad Unit ZP2-32HB ZP2-150HB 109 4 x 14 4 x 9 26 3 x 5 3 x 3 9 3 66 47 18.5 13 5 12 40 14 22 105 32 150 152 33 35 154 35 Symbol/Type HW: Heavy-duty (Oval) Heavy-duty Pad Pad size 30 x 50 For heavy or large work pieces How to Order ZP2 3050 HW N Pad unit Pad size Pad material Symbol Symbol Material NBR Silicone rubber FKM CR Pad size

Vacuum Pad

Pad type Symbol HB Type Heavy-duty (Bellows) Dimensions: Pad Unit ZP2-32HB ZP2-150HB 109 4 x 14 4 x 9 26 3 x 5 3 x 3 9 3 66 47 18.5 13 5 12 40 14 22 105 32 150 152 33 35 154 35 Symbol/Type HW: Heavy-duty (Oval) Heavy-duty Pad Pad size 30 x 50 For heavy or large work pieces How to Order ZP2 3050 HW N Pad unit Pad size Pad material Symbol Symbol Material NBR Silicone rubber FKM CR Pad size

Vacuum Pad

Pad type Symbol HB Type Heavy-duty (Bellows) Dimensions: Pad Unit ZP2-32HB ZP2-150HB 109 4 x 14 4 x 9 26 3 x 5 3 x 3 9 3 66 47 18.5 13 5 12 40 14 22 105 32 150 152 33 35 154 35 Symbol/Type HW: Heavy-duty (Oval) Heavy-duty Pad Pad size 30 x 50 For heavy or large work pieces How to Order ZP2 3050 HW N Pad unit Pad size Pad material Symbol Symbol Material NBR Silicone rubber FKM CR Pad size

Vacuum Pad

Pad type Symbol HB Type Heavy-duty (Bellows) Dimensions: Pad Unit ZP2-32HB ZP2-150HB 109 4 x 14 4 x 9 26 3 x 5 3 x 3 9 3 66 47 18.5 13 5 12 40 14 22 105 32 150 152 33 35 154 35 Symbol/Type HW: Heavy-duty (Oval) Heavy-duty Pad Pad size 30 x 50 For heavy or large work pieces How to Order ZP2 3050 HW N Pad unit Pad size Pad material Symbol Symbol Material NBR Silicone rubber FKM CR Pad size

ZP

Pad type Symbol HB Type Heavy-duty (Bellows) Dimensions: Pad Unit ZP2-32HB ZP2-150HB 109 4 x 14 4 x 9 26 3 x 5 3 x 3 9 3 66 47 18.5 13 5 12 40 14 22 105 32 150 152 33 35 154 35 Symbol/Type HW: Heavy-duty (Oval) Heavy-duty Pad Pad size 30 x 50 For heavy or large work pieces How to Order ZP2 3050 HW N Pad unit Pad size Pad material Symbol Symbol Material NBR Silicone rubber FKM CR Pad size

CV/MVGQ

MQQ M RHC 3.