1

1.5 1.5 R port (3 port only) Symbol 2 port (A) 2 (103.6) 12 10 1 (P) (74.1) 3 port 52 (A) 2 22 13 32 12 10 16 1 (P) 3 (R) 2 x 1/4 2 x 5.5 mounting hole 30 25 40 * 0.5 MPa supply F.O.F.* 52 N T.T. 6.5 mm Push button (Extended) VM220-02-32 (R, B, G, Y) A VM230-02-32 (R, B, G, Y) A Panel mounting hole 38 T.T. 23 Max. 6 3 1.5 1.5 23.5 22.1 Symbol 2 port R port (3 port only) (A) 2 12 10 (97.6

Additionally, the 52-versions comply with ATEX directive category 1 as intrinsically safe and explosion proof. Two temperature classes are available, including T4/T5, or T6. The IP8001 lever type is for stem type valves, typically with diaphragm actuators. The IP8101 rotary type is for rotary valves with oscillating actuators.

Additionally, the 52-versions comply with ATEX directive category 1 as intrinsically safe and explosion proof. Two temperature classes are available, including T4/T5, or T6. The IP8001 lever type is for stem type valves, typically with diaphragm actuators. The IP8101 rotary type is for rotary valves with oscillating actuators.

Electric Actuator/Slider Type

3 !

7ND9071en

T6...T4 Gc II 3 D Ex tc IIIC T90 C Dc II 3 D Ex ic IIIC T90 C...T120 C Dc Ui 24 V II 3 G Ex ic IIC T6...T4 Gc II 3 D Ex tc IIIC T90 C Dc II 3 D Ex ic IIIC T90 C...T120 C Dc Ui 32 V, Ii 380 mA, Pi 5.32 W, Ci 5 nF, Li 10 H.

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: None (Standard), External Scale Plate: H (w/External Scale Plate), LCD Window: None, Connection, Air - Electric: 1 (NPT1/4 - G1/2), ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Type: Smart Rotary Type, Pressure Gauge: 1.0 MPa, Accessories: None (Standard), External Scale Plate: w/External Scale Plate, LCD Window: None, Connection, Air - Electric: NPT1/4 - G1/2, ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

LEC-OM07605CN

(3) (a) EMC HF3010A-UN [:mm] 4-5.5 7 3-M4 3-M4 M4 32 2 110 4 85 2 IN (41) 258 4 65 4 273 2 288 4 300 5 HF3030A-UNHF3040A-UN [:mm] 6-K 3-L 3-L G 1 D 2 E 1 F 2 M J 2 C 1 C 1 H 2 B 2 A 5 [mm] A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25 8 M5 M4 HF3040A-UN 11 30 11.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

3 !

15

3 mm or more.

Vacuum

No Maieria P a r t n o . l , l , l l rRv1000 tRv2000 1 Diaphragm asgembly H-NBR, etc P538010.6 P$8m0-3 P538030-5 Slainless steel, H-NBR P53801005 Brass, H-NBR P53803015 Brass, H-NBR P53803016 Fixed orifice sus$4 P36202018 P36202018 P mn17 O-ring H,I'BR o 4 3 5 x 1 0 6 x l 0 8 3 1 x 1 O-ring H-NBR 0 2 x 0 6 o 3 2 \ 1 O-rlng NBR JtsB240t P16 NoE 1) O-ring NBR ol.7 x 0.85 o 2 . 5 \ ' l O-ring

Vacuum

No Maieria P a r t n o . l , l , l l rRv1000 tRv2000 1 Diaphragm asgembly H-NBR, etc P538010.6 P$8m0-3 P538030-5 Slainless steel, H-NBR P53801005 Brass, H-NBR P53803015 Brass, H-NBR P53803016 Fixed orifice sus$4 P36202018 P36202018 P mn17 O-ring H,I'BR o 4 3 5 x 1 0 6 x l 0 8 3 1 x 1 O-ring H-NBR 0 2 x 0 6 o 3 2 \ 1 O-rlng NBR JtsB240t P16 NoE 1) O-ring NBR ol.7 x 0.85 o 2 . 5 \ ' l O-ring

Type: Relay Device, Type: Smart rotary type, Specification: With Intrinsically safe explosion-proof (ATEX) + Output function + HART communication function, Pressure(MPa): 1.0, Fork lever type fitting: N/A, Lever unit: N/A, External scale plate: N/A, Body cover with window for LCD: Available, Air connection port: 1/4NPT, Conduit connection port: 1/2NPT, Explosion-proof structure: ATEX Directive

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: C (Fork Lever-type Fitting M), External Scale Plate: H (w/External Scale Plate), LCD Window: W (Body w/LCD Window), Connection, Air - Electric: 3 (NPT1/4 - NPT1/2), ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

AC Servo Motor Driver (SSCNET /H Type)

Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Load to motor inertia moment ratio PB06 7 7 Function selection E-3 PE41 0 0 LEFS25(L,R)T6 LEFS32(L,R)T7 LEFS40(L,R)T8 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

NCA1

G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 REFER TO PAGE 22 FOR OPTIONAL ROD THREADS XB6 H I G H T E M P E R AT U R E 23 Air Cylinder Expanded Series NCA1 ACCESSORIES Eye Brackets Part No CB CD DD E F FL LR M MR R NCA1-P150 3/4 1/2 13/32 2 1/2 3/8 1 1/8 3/4 1/2 9/16 1.63 NCA1-P325 1 1/4 3/4 17/32 3 1/2 5/8 1 7/8 1 1/4 3/4 7/8 2.56 NCA1-P800 1 1/2 1 21/32 4 1/2 3/4 2 1/4 1 1/2 1 1 1/4 3.25 NCA1

Air Cylinder NCA1 Series

G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 REFER TO PAGE 22 FOR OPTIONAL ROD THREADS XB6 H I G H T E M P E R AT U R E 23 Air Cylinder Expanded Series NCA1 ACCESSORIES Eye Brackets Part No CB CD DD E F FL LR M MR R NCA1-P150 3/4 1/2 13/32 2 1/2 3/8 1 1/8 3/4 1/2 9/16 1.63 NCA1-P325 1 1/4 3/4 17/32 3 1/2 5/8 1 7/8 1 1/4 3/4 7/8 2.56 NCA1-P800 1 1/2 1 21/32 4 1/2 3/4 2 1/4 1 1/2 1 1 1/4 3.25 NCA1

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 3) System A: Valve + Z728.H B: Valve + MTL728P+ F: Valve + KFD0-SD2-Ex1.1065 Standard SY manifolds Types 20, 41, 42 are used for 52-SY valves.

%silltr

P N E U A T I C T E C H N O L O G Y Fnopennes oF GAsEs t S o T H E R M I C C H A N G E ( B O Y L E ' S L A W ) "...with constant temperature, the pressure of a given mass of gas is inversely proportional to its voltlme", or: P' Y= constant v = 1 i p = 1 p 1 x V l = = p 3 x V 3 p 2 x V 2 Fig. 3.5 illustration of Boyle's Law lf volume V. = 1 m3at a standard absolute pressure ot 101325 Pa is

SMC Basic Pneumatics

P N E U A T I C T E C H N O L O G Y Fnopennes oF GAsEs t S o T H E R M I C C H A N G E ( B O Y L E ' S L A W ) "...with constant temperature, the pressure of a given mass of gas is inversely proportional to its voltlme", or: P' Y= constant v = 1 i p = 1 p 1 x V l = = p 3 x V 3 p 2 x V 2 Fig. 3.5 illustration of Boyle's Law lf volume V. = 1 m3at a standard absolute pressure ot 101325 Pa is