Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY 69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2
Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-
1.5 1.5 R port (3 port only) Symbol 2 port (A) 2 (103.6) 12 10 1 (P) (74.1) 3 port 52 (A) 2 22 13 32 12 10 16 1 (P) 3 (R) 2 x 1/4 2 x 5.5 mounting hole 30 25 40 * 0.5 MPa supply F.O.F.* 52 N T.T. 6.5 mm Push button (Extended) VM220-02-32 (R, B, G, Y) A VM230-02-32 (R, B, G, Y) A Panel mounting hole 38 T.T. 23 Max. 6 3 1.5 1.5 23.5 22.1 Symbol 2 port R port (3 port only) (A) 2 12 10 (97.6
Additionally, the 52-versions comply with ATEX directive category 1 as intrinsically safe and explosion proof. Two temperature classes are available, including T4/T5, or T6. The IP8001 lever type is for stem type valves, typically with diaphragm actuators. The IP8101 rotary type is for rotary valves with oscillating actuators.
Additionally, the 52-versions comply with ATEX directive category 1 as intrinsically safe and explosion proof. Two temperature classes are available, including T4/T5, or T6. The IP8001 lever type is for stem type valves, typically with diaphragm actuators. The IP8101 rotary type is for rotary valves with oscillating actuators.
Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: None (Standard), External Scale Plate: H (w/External Scale Plate), LCD Window: None, Connection, Air - Electric: 1 (NPT1/4 - G1/2), ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]
Type: Smart Rotary Type, Pressure Gauge: 1.0 MPa, Accessories: None (Standard), External Scale Plate: w/External Scale Plate, LCD Window: None, Connection, Air - Electric: NPT1/4 - G1/2, ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]
T6...T4 Gc II 3 D Ex tc IIIC T90 C Dc II 3 D Ex ic IIIC T90 C...T120 C Dc Ui 24 V II 3 G Ex ic IIC T6...T4 Gc II 3 D Ex tc IIIC T90 C Dc II 3 D Ex ic IIIC T90 C...T120 C Dc Ui 32 V, Ii 380 mA, Pi 5.32 W, Ci 5 nF, Li 10 H.
time function . 3-49 3.7.3 Vertical axis freefall prevention function . 3-50 3.7.4 Residual risks of the forced stop function (EM2) . 3-50 3.8 Alarm occurrence timing chart . 3-51 3.8.1 When you use the forced stop deceleration function . 3-51 3.8.2 When you do not use the forced stop deceleration function . 3-52 3.9 Interfaces . 3-53 3.9.1 Internal connection diagram . 3-53 1 - 3.9.2 Detailed
Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Load to motor inertia moment ratio PB06 7 7 Function selection E-3 PE41 0 0 LEFS25(L,R)T6 LEFS32(L,R)T7 LEFS40(L,R)T8 /LEKFS25(L,R)T6 /LEKFS32(L,R)T7 /LEKFS40(L,R)T8 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para.
OPTIONS AND PERIPHERAL EQUIPMENT (3) Dimensions (a) EMC filter HF3010A-UN [Unit: mm] 4-5.5 7 3-M4 3-M4 M4 32 2 110 4 85 2 IN Approx. 41 258 4 65 4 273 2 288 4 300 5 HF3030A-UN/HF-3040A-UN [Unit: mm] 6-K 3-L 3-L G 1 E 1 F 2 D 2 M J 2 C 1 C 1 B 2 H 2 A 5 Model Dimensions [mm] A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25 length: 8 M5 M4 HF3040A-UN
(3) (a) EMC HF3010A-UN [:mm] 4-5.5 7 3-M4 3-M4 M4 32 2 110 4 85 2 IN (41) 258 4 65 4 273 2 288 4 300 5 HF3030A-UNHF3040A-UN [:mm] 6-K 3-L 3-L G 1 D 2 E 1 F 2 M J 2 C 1 C 1 H 2 B 2 A 5 [mm] A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25 8 M5 M4 HF3040A-UN 11 30 11.
Type: Relay Device, Type: Smart rotary type, Specification: With Intrinsically safe explosion-proof (ATEX) + Output function + HART communication function, Pressure(MPa): 1.0, Fork lever type fitting: N/A, Lever unit: N/A, External scale plate: N/A, Body cover with window for LCD: Available, Air connection port: 1/4NPT, Conduit connection port: 1/2NPT, Explosion-proof structure: ATEX Directive
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(b) Cable internal wiring diagram MR-J3ENCBL2M-L/-H MR-J3ENCBL5M-L/-H LE-CSE-RA LE-CSE-SA LE-CSE-SB LE-CSE-RB MR-J3ENCBL10M-L/-H Driver Encoder side Servo amplifier connector side connector P5 LG 1 2 3 P5 6 LG MR MRR MR MRR 3 4 5 4 BAT BAT 9 2 Plate SD 9 SHD 13 6 13.
No Maieria P a r t n o . l , l , l l rRv1000 tRv2000 1 Diaphragm asgembly H-NBR, etc P538010.6 P$8m0-3 P538030-5 Slainless steel, H-NBR P53801005 Brass, H-NBR P53803015 Brass, H-NBR P53803016 Fixed orifice sus$4 P36202018 P36202018 P mn17 O-ring H,I'BR o 4 3 5 x 1 0 6 x l 0 8 3 1 x 1 O-ring H-NBR 0 2 x 0 6 o 3 2 \ 1 O-rlng NBR JtsB240t P16 NoE 1) O-ring NBR ol.7 x 0.85 o 2 . 5 \ ' l O-ring
No Maieria P a r t n o . l , l , l l rRv1000 tRv2000 1 Diaphragm asgembly H-NBR, etc P538010.6 P$8m0-3 P538030-5 Slainless steel, H-NBR P53801005 Brass, H-NBR P53803015 Brass, H-NBR P53803016 Fixed orifice sus$4 P36202018 P36202018 P mn17 O-ring H,I'BR o 4 3 5 x 1 0 6 x l 0 8 3 1 x 1 O-ring H-NBR 0 2 x 0 6 o 3 2 \ 1 O-rlng NBR JtsB240t P16 NoE 1) O-ring NBR ol.7 x 0.85 o 2 . 5 \ ' l O-ring
Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Load to motor inertia moment ratio PB06 7 7 Function selection E-3 PE41 0 0 LEFS25(L,R)T6 LEFS32(L,R)T7 LEFS40(L,R)T8 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.