XM, XY

Valve side exhaust 493 XMH, XYH Series Dimensions XMH/Angle type C D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) H J B G A A (mm) Model A 100.5 114 162.5 179.5 B 38 48 66 79 C 1 1 2 2 D 30 40 55 75 Fn 34 70 Fc 17 26 41 52 G 35 40.5 57 70 H 18 21.5 30 35 J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMH-16 XMH-25 XMH-40 XMH-50 40 50 65 70 P.C.D 27 P.C.D 58.7 XYH/In-line type D C G C H B J E A Fn (KF

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 5 Series XMC, XYC Dimensions XMC/Angle type C D L2 (KF flange) Fd Fc Fn C (Fc) L1 (K flange) (CF flange) J H B G A A L2 (mm) Model A 110 120 171 183 209 250 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H J P.C.D L1 6-4.4 6-6.6 8-8.4 XMC

1

KQ2H KQ2S SY530--01 4A, 2B 1/8 1P, 5EA, 3EB 1/4 SY5000 SS5Y5-50/51/52 (R) Manifold base X, PE M5 1/4 4A, 2B 1/8 Series Model Port size Fittings Piping port Applicable tube O.D. 2 3.2 4 6 8 12 10 KQ2H KQ2S KQ2H KQ2S KQ2H KQ2S KQ2H KQ2S SY730--02 4A, 2B 1/4 1P, 5EA, 3EB 3/8 SY7000 SS5Y7-50/51/52 (R) Manifold base X, PE M5 4A, 2B 1/4 Trademark DeviceNet is a trademark of ODVA.

Additionally, the 52-versions comply with ATEX directive category 1 as intrinsically safe and explosion proof. Two temperature classes are available, including T4/T5, or T6. The IP8001 lever type is for stem type valves, typically with diaphragm actuators. The IP8101 rotary type is for rotary valves with oscillating actuators.

Additionally, the 52-versions comply with ATEX directive category 1 as intrinsically safe and explosion proof. Two temperature classes are available, including T4/T5, or T6. The IP8001 lever type is for stem type valves, typically with diaphragm actuators. The IP8101 rotary type is for rotary valves with oscillating actuators.

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: None (Standard), External Scale Plate: H (w/External Scale Plate), LCD Window: None, Connection, Air - Electric: 3 (NPT1/4 - NPT1/2), ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Type: Smart Rotary Type, Pressure Gauge: 1.0 MPa, Accessories: None (Standard), External Scale Plate: w/External Scale Plate, LCD Window: None, Connection, Air - Electric: NPT1/4 - NPT1/2, ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Electric Actuator/Slider Type

How to Order T6 LEJS 40 500 A q w e r t y u i o q Size w Motor type 1 e Lead [mm] Symbol LEJS40 LEJS63 H 24 30 A 16 20 B 8 10 40 63 Symbol Type Output [W] Actuator size Compatible driver T6 AC servo motor (Absolute encoder) 100 40 LECSS2-T5 T7 200 63 LECSS2-T7 1 For motor type T6, the compatible driver part number sufx is T5. r Stroke [mm] 2 y Cable type 4, 6 u Cable length [m] 5, 6 i Driver

7ND9071en

IEC 60079-0:2011 IEC 60079-1:2007 IEC 60079-31:2008 INMETRO ND_Z NCC 12.0793 X NCC 12.0794 X Ex ia IIC T4/T5/T6 Ga Ex ia IIC T4/T5/T6 Gb Input: Ui 28 V, Ii 120 mA, Pi 1 W, Ci 22 nF, Li 53 H Output: Ui 28 V, Ii 120 mA, Pi 1 W, Ci 22 nF, Li 53 H.

AC Servo Motor Driver (Pulse input type/Positioning type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 * : J Z j z 1 0 1 1 11 + ; K [ k { 1 1 0 0 12 , < L l | 1 1 0 1 13 = M ] m } 1 1 1 0 14 . > N ^ n 1 1 1 1 15 / ?

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Encoder Type Capacity S SSCNET/H type Absolute encoder T5 AC Servo motor (T6) *1 100W T7 AC Servo motor (T7) *1 200W Absolute T8 400W AC Servo motor (T8) *1 Power supply T9 AC Servo motor (T9) *1 750W *1 This is a symbol of motor type (actuator part). AC200VAC240V 50/60Hz 2 1 9 1.

AC Servo Motor Driver (Network card type ）

(PFH) PFH = 6.4 10-9 [1/h] Number of on/off times of STO 1,000,000 times LVD: EN 61800-5-1 CE marking EMC: EN 61800-3 MD: EN ISO 13849-1, EN 61800-5-2, EN 62061 Note 1.

LEC-OM07605CN

46 D 62 E 47 E 63 F 48 F 64 4 9 4. 4.3.2 (1) 1.6 s 0.2 s (1 ) (2 ) b: Ready offOFF c: Ready onOFF d: Ready onON (2) ((2)((1)AL.32 0.8s 0.8s 0.2s (2 ) (1 ) (2 ) (1 ) n 4 10 4. 4.3.3 (1) ON ON (SSCNET/H ) (SSCNET/H) ON (SSCNET/H ) (SSCNET/H) () () : 1 [AL. 50 1] () :1 [AL.50 1] () Ready off OFF 0.8 s Ready on 0.8s 0.8 s () 0.8s () Ready on Off on :1 [AL.E1 1] : 1 [

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

15

1 1 1 1 1 1 1 1 Description Quantity Motor type NZ NY NX NM1 NM2 Motor side hub 1 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 1 1 1 1 Ring spacer 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 Hexagon socket head cap screw (for motor flange fixing)* 2 2 Ring spacer 1 1 * For screw sizes, refer to the hub mounting dimensions

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

Vacuum

No Maieria P a r t n o . l , l , l l rRv1000 tRv2000 1 Diaphragm asgembly H-NBR, etc P538010.6 P$8m0-3 P538030-5 Slainless steel, H-NBR P53801005 Brass, H-NBR P53803015 Brass, H-NBR P53803016 Fixed orifice sus$4 P36202018 P36202018 P mn17 O-ring H,I'BR o 4 3 5 x 1 0 6 x l 0 8 3 1 x 1 O-ring H-NBR 0 2 x 0 6 o 3 2 \ 1 O-rlng NBR JtsB240t P16 NoE 1) O-ring NBR ol.7 x 0.85 o 2 . 5 \ ' l O-ring

Vacuum

No Maieria P a r t n o . l , l , l l rRv1000 tRv2000 1 Diaphragm asgembly H-NBR, etc P538010.6 P$8m0-3 P538030-5 Slainless steel, H-NBR P53801005 Brass, H-NBR P53803015 Brass, H-NBR P53803016 Fixed orifice sus$4 P36202018 P36202018 P mn17 O-ring H,I'BR o 4 3 5 x 1 0 6 x l 0 8 3 1 x 1 O-ring H-NBR 0 2 x 0 6 o 3 2 \ 1 O-rlng NBR JtsB240t P16 NoE 1) O-ring NBR ol.7 x 0.85 o 2 . 5 \ ' l O-ring

AC Servo Motor Driver (SSCNET /H Type)

Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Load to motor inertia moment ratio PB06 7 7 Function selection E-3 PE41 0 0 LEFS25(L,R)T6 LEFS32(L,R)T7 LEFS40(L,R)T8 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Air Cylinder NCA1 Series

G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 REFER TO PAGE 22 FOR OPTIONAL ROD THREADS XB6 H I G H T E M P E R AT U R E 23 Air Cylinder Expanded Series NCA1 ACCESSORIES Eye Brackets Part No CB CD DD E F FL LR M MR R NCA1-P150 3/4 1/2 13/32 2 1/2 3/8 1 1/8 3/4 1/2 9/16 1.63 NCA1-P325 1 1/4 3/4 17/32 3 1/2 5/8 1 7/8 1 1/4 3/4 7/8 2.56 NCA1-P800 1 1/2 1 21/32 4 1/2 3/4 2 1/4 1 1/2 1 1 1/4 3.25 NCA1