Additionally, the 52-versions comply with ATEX directive category 1 as intrinsically safe and explosion proof. Two temperature classes are available, including T4/T5, or T6. The IP8001 lever type is for stem type valves, typically with diaphragm actuators. The IP8101 rotary type is for rotary valves with oscillating actuators.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Load Black Blue Relay Black Blue Load Switch 1 Switch 1 Switch 1 Load Relay contact Brown Black Blue Brown Black Blue Brown Black Blue Switch 2 Relay Switch 2 Switch 2 Indication lights up when both switches are ON. 2-wire (2 pcs.)

XM, XY

flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

1

VM 111.6 111.6 1P XT34 B 12 B 12 2 B 2 B 2 B 2 B 3.6 14 One-touch fitting (SUP port, EXH port) Applicable tube O.D.: 4, 5/32" : 6, 1/4" One-touch fitting (SUP port, EXH port) Applicable tube O.D.: 4, 5/32" : 6, 1/4" P 1 63.1 2B 2 3/5 E B 2 B A 4 A 4 4A 52> C6: 92.3 N7: 96.1 C6: 91.8 N7: 95.6 P 1 L6 : 61.3 LN7: 63.8 3/5 E 2 B 2 B A 4 A 4 52>

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: D (Fork Lever-type Fitting S), External Scale Plate: None, LCD Window: W (Body w/LCD Window)

Type: Smart Rotary Type, Pressure Gauge: 1.0 MPa, Accessories: Fork Lever-type Fitting S, External Scale Plate: None, LCD Window: Body w/LCD Window, Connection, Air - Electric: -, ATEX Temperature: -

Table of Contents

51 to 12-2-52 for option specifications. 12-2-43 43 Series MHZJ2 Construction: MHZJ2-6 Double acting/With fingers open Single acting/Normally open !

MHZ

51 to 12-2-52 for option specifications. 12-2-43 43 Series MHZJ2 Construction: MHZJ2-6 Double acting/With fingers open Single acting/Normally open !

MHZ

51 to 12-2-52 for option specifications. 12-2-43 43 Series MHZJ2 Construction: MHZJ2-6 Double acting/With fingers open Single acting/Normally open !

Table of Contents

Qty. 1 1 2 2 2 2 4 2 !4 !

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

2!6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: None (Standard), External Scale Plate: H (w/External Scale Plate), LCD Window: None, Connection, Air - Electric: 3 (NPT1/4 - NPT1/2), ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: None (Standard), External Scale Plate: H (w/External Scale Plate), LCD Window: None, Connection, Air - Electric: 1 (NPT1/4 - G1/2), ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Type: Smart Rotary Type, Pressure Gauge: 1.0 MPa, Accessories: None (Standard), External Scale Plate: w/External Scale Plate, LCD Window: None, Connection, Air - Electric: NPT1/4 - NPT1/2, ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Type: Smart Rotary Type, Pressure Gauge: 1.0 MPa, Accessories: None (Standard), External Scale Plate: w/External Scale Plate, LCD Window: None, Connection, Air - Electric: NPT1/4 - G1/2, ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Type: Relay Device, Type: Smart rotary type, Specification: With Intrinsically safe explosion-proof (ATEX) + Output function + HART communication function, Pressure(MPa): 1.0, Fork lever type fitting: N/A, Lever unit: N/A, External scale plate: N/A, Body cover with window for LCD: Available, Air connection port: 1/4NPT, Conduit connection port: 1/2NPT, Explosion-proof structure: ATEX Directive

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: C (Fork Lever-type Fitting M), External Scale Plate: H (w/External Scale Plate), LCD Window: W (Body w/LCD Window), Connection, Air - Electric: 3 (NPT1/4 - NPT1/2), ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

1

ZZ + 2 x Stroke S + 2 x Stroke Series CA2 Bore size (mm) ZZ S GC 40 231 169 29 50 250 181 33 63 269 197 33 80 321 233 41 100 342 253 41 ZZ + 2 x Stroke Series MB MB, MB1 Common Bore size (mm) ZZ S GC S + 2 x Stroke ZZ + 2 x Stroke 32 231 180 36 40 235 180 38 50 262 200 41 Series MB1 63 262 200 43 GC 80 320 244 52 100 320 244 52 ZZ + (2 x Stroke) S + (2 x Stroke) Stroke range is shown as

CLA

MlaXt.5 32 35 11( I 86 11,5 V, ~ 2( 40 1102 1 26 67 18 37 140 1119 1102 1129 y , y, 78 I 25 52 1,,3 I 21 I 30 72 I 23 " 1 17 IMl2x1. 111 17 17 I M22 Xl .5 Wthboot .. f h , ZZ 43 15 59 ~ 52 15 66 ~ 52 17.5 66 'I, 65 2 1.5 81 % I 4( 1133 116 140 V, V. ' 92 3( 52 1124 I 21 I 31 I 76 I 25 100 -1 0IX 119 IM12X17!

MXW

For details about auto switches with pre-wire connector, refer to page 8-30-52. 8-7-6 7 Long Stroke Slide Table Series MXW Specifications MXW8 MXW16 MXW20 MXW12 MXW25 Model 8 x 2 (11 or its equivalent) 12 x 2 (17 or its equivalent) 16 x 2 (23 or its equivalent) 20 x 2 (28 or its equivalent) 25 x 2 (35 or its equivalent) Bore size (mm) Rc 1/8 M5 x 0.8 Piping port size Air Fluid Double acting