2

120 5.1 T0604-500-X64 475 200 52 200 9.4 TH0604N-250-X64 475 200 52 120 9.4 D1 TH0604N-500-X64 475 200 52 220 18.5 D3 W D2 Related Products One-touch Fittings KQ2 Body type: Total 51 models Metal One-touch Fittings KQB2 Fluid temperature: 5 to 150C Applicable tubing O.D.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.

XM, XY

flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

1

Manifold Metal Base Plug-in Page 40 Type 50/ Side ported Type 51/ Bottom ported Type 52/ Top ported Type 50/Side Ported, Type 51/Bottom Ported, Type 52/Top Ported Page 41 Metal Base Plug-in D-sub connector D-sub Connector, Flat Ribbon Cable, PC Wiring System [IP40] Flat ribbon cable Page 43 Type 50/Side Ported Page 43 Type 51/Bottom Ported PC wiring Page 63 Type 52/Top Ported Page 68 Wiring

AC Servo Motor Driver (Network card type ）

ell time 100 ms Dw ell time 200 ms 5.00 Position address 0 5.00 10.00 15.00 Target point table 1 ON OFF Controlw ord bit 4 (New set-point) Point actual value 1 M code actual value 05 16 11 16.

Table of Contents

MHT MHY MHW Weight Auto Switch Internal Circuit D-F8N MRHQ (g) D-F8N D-F8P D-F8B Auto switch model DC (+) Brown Misc. 0.5 7 7 7 Lead wire length (m) 3 32 Main circuit of switch Main circuit of switch Main circuit of switch 32 32 DOUT Black 5 52 52 52 20DC () Blue Dimensions D-F8N, D-F8P, D-F8B D-F8P Mounting screw M2.5 x 4l Slotted set screw DC (+) Brown 4.3 Indicator light 2 2.7 OUT Black

MHZ

Weight (g) End boss type (Symbol) Model W K M E 70 70 70 70 MHZJ2-10 165 165 165 165 MHZJ2-16 290 290 290 290 MHZJ2-20 525 525 525 525 MHZJ2-25 12-2-52 52 Auto Switch Series MHZ Auto Switch Hysteresis Auto switches have hysteresis similar to micro switches. Use the table below as a guide when adjusting auto switch positions, etc.

MHZ

Weight (g) End boss type (Symbol) Model W K M E 70 70 70 70 MHZJ2-10 165 165 165 165 MHZJ2-16 290 290 290 290 MHZJ2-20 525 525 525 525 MHZJ2-25 12-2-52 52 Auto Switch Series MHZ Auto Switch Hysteresis Auto switches have hysteresis similar to micro switches. Use the table below as a guide when adjusting auto switch positions, etc.

Table of Contents

Tentative determination of L type (For intermediate stops, refer to page 8-15-52.) (Refer to page 8-31-1.)

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Tentative determination of L type (For intermediate stops, refer to page 8-15-52.) (Refer to page 8-31-1.)

Parallel Style Air Gripper Series MHZ

MHZ16-PS MHZ-A1602(N) MHZ20-PS MHZ-A2002(N) MHZ25-PS MHZ-A2502(N) MHZ32-PS MHZ-A3202 MHZ-A3202-1 MHZ-A3202-2 MHZ-A3202-3 -X MHZ2-(N) MHZ2-(N)1 MHZ2-(N)2 MHZ2-3 MHZ-A1002(N)-1 MHZ-A1602(N)-1 MHZ-A2002(N)-1 MHZ-A2502(N)-1 Finger assembly Mounting screw MHZ-A1002(N)-2 MHZ-A1002-3 MHZ-A1602(N)-2 MHZ-A1602-3 MHZ-A2002(N)-2 MHZ-A2002-3 MHZ-A2502(N)-2 MHZ-A2502-3 MRHQ MHZ2-D MHZ2-S MHZ2-C MHZ2-DW

IP8001 Series

Please see ATEX Intrinsic Safety Type of Explosion Protected Construction (52-IP8001-0*4).

Direct Solenoid

Perl t Nns 4024 ilVS /1034 l'll/S 4044 2 PGition 3 Podtoo 2 Posilion 3 Poition 2 Poition 1121.42244324,4424 r13,,42344334, 4/|i|{ 4144,4244 12 VDC A06-51 AO9-51 A07-51 A10-51 A08-51 24 VDC A06-52 409-52 A07-52 A10-52 A08-52 48 VDC A06-53 A09-53 A07-53 A10-53 A08-53 Powar Conaumptlon: (13.2 WEtts) D.C. solenoidE alwaF draw the same amount of powsr, regardless of th6 posltlon of the plunger

1

Dimensions Double acting, Single rod Single acting, Spring return Single acting, Spring extend Z + Stroke H + Stroke Z Z Z Double acting Single acting (Spring return) Single acting (Spring extend) Action F H F H Without switch With switch Without switch With switch Without switch With switch Bore size (mm) 5 10 15 5 10 15 5 10 15 5 10 15 6 8 9 42 42 9 8 47 52 57 47 52 57 52 62 67 52 62 67

CLA

MlaXt.5 32 35 11( I 86 11,5 V, ~ 2( 40 1102 1 26 67 18 37 140 1119 1102 1129 y , y, 78 I 25 52 1,,3 I 21 I 30 72 I 23 " 1 17 IMl2x1. 111 17 17 I M22 Xl .5 Wthboot .. f h , ZZ 43 15 59 ~ 52 15 66 ~ 52 17.5 66 'I, 65 2 1.5 81 % I 4( 1133 116 140 V, V. ' 92 3( 52 1124 I 21 I 31 I 76 I 25 100 -1 0IX 119 IM12X17!

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa)

Type: Smart Rotary Type, Pressure Gauge: 1.0 MPa, Accessories: -, External Scale Plate: -, LCD Window: -, Connection, Air - Electric: -, ATEX Temperature: -

Low Profile Air Gripper Series MHF2

(mm) MHZ2-20D3 42 Height Bore size 19 25 33 41 8 12 16 20 MHF2-12D 72.8 52 25 50 The low profile design saves space and reduces bending moments. Improved accuracy with smooth operation Low profile design Reduced bending moment and vibration Stroke selection is available. 3 standard stroke lengths are available for each bore size.

MLGP

20 25 32 40 50 63 80 100 26.5 30.5 31.5 34 35 38 43 51.5 MLGC CNG LOCK MNB 20 to 32 CNA Body length Manual unlocking bolt CNS LOCK Body length is the same as the standard MGP CLS Holding a clamped condition CLQ Locking direction is selectable MLGP Compact Guide Cylinder with Lock Series MLGP 20, 25, 32, 40, 50, 63, 80, 100 RLQ Extension locking Retraction locking W MLU LOCK ML1C A B B A DW

MXW

For details about auto switches with pre-wire connector, refer to page 8-30-52. 8-7-6 7 Long Stroke Slide Table Series MXW Specifications MXW8 MXW16 MXW20 MXW12 MXW25 Model 8 x 2 (11 or its equivalent) 12 x 2 (17 or its equivalent) 16 x 2 (23 or its equivalent) 20 x 2 (28 or its equivalent) 25 x 2 (35 or its equivalent) Bore size (mm) Rc 1/8 M5 x 0.8 Piping port size Air Fluid Double acting