Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

When pressure is applied to the pilot port M, the valve M is removed from the body seat surface and fully opens. 4 2 0 [4] Closing of the initial exhaust valve, the main exhaust valve By removing the pressure from the pilot ports S and M, both valves return to their sealed position. 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.4 4.0 4.5 5.0 5.5 6.0 Adjustment nut rotations n 9 Series XMD, XYD Dimensions

Direct Solenoid

Perl t Nns 4024 ilVS /1034 l'll/S 4044 2 PGition 3 Podtoo 2 Posilion 3 Poition 2 Poition 1121.42244324,4424 r13,,42344334, 4/|i|{ 4144,4244 12 VDC A06-51 AO9-51 A07-51 A10-51 A08-51 24 VDC A06-52 409-52 A07-52 A10-52 A08-52 48 VDC A06-53 A09-53 A07-53 A10-53 A08-53 Powar Conaumptlon: (13.2 WEtts) D.C. solenoidE alwaF draw the same amount of powsr, regardless of th6 posltlon of the plunger

LEC-OM07605CN

UL/CSA2mm (2) (2) a FVD5.5-4 YNT-1210S b (1) 8-4NS YHT-8S c FVD2-4 YNT-1614 d FVD2-M3 e FVD1.25-M3 YNT-2216 f FVD14-6 YF-1 YNE-38 DH-122 DH-112 JST g FVD5.5-6 YNT-1210S h FVD22-6 YF-1 YNE-38 DH-123 DH-113 i FVD38-8 YF-1 YNE-38 DH-124 DH-114 j FVD5.5-8 YNT-1210S k FVD8-6 YF-1E-4 YNE-38 DH-121 DH-111 1. 2. 11 16 11.

5

Bore size (mm) Dd9 L l m d Part no.

LEC-OM02704CN

-112DH122 d FVD22-6 DH-113DH123 (1)e 38-6 YPT-60-21 TD-112TD-124 YF-1E-4 YET-60-1 (1)f R60-8 YPT-60-21 TD-113TD-125 YF-1E-4 YET-60-1 g FVD2-4 YNT-1614 h FVD2-M3 j FVD5.5-6 YNT-1210S k FVD5.5-8 l FVD8-6 DH-111DH121 m FVD14-8 DH-112DH122 YF-1E-4 YNE-38 n FVD22-8 DH-113DH123 (1)p R38-8 YPT-60-21 TD-112TD-124 YF-1E-4 YET-60-1 q FVD2-6 YNT-1614 1. 2. 13 16 13 (2) 13.3 1 (2) (1) [mm] [m]

LEC-OM02904

m i m 4 8 1 . 5 1 6 1 ( 1 8 . 5 5 ) m a x .

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: None (Standard), External Scale Plate: None, LCD Window: None, Connection, Air - Electric: M (Rc1/4 - M20x1.5)

Type: Relay Device, Type: Smart rotary type, Specification: With Intrinsically safe explosion-proof (ATEX) + Output function + HART communication function, Pressure(MPa): 1.0, Fork lever type fitting: N/A, Lever unit: N/A, External scale plate: N/A, Body cover with window for LCD: N/A, Air connection port: Rc1/4, Conduit connection port: M20 × 1.5, Explosion-proof structure: ATEX Directive

Rotary Table/

to the plate (also the same in case of a thicker plate) = m 2 r2 = m 5 2r2 = m 4 r2 = m 12 a2 + b2 !

CA2

Without rod boot With rod boot P Bore size (mm) K KA M MM N S H l ZZ d e f h ZZ C76 6 84 15 14 11 M14 x 1.5 27 1/4 51 146 52 43 59 1/4 stroke 154 40 7 90 15 18 11 M18 x 1.5 30 3/8 58 159 58 52 66 1/4 stroke 167 50 C85 7 98 17.5 18 14 M18 x 1.5 31 3/8 58 170 58 52 66 178 1/4 stroke 63 10 116 21.5 22 17 M22 x 1.5 37 1/2 71 204 80 65 80 213 1/4 stroke 80 C95 10 126 21.5 26 17 M26 x 1.5 40 1

Table of Contents

Lead wire length symbols: 0.5 m Nil (Example) C73C 3 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed, refer to page 8-22-17 for details. For details about auto switches with pre-wire connector, refer to page 8-30-52.

Smooth Cylinder/Low Speed Cylinder

1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state auto switches marked with are produced upon receipt of order.

CNA

20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 123 144 15 17 17 21 21 52 56.5 67 83 98 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 14 18 18 22 26 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Stroke range (mm) e l M MM N P Q H S T V W ZZ f h (Both sides) (One

CNA

Bore size (mm) Bore size (mm) Stroke range (mm) l K KA M MM N P Q H S T V W ZZ d e f h ZZ 40 50 63 80 100 40 50 63 80 100 1/4 stroke 6 14 11 M14 x 1.5 27 1/4 37 to 39.5 51 153 37.5 9 8 215 52 43 15 59 223 20 to 800 7 18 11 M18 x 1.5 30 3/8 42 to 44.5 58 168 44 11 0 237 58 52 15 66 245 1/4 stroke 20 to 1000 7 18 14 M18 x 1.5 31 3/8 50 to 51.5 58 182 52.5 12 0 254 58 52 17.5 66 262 1/4 stroke

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

5 2r2 = m 4 r2 CRQ2 = m 12 a2 + b2 MSQ MRQ 10.

MNB

m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-6-6 7 Model Selection Series MNB Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 1000 1000 500 400 300 500 400 300 100 100 80 80 200 200 63 63 100 100 50 50 40 40 80 80 100 100 Load weight: m (kg) Load weight: m (kg) CL 63 63 50 40 30 50 40 30 32 32 50 50 40 40 CL1 20 20 32 32 MLGC 10 10 CNG

MNB

m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-6-6 7 Model Selection Series MNB Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 1000 1000 500 400 300 500 400 300 100 100 80 80 200 200 63 63 100 100 50 50 40 40 80 80 100 100 Load weight: m (kg) Load weight: m (kg) CL 63 63 50 40 30 50 40 30 32 32 50 50 40 40 CL1 20 20 32 32 MLGC 10 10 CNG

MNB

P-76 (M)

Cylinder with Lock

Lead wire length symbols: 0.5 m Nil (Example) M9NW 3 m L (Example) M9NWL 1 m M (Example) M9NWM 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order. Since there are applicable auto switches other than those listed above, refer to page 30 for details. The D-A9l/M9l/P3DWAl auto switches are shipped together, but not assembled.

MB1

When replacing brackets, use the hexagon wrenches shown below. ) m m ( e z i s e r o B t l o B s t a l f s s o r c a h t d i W e u q r o t g n i n e t h g i T 0 4 , 2 3 7 4 2 1 C 8 4 2 3 B M 4 1 . 5 3 6 , 0 5 9 4 2 1 C 8 4 0 5 B M 5 1 1 0 0 1 , 0 8 t o o F 1 5 2 1 C A 8 4 0 8 B M 6 5 2 r e h t O 1 5 2 1 C B 8 4 0 8 B M 32 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK ASIA CHINA