Additionally, the 52-versions comply with ATEX directive category 1 as intrinsically safe and explosion proof. Two temperature classes are available, including T4/T5, or T6. The IP8001 lever type is for stem type valves, typically with diaphragm actuators. The IP8101 rotary type is for rotary valves with oscillating actuators.

Type: 001 (Smart Lever Type), Pressure Gauge: 3 (1.0 MPa), Accessories: None (Standard), External Scale Plate: None, LCD Window: None, Connection, Air - Electric: Rc1/4 - G1/2, ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.

XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

1

1.5 1.5 R port (3 port only) Symbol 2 port (A) 2 (103.6) 12 10 1 (P) (74.1) 3 port 52 (A) 2 22 13 32 12 10 16 1 (P) 3 (R) 2 x 1/4 2 x 5.5 mounting hole 30 25 40 * 0.5 MPa supply F.O.F.* 52 N T.T. 6.5 mm Push button (Extended) VM220-02-32 (R, B, G, Y) A VM230-02-32 (R, B, G, Y) A Panel mounting hole 38 T.T. 23 Max. 6 3 1.5 1.5 23.5 22.1 Symbol 2 port R port (3 port only) (A) 2 12 10 (97.6

Type: 001 (Smart Lever Type), Pressure Gauge: 3 (1.0 MPa), Accessories: E (For Stroke 35 to 100mm w/Lever Unit), External Scale Plate: None, LCD Window: None, Connection, Air - Electric: 3 (NPT1/4 - NPT1/2), ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Type: 001 (Smart Lever Type), Pressure Gauge: 3 (1.0 MPa), Accessories: None (Standard), External Scale Plate: None, LCD Window: None, Connection, Air - Electric: 2 (NPT1/4 - M20x1.5), ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Type: Smart Lever Type, Pressure Gauge: 1.0 MPa, Accessories: None (Standard), External Scale Plate: None, LCD Window: None, Connection, Air - Electric: NPT1/4 - M20x1.5, ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Type: 001 (Smart Lever Type), Pressure Gauge: 3 (1.0 MPa), Accessories: F (For Stroke 50 to 140mm w/Lever Unit), External Scale Plate: None, LCD Window: W (Body w/LCD Window), Connection, Air - Electric: 1 (NPT1/4 - G1/2), ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Type: Smart Lever Type, Pressure Gauge: 1.0 MPa, Accessories: For Stroke 50 to 140mm w/Lever Unit, External Scale Plate: None, LCD Window: Body w/LCD Window, Connection, Air - Electric: NPT1/4 - G1/2, ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Type: 001 (Smart Lever Type), Pressure Gauge: 3 (1.0 MPa), Accessories: None (Standard), External Scale Plate: None, LCD Window: None, Connection, Air - Electric: 3 (NPT1/4 - NPT1/2)

Type: Relay Device, Type: Smart lever type, Specification: With Intrinsically safe explosion-proof (ATEX) + Output function + HART communication function, Pressure(MPa): 1.0, Fork lever type fitting: N/A, Lever unit: N/A, External scale plate: N/A, Body cover with window for LCD: N/A, Air connection port: 1/4NPT, Conduit connection port: 1/2NPT, Explosion-proof structure: ATEX Directive Category

Electric Actuator/Slider Type

3 !

7ND9071en

X II 3 G Ex nA IIC T6...T4 Gc II 3 D Ex tc IIIC T90 C Dc II 3 G Ex ic IIC T6...T4 Gc II 3 D Ex tc IIIC T90 C Dc II 3 D Ex ic IIIC T90 C...T120 C Dc Temperature range: T4: -40 to +85 C; T5: < +75 C; T6: < +60 C. Arctic temperature option.

LEC-OM07605CN

(b)(SW1) 164( (3)(c)) (SW1) 8 7 6 9 A 5 B 4 C 3 D 2 1 0 F E (c) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

3 !

15

3 mm or more.

Vacuum

Digital Display (3% digit LCO) . Predicted Failure Function . 2 Setpoint Use . High Accuracy O Do not subiect body to excessive exiernal force. O Plping tightening to.ques How To Older (Exampre) 3 4 ( 3 1 3 1 7 ( 1 5 1 5 2 0 ( 1 7 NZXl Nozzle Diameter (Same as Std.) Eiector Exhaust Type (Same as Std.)

Vacuum

Digital Display (3% digit LCO) . Predicted Failure Function . 2 Setpoint Use . High Accuracy O Do not subiect body to excessive exiernal force. O Plping tightening to.ques How To Older (Exampre) 3 4 ( 3 1 3 1 7 ( 1 5 1 5 2 0 ( 1 7 NZXl Nozzle Diameter (Same as Std.) Eiector Exhaust Type (Same as Std.)

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11