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Note Option mounting diagram Single valve AXT632-17-4 (M3 x 37) 3 Valve 0 Blanking plate (VVQ4000-10A1 5 ) AXT632-38-1 (M3 x 14) 4 For manifold Blanking plate Valve + Individual SUP spacer (VVQ4000-P1 5 02 03 ) q AXT632-17-10 (M3 x 62) 3 For manifold w AXT632-17-19 (M3 x 26) 2 Valve + Individual EXH spacer (VVQ4000-R1 5 -02 03) q AXT632-17-10 (M3 x 62) 3 For manifold w AXT632-17-19 (M3 x

2

Example) AFM30-03BD-R-A AFD A 30 q 03 e BD r t w Made to Order (Refer to pages 177 and 178 for details.)

Table of Contents

Option Stainless steel Standard Brass BC6 Brass BC6 NBR Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless steel, Brass

1

SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series !

2/3 Port Valve

Port size 01 02 03 1 8 1 4 3 8 Thread Rc(PT) NPTF G(PF) NPT Refer to table q for configuration.

Proposals for Energy Saving

vacuum pressure S L -88kPa -48kPa VAC port size Note) Symbol Size Type 6 10 12 16 SUP port size Note) One-touch One-touch One-touch One-touch Threaded Threaded Threaded Threaded 06 10 12 16 01 02 03 04 Symbol Size Type 6 8 10 12 Rc 1/8 Rc 1/4 Rc 3/8 06 08 10 12 01 02 03 One-touch One-touch One-touch One-touch Threaded Threaded Threaded Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Table q Connection

VXP21/22/23

Description Size Standard Brass BC6 Brass BC6 NBR Option Stainless steel Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless

Table of Contents

04 03 04 q Description No.

VXD21/22/23

Option Stainless steel Standard Brass BC6 Brass BC6 NBR Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless steel, Brass

Fluoropolymer Piping Equipment

Applicable flange size Applicable tubing size (mm) 2 4 4 5 5 5 6 6 6 Size Symbol Applicable flange size Applicable tubing size (inch) 2 4 4 5 5 5 6 6 6 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 6 x 4 1/4" x 5/32" 2 2 3 1 2 3 2 3 4 B B C A B C B C D LVW 12 x 10 1/2" x 3/8" LQ1 19 x 16 3/4"

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

VQ5000

04 03 04 Double check spacer with residual pressure release valve VVQ5000-25A-1 Release valve spacer VVQ5000-24A-1D SUP stop valve spacer VVQ5000-37A-1 SUP blocking plate VVQ5000-16A-1 P R1 EXH blocking plate VVQ5000-16A-2 R2 Rc3/8 03 Rc1/2 04 04 Bottom ported Rc1/2 Single wiring Note 2) Special wiring specifications Double wiring Description/Model Stations 1 2 3 4 5 6 7 8 9 10 11 12 Note

2/3 Port Valve

-6A VNA1-8A VNA1-10A EZ, TZ, DZ: 9mm longer 4.2-7 VNA 10A, 15A, 20A, 25A Port size EZ, TZ, DZ: 9mm longer Main Port Rc(PT) A H I J K R F G L M B S N C T P D U Q E Model 3 8 1 2 3 4 VNA2-10A VNA2-15A VNA3-20A VNA4-25A 72.5 80.5 74.5 79.5 82.5 125.5 142.5 24.3 63 124 2.3 52 42 25 26 28 34 4.5 14 55 60.5 73 1 84 100 92 108 135.5 137 153 154 170 83.5 89.5 88.5 94.5 91.5 97.5 28.3 33.3 80 90

VQ7-6/7-8

04 03 04 Enter only when using for 2 position single or double.

Battery-less

5 r t w q y !6 !

VQ7-6/7-8

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

Pulse Valve

IN side IN side IN side 12 ATEX Compliant Pulse Valve Valve for Dust Collector 55-JSXFA Series RoHS II 2 G Ex h IIB T6 Gb II 2 D Ex h IIIB T72C Db 40C Ta +60C How to Order JSXFA B 06 R E 1 55 Compression fitting type Direct piping type e r t y w q w IN/OUT port size ATEX category 2 q Piping e Thread type E Compression fitting type1 F Direct piping type 06 3/4 (20A) 10 1 (25A) 14 1 1/2 (