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table Model Level difference t mm Model Level difference t mm MXS6 MXQ6 MXS8 MXQ8 0.5 0.3 MXS12 MXQ12 MXS16 MXQ16 0.3 MXS20 MXQ20 0.5 0.5 MXS25 MXQ25 323 Series MXF Replacement Procedure of Seal 1 Caution 1-2.

F A F Lr 16 16 16 Lr=89mm 0.035 0.14 0.04 MXS16-100 MXS16-20 MXS16-10 MXS16-125 MXS16-100 MXS1675 MXS1650 MXS1640 0.030 0.12 MXS16-125 MXS16-50 MXS16-75 MXS16-125 MXS16-30 MXS16-40 MXS16-100 0.03 0.10 0.025 Table deflection mm Table deflection mm Table deflection mm MXS1630 0.08 0.020 MXS1620 MXS1675 0.02 0.06 MXS1610 0.015 MXS1650 MXS1640 0.04 0.010 MXS1630 MXS1620 MXS1610 0.01 0.02 0.005

-10 13-/22-MXS16-20 13-/22-MXS16-30 13-/22-MXS16-40 13-/22-MXS16-50 13-/22-MXS16-75 13-/22-MXS16-100 13-/22-MXS16-125 143 MXS Air slide table 1322Dimensions / MXS16 1322Axial piping (16) MXS16-P 132253.3 Maximum 6.5 Operating port 2-M5 x 0.8 26 12 23.5 12 Other dimensions are the same as those of basic style. 144 MXS Air slide table 1322Dimensions / MXS16L / Symmetric type 1322ZZ Air cylinder

-10 13-/22-MXS16-20 13-/22-MXS16-30 13-/22-MXS16-40 13-/22-MXS16-50 13-/22-MXS16-75 13-/22-MXS16-100 13-/22-MXS16-125 789 MXS 1322Air Slide Table Dimensions: MXS16 1322Axial piping (16) MXS16-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

-10 35 4 16 40 2 10 40 29 76 75 87 MXS16-20 35 4 16 40 2 10 40 39 76 75 87 MXS16-30 35 4 16 40 2 10 40 49 76 75 87 MXS16-40 40 4 16 50 2 10 50 59 86 85 97 MXS16-50 30 6 21 30 3 15 30 69 101 100 112 MXS16-75 55 6 26 35 4 40 70 94 151 150 162 MXS16-100 65 6 39 35 5 55 70 119 199 198 210 MXS16-125 70 8 19 35 7 68 70 144 249 248 260 Courtesy of Steven Engineering, Inc. !

-10 35 4 16 40 2 10 40 29 76 75 87 MXS16-20 35 4 16 40 2 10 40 39 76 75 87 MXS16-30 35 4 16 40 2 10 40 49 76 75 87 MXS16-40 40 4 16 50 2 10 50 59 86 85 97 MXS16-50 30 6 21 30 3 15 30 69 101 100 112 MXS16-75 55 6 26 35 4 40 70 94 151 150 162 MXS16-100 65 6 39 35 5 55 70 119 199 198 210 MXS16-125 70 8 19 35 7 68 70 144 249 248 260 F O R S E R I E S MXS 20 A N D 25 B O R E S I Z E DIMENSIONS

Tightening torque Nm{kgfcm} 3.0{29} 5.0{49} 12.5{122} 25.0{245} 43.9{430} 70.4{690} Model MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 Tightening torque Nm{kgfcm} Model MXS 8 MXS12 1.67{17.1} MXS16 3.14{32.1} 10.8{110.2} MXS20 MXS25 1 N M = 0.7375 ft lb 13 MXS Series Air Slide Table Precautions Precautions on Functional Option With end lock With buffer mechanism Caution Caution 1.2 position, 4

MXS6-PS 6 8 12 16 20 25 MXS6-PS MXS8-PS MXS12-PS MXS16-PS MXS20-PS MXS25-PS !7 !8 !9 Piston seal MXS8-PS Rod seal NBR MXS12-PS Set of left nos. !7, !8, !9 O-ring MXS16-PS With end lock MXS20-PS MXS25-PS #2 #3 #4 #5 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

MXS16 (L)MXS-BT16 (L)553723.51646.77101/41.4M10 x 1M5 x 10231218.521M5 x 18

MXS16 (L)MXS-BT16 (L)553723.51646.77101/41.4M10 x 1M5 x 10231218.521M5 x 18