MXQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Repeatability Dimensions CX Model Height Width Parallelism Overall length Height tolerance MXQ12-30 MXS12-30 30 46 0.035 0.08 86 DSymmetric type is also standardized.

1

SY3000 SY5000 SY7000 Standard (0.7 MPa) Quick response type (0.7 MPa) High pressure type (1.0 MPa) SY30V-25A Gasket SY50V-25A Only metal seal type is available for the high pressure type. (1.0 MPa) a-side pilot valve Pilot cover x 1 + B tight flat head screw x 1 Coil type Nil T w Standard With power saving circuit Pilot cover Socket q w Rated voltage 5 6 24 VDC 12 VDC b-side pilot valve

Bore Size: 12mm, Port Thread: Rc, Stroke: 50mm, Adjuster: AS (Adjuster on Extension End), Function: Standard, Auto Switch: M9BV--Solid State, Gen. Purpose, 2 Wire, Vertical

Bore Size: 12mm, Port Thread: Rc, Stroke: 50mm, Adjuster: Adjuster on Extension End, Function: Standard, Auto Switch: M9BV--Solid State, Gen. Purpose, 2 Wire, Vertical, Lead Wire or Prewired Connector: -, Number: -, Stroke Adjuster: -

MXS Series Air Slide Table

-100 MXS12-75 MXS12-50 MXS12-75 0.03 0.025 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-20 MXS12-10 MXS12-100 MXS12-40 MXS12-30 MXS12-20 Table deflection mm Table deflection mm Table deflection mm 0.06 0.020 0.02 MXS12-100 MXS12-10 0.015 0.04 MXS12-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load N 1N = 0.2248

Air Slide Table

For details, refer to page 126. 46 MXQA Series Dimensions: MXQ 25A [Standard] MXQ 25A-mZ Standard type *1 If long bolts are used, they may touch the guide block and cause a malfunction, etc. Use a screw which has an intermediate length between the maximum screw-in depth and minimum screw-in depth.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-10 13-/22-MXS12-20 13-/22-MXS12-30 13-/22-MXS12-40 13-/22-MXS12-50 13-/22-MXS12-75 13-/22-MXS12-100 786 MXS 1322Air Slide Table Dimensions: MXS12 1322Axial piping (12) MXS12-P 1322Maximum 6.5 Operating port 2 x M5 x 0.8 42 18.7 20 9.5 12 Other dimensions are the same as those of basic type. 787 MXS 1322Air Slide Table Dimensions: MXS12L / Symmetric Type 1322ZZ Air Preparation Equipment

SMC

-10 13-/22-MXS12-20 13-/22-MXS12-30 13-/22-MXS12-40 13-/22-MXS12-50 13-/22-MXS12-75 13-/22-MXS12-100 140 MXS Air slide table 1322Dimensions / MXS 12 1322Axial piping (12) MXS12-P 1322Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment Maximum

A

10 40 26.5 71 70 80 MXS12-20 35 4 15 40 2 10 40 36.5 71 70 80 MXS12-30 35 4 15 40 2 10 40 46.5 71 70 80 MXS12-40 50 4 17 25 3 10 52 56.5 83 82 92 MXS12-50 35 6 15 36 3 22 60 66.5 103 102 112 MXS12-75 55 6 25 36 4 43 85 91.5 149 148 158 MXS12-100 65 6 35 38 5 52 130 116.5 203 202 212 D I M E N S I O N S S E R I E S MXS 16 Model F N G H NN I J K M Z ZZ MXS16-10 35 4 16 40 2 10 40 29 76 75 87

CATALOG

www.stevenengineering.com I FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE E235 & N347 1.186 LINEAR ACTUATORS: PRECISION SLIDE TABLE SERIES MXS D I M E N S I O N S S E R I E S MXS 12 Model F N G H NN I J K M Z ZZ MXS12-10 35 4 15 40 2 10 40 26.5 71 70 80 MXS12-20 35 4 15 40 2 10 40 36.5 71 70 80 MXS12-30 35 4 15 40 2 10 40 46.5 71 70 80 MXS12-40 50 4 17 25 3 10 52

Slide Tables MX Series

Tightening torque Nm{kgfcm} 3.0{29} 5.0{49} 12.5{122} 25.0{245} 43.9{430} 70.4{690} Model MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 Tightening torque Nm{kgfcm} Model MXS 8 MXS12 1.67{17.1} MXS16 3.14{32.1} 10.8{110.2} MXS20 MXS25 1 N M = 0.7375 ft lb 13 MXS Series Air Slide Table Precautions Precautions on Functional Option With end lock With buffer mechanism Caution Caution 1.2 position, 4

Bore Size: 12mm, Port Thread: M Thread: 6 to 16 Bore; Rc: 20, 25 Bore, Symmetric Type: Standard, Stroke: 50mm, Adjuster: A (Adjuster on Both Ends), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)

Bore Size: 12mm, Port Thread: M Thread: 6 to 16 Bore; Rc: 20, 25 Bore, Symmetric Type: Standard, Stroke: 50mm, Adjuster: Adjuster on Both Ends, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 1 pc.

Table of Contents

CXS20-20A CXS20-25A CXS20-30A CXS20-35A CXS20-40A CXS20-45A CXS20-50A CXS20-60A CXS20-70A CXS20-75A CXS20-80A CXS20-90A CXS20-100A 92 116 20 30 97 121 25 102 126 30 107 131 35 112 136 40 40 117 141 45 122 146 50 132 156 60 142 166 70 147 171 75 60 152 176 80 162 186 90 172 196 100 8-29-14 15 Dual Rod Cylinder: With Air Cushion Series CXS Dimensions: 25 57.5 22 45.5 10 2-cushion needle MX

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

(The lock cable is included when the motor with lock option is selected.) 11LEJS 25A*6 The length of the motor, encoder and lock cables are the same. o I/O cable length [m] *7 LEC Nil Without cable H Without cable (Connector only) 1 1.5 LEC S *4 When the driver type is selected, the cable is included.

XG_-OMV0028

50336-** ASSY XGT300-1-1-3AS XGT311-50336A1-1 XGT31*-50336-* A XGT311-50336A1-1A XGT31*-50336-*A A ASSY XGT311-50336A1-1C XGT31*-50336-*C A XGT311-50336A1-1F XGT31*-50336-*F A ASSY XGT300-2-1S O FKM XGT300-9-10S AS568-273 FKM XGT300-9-9S XGT31*-50336-1* AS568-271 O Kalrez R 4079 XGT300-9-11S XGT31*-50336-2* AS568-271 O (FKM) XGT300-9-7S AS568-177 XGT300-4-9S XGT300-2-5S ASSY 6 XGT300-50AS

High Vacuum Slit Valve

For XGT31-50336-A C Bonnet ASSY XGT311-50336A1-1C For XGT31-50336-C C XGT311-50336A1-1F For XGT31-50336-F C Gate ASSY XGT300-2-1S Body O-ring (FKM) XGT300-9-10S AS568-273 FKM XGT300-9-9S For XGT31-50336-1 AS568-271 Gate O-ring Kalrez4079 XGT300-9-11S For XGT31-50336-2 AS568-271 Actuator O-ring (FKM) XGT300-9-7S AS568-177 Wiper XGT300-4-9S Fixed bolt XGT300-2-5S Multiple connector XGT300-50AS

AIR CYLINDER

CS2*-OM0237Q PRODUCT NAME AIR CYLINDER MODEL / Series / Product Number 25A-CS2*125160-** 3 2/5 Contents 1. Safety Instructions P.2 2.

Compact

5 11LEJS Motor option: With lock 25A!1 LEC !2 LEC S !3 LEC SS-T @0 LEC Y !9 Motorless LAT Component Parts Component Parts LZ No. Description Material Note 1 Body Aluminum alloy Anodized No.

Air Slide Table Series MXS P.319

MXS6-PS 6 8 12 16 20 25 MXS6-PS MXS8-PS MXS12-PS MXS16-PS MXS20-PS MXS25-PS !7 !8 !9 Piston seal MXS8-PS Rod seal NBR MXS12-PS Set of left nos. !7, !8, !9 O-ring MXS16-PS With end lock MXS20-PS MXS25-PS #2 #3 #4 #5 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.