MXS

-10 MXS12-20 MXS12-30 MXS12-40 MXS12-50 MXS12-75 VWith stroke adjuster MXS12-10AS MXS12-20AS MXS12-30AS MXS12-40AS MXS12-50AS SMXS12A, #1 SMXS12A, #2 SMXS12A, #3(#3+#7) SMXS12B, #1 SMXS12B, #2(#2+#5) SMXS12B, #3(#3+#7) (mm) Model F 35 35 35 50 35 55 65 K J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 HA 40 40 40 25 36 72 76 ZZ

smcmaintenancepartslist

table Model Level difference t mm Model Level difference t mm MXS6 MXQ6 MXS8 MXQ8 0.5 0.3 MXS12 MXQ12 MXS16 MXQ16 0.3 MXS20 MXQ20 0.5 0.5 MXS25 MXQ25 323 Series MXF Replacement Procedure of Seal 1 Caution 1-2.

MXS Series Air Slide Table

-100 MXS12-75 MXS12-50 MXS12-75 0.03 0.025 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-20 MXS12-10 MXS12-100 MXS12-40 MXS12-30 MXS12-20 Table deflection mm Table deflection mm Table deflection mm 0.06 0.020 0.02 MXS12-100 MXS12-10 0.015 0.04 MXS12-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load N 1N = 0.2248

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-10 13-/22-MXS12-20 13-/22-MXS12-30 13-/22-MXS12-40 13-/22-MXS12-50 13-/22-MXS12-75 13-/22-MXS12-100 786 MXS 1322Air Slide Table Dimensions: MXS12 1322Axial piping (12) MXS12-P 1322Maximum 6.5 Operating port 2 x M5 x 0.8 42 18.7 20 9.5 12 Other dimensions are the same as those of basic type. 787 MXS 1322Air Slide Table Dimensions: MXS12L / Symmetric Type 1322ZZ Air Preparation Equipment

SMC

-10 13-/22-MXS12-20 13-/22-MXS12-30 13-/22-MXS12-40 13-/22-MXS12-50 13-/22-MXS12-75 13-/22-MXS12-100 140 MXS Air slide table 1322Dimensions / MXS 12 1322Axial piping (12) MXS12-P 1322Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment Maximum

A

10 40 26.5 71 70 80 MXS12-20 35 4 15 40 2 10 40 36.5 71 70 80 MXS12-30 35 4 15 40 2 10 40 46.5 71 70 80 MXS12-40 50 4 17 25 3 10 52 56.5 83 82 92 MXS12-50 35 6 15 36 3 22 60 66.5 103 102 112 MXS12-75 55 6 25 36 4 43 85 91.5 149 148 158 MXS12-100 65 6 35 38 5 52 130 116.5 203 202 212 D I M E N S I O N S S E R I E S MXS 16 Model F N G H NN I J K M Z ZZ MXS16-10 35 4 16 40 2 10 40 29 76 75 87

CATALOG

www.stevenengineering.com I FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE E235 & N347 1.186 LINEAR ACTUATORS: PRECISION SLIDE TABLE SERIES MXS D I M E N S I O N S S E R I E S MXS 12 Model F N G H NN I J K M Z ZZ MXS12-10 35 4 15 40 2 10 40 26.5 71 70 80 MXS12-20 35 4 15 40 2 10 40 36.5 71 70 80 MXS12-30 35 4 15 40 2 10 40 46.5 71 70 80 MXS12-40 50 4 17 25 3 10 52

Slide Tables MX Series

Tightening torque Nm{kgfcm} 3.0{29} 5.0{49} 12.5{122} 25.0{245} 43.9{430} 70.4{690} Model MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 Tightening torque Nm{kgfcm} Model MXS 8 MXS12 1.67{17.1} MXS16 3.14{32.1} 10.8{110.2} MXS20 MXS25 1 N M = 0.7375 ft lb 13 MXS Series Air Slide Table Precautions Precautions on Functional Option With end lock With buffer mechanism Caution Caution 1.2 position, 4

XG_-OMV0028

50336-** ASSY XGT300-1-1-3AS XGT311-50336A1-1 XGT31*-50336-* A XGT311-50336A1-1A XGT31*-50336-*A A ASSY XGT311-50336A1-1C XGT31*-50336-*C A XGT311-50336A1-1F XGT31*-50336-*F A ASSY XGT300-2-1S O FKM XGT300-9-10S AS568-273 FKM XGT300-9-9S XGT31*-50336-1* AS568-271 O Kalrez R 4079 XGT300-9-11S XGT31*-50336-2* AS568-271 O (FKM) XGT300-9-7S AS568-177 XGT300-4-9S XGT300-2-5S ASSY 6 XGT300-50AS

High Vacuum Slit Valve

For XGT31-50336-A C Bonnet ASSY XGT311-50336A1-1C For XGT31-50336-C C XGT311-50336A1-1F For XGT31-50336-F C Gate ASSY XGT300-2-1S Body O-ring (FKM) XGT300-9-10S AS568-273 FKM XGT300-9-9S For XGT31-50336-1 AS568-271 Gate O-ring Kalrez4079 XGT300-9-11S For XGT31-50336-2 AS568-271 Actuator O-ring (FKM) XGT300-9-7S AS568-177 Wiper XGT300-4-9S Fixed bolt XGT300-2-5S Multiple connector XGT300-50AS

Air Slide Table Series MXS P.319

MXS6-PS 6 8 12 16 20 25 MXS6-PS MXS8-PS MXS12-PS MXS16-PS MXS20-PS MXS25-PS !7 !8 !9 Piston seal MXS8-PS Rod seal NBR MXS12-PS Set of left nos. !7, !8, !9 O-ring MXS16-PS With end lock MXS20-PS MXS25-PS #2 #3 #4 #5 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.

Air Slide Table Series MXS

454 378 302 227 151 Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Mass (g) Model Standard stroke (mm) Additional mass of functional option Additional mass of adjuster option DAxial piping type S: Stroke (mm) With end lock With buffer Extension end Rubber stopper Retraction end Shock absorber 10 20 30 40 50 75 100 125 150 Extension end Retraction end MXS6 (L) MXS8 (L) MXS12

01-mxs-e

MXS6-PS 6 8 12 16 20 25 MXS6-PS MXS8-PS MXS12-PS MXS16-PS MXS20-PS MXS25-PS !7 !8 !9 Piston seal MXS8-PS Rod seal NBR MXS12-PS Set of left nos. !7, !8, !9 O-ring MXS16-PS With end lock MXS20-PS MXS25-PS #2 #3 #4 #5 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.

MXS12 (L)MXS-AS12 (L)59.5311620124M8 x 1M4 x 1518.51013M4 x 12

Air slide table, Bore size: 6, 8, 12, 16, 20, 25 *, Strokes: 5mm to 150mm, depending upon bore size, With or without stroke adjuster with or without shock, Options: buffer, end lock, axial piping, Variety of switches with a variety of wire lead lengths, ADJUSTMENT BOLT (MXS12), ACTUATOR, MXS/MXJ GUIDED CYLINDER, F2, 12MM MXS KIT/ACCESSORY, .02420 lb

MXQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Repeatability Dimensions CX Model Height Width Parallelism Overall length Height tolerance MXQ12-30 MXS12-30 30 46 0.035 0.08 86 DSymmetric type is also standardized.

MXS12 (L)MXS-AS12 (L)-X12259.5311640124M8 x 1M4 x 1518.51013M4 x 12

MXS12 (L)MXS-AS12 (L)59.5311620124M8 x 1M4 x 1518.51013M4 x 12

MXS12 (L)MXS-BT12 (L)4531181/440.868121.4M8 x 1M4 x 820.5101518.5M4 x 15

MXS12 (L)MXS-AS12 (L)59.5311620124M8 x 1M4 x 1518.51013M4 x 12