Air Slide Table

( )-Z, MXQ6B-Z A C MXQ8( )-Z, MXQ6B-Z A C MXQ8( )-Z, MXQ6B-Z A C 0.007 0.004 0.120 ST 10 to 30 ST 75 0.006 ST 75 0.100 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 40 0.003 0.005 ST 30 to 50 0.080 0.004 ST 50, 75 0.060 0.002 ST 50 0.003 ST 20 0.040 0.002 ST 40 0.001 ST 10 ST 10 to 30 0.020 0.001 ST 75 ST 10 to 30 0.000 0.000 0.000 0 5 10 15 0 5 10 15 0 5 10 15

smcmaintenancepartslist

Main applications Nominal filtration accuracy (m) Material Core material Stainless steel 304 0.5, 1, 5, 10, 20, 50, 75, 100 Cotton 0 to 60 0.5, 1, 5, 10, 20, 50, 75, 100 0.2 MPa 0.1 MPa Polypropylene Polypropylene 0 to 400 Glass fiber Stainless steel 316 1, 5, 10, 20 Note) Size for all is 65 x L250.

Air Slide Table Series MXQ

-75 MXQ8-10 MXQ8-20 0.03 MXQ8-30 MXQ8-30 MXQ8-30 0.06 MXQ8-75 MXQ8-50 MXQ8-40 MXQ8-20 MXQ8-30 MXQ8-40 MXQ8-75 Table displacement mm Table displacement mm Table displacement mm 0.010 0.02 0.04 MXQ8-40 MXQ8-30 MXQ8-20 MXQ8-10 MXQ8-50 0.005 MXQ8-50 0.01 0.02 MXQ8-10 0 40 80 120 0 0 20 40 60 20 40 60 (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf)

AIR SLIDE TABLE

25 25 25 31 39 65 65 65 MXQ20B 32.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 32.9 33.9 33.9 33.9 46.9 46.9 32.9 71.9 71.9 16 Solid state switch A Stroke Stroke Model 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 16 5.4 5.4 5.4 5.4 14 14.6 17.6 19.6 19.6 MXQ8(A,C) 11.9 11.9 11.9 11.9 11.9 11.9 19.1 19.1 19.1 25.1 42.1 19.1 MXQ12(A,C) 14.5 14.5 14.5 14.5 14.5 14.5 14.5

MX-OMP0051

5.5 MXQ20(A) 5.5 5 MXQ25(A) 10 8.5 ON 14 2-9 3mm 3mm 2-10 5~6mm 0.05~0.15Nm 90 ( ) 15 D-M9M9W A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 0 0.6 3.6 5.6 5.6 MXQ8(A,C) 13.9 13.9 13.9 13.9 13.9 13.9 5.1 5.1 5.1 11.1 28.1 5.1 MXQ12(A,C) 16.5 16.5 16.5 16.5 16.5 16.5 16.5 14.1 6.1 6.1 14.1 14.1 33.1 33.1 MXQ16(A) 20.6 20.6 20.6 20.6 20.6 20.6

High Vacuum Angle Valve

Example) -M9NL !

Table of Contents

L M9NL Refer to page 12-13-1 for further information on auto switches. Auto switches marked with a "" are made upon receipt of order.

Aluminum High Vacuum Angle Valve

Example) -M9NL !

Free Mount Cylinder

65 80 65 55 75 65 60 65 55 50 55 45 9 8 25 96 81 71 86 71 61 81 71 66 71 61 56 61 51 11 10 32 100 85 75 90 75 65 85 75 70 75 65 60 65 55 13 12 The dimensions other than the table above are the same as those of standard type. 44 46 Related Products For details, refer to the respective catalog. 1011-CDU Clean Series Compliant with clean environment Specifications 10-CDU (Relief type) 11-CDU

NCG/CG1

st or more 10 st or more 15 to 74 st 75 st or more 10 st or more 15 to 74 st 75 st or more 15 st or more 20 to 74 st 75 st or more 15 st or more 20 to 74 st Trunnion style is not available for bore sizes 80 and 100.

CATALOG

, 100 25 10, 20, 30, 40, 50, 75, 100 32 10, 20, 30, 40, 50, 75, 100 10 75, 100, 125, 150 15 75, 100, 125, 150 20 125, 150, 175, 200 25 125, 150, 175, 200 32 125, 150, 175, 200 Courtesy of Steven Engineering, Inc. !

A

, 100 25 10, 20, 30, 40, 50, 75, 100 32 10, 20, 30, 40, 50, 75, 100 10 75, 100, 125, 150 15 75, 100, 125, 150 20 125, 150, 175, 200 25 125, 150, 175, 200 32 125, 150, 175, 200 Courtesy of Steven Engineering, Inc. !

XM, XY

-M9NL u Seal material and its changed part Seal material Seal material Compound No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.

MHZ

Lead wire length symbols:0.5 mNil (Example) M9BV 3 m L (Example) M9NL 5 m Z (Example) F59AZ (Example) When ordering with an air gripper When ordering auto switches only 61 D-F8PLMHZ 2-16D-F8NS61 Auto switches marked with a symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches.

MHZ

Lead wire length symbols:0.5 mNil (Example) M9BV 3 m L (Example) M9NL 5 m Z (Example) F59AZ (Example) When ordering with an air gripper When ordering auto switches only 61 D-F8PLMHZ 2-16D-F8NS61 Auto switches marked with a symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches.

NCQ8

L M9NL 197in (5 m) .

Table of Contents

, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

XLAQ/XLDQ

Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.