Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-10 13-/22-MXQ6-20 13-/22-MXQ6-30 13-/22-MXQ6-40 13-/22-MXQ6-50 Note) Note) 1322Note) Refer to the bottom view of MXQ6-30. 801 MXQ 1322Air Slide Table Dimensions: MXQ6 1322Axial piping (6): MXQ6-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

Air Slide Table

Dimensions [mm] Model M MXQ6-10ZN 55 MXQ6-20ZN 65 MXQ6-30ZN 86 MXQ6-40ZN 98 MXQ6-50ZN 108 * Dimensions other than those listed above are the same as those for the standard type. 88 MXQ Series Dimensions: MXQ [Functional Option] 6 MXQ 6-mm1 With buffer (6) Dimensions [mm] 12 Model Standard type Shorter total length type ZZ M M MXQ6-10Zm1 81.5 72 77 MXQ6-20Zm1 91.5 82 MXQ6-30Zm1 112.5 103 90

3

Qty. 1 2 3 4 PVC pipe Seal Body Sensor PVC pipe (25A) PVC pipe (30A) 1 1 CPVC ZS-40-U25 ZS-40-U30 1 FKM PPS PPS 25A retaining plate (M5 x 80 with two hexagonal socket head cap screws) ZS-40-U25-A 1 5 30A retaining plate (M5 x 65 with two hexagonal socket head cap screws) PF3W ZS-40-U30-A 1 Replacing the PVC pipe may cause accuracy to fluctuate by 1 to 2%. 3-Color Display Digital Flow Monitor

Table of Contents

Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

Dual Rod Cylinder Series CXSJ/CXS

CXS20-20A CXS20-25A CXS20-30A CXS20-35A CXS20-40A CXS20-45A CXS20-50A CXS20-60A CXS20-70A CXS20-75A CXS20-80A CXS20-90A CXS20-100A 20 92 116 30 25 97 121 30 102 126 35 107 131 40 40 112 136 45 117 141 50 122 146 60 132 156 70 142 166 75 147 171 60 80 152 176 90 162 186 100 172 196 574 Series CXS Dual Rod Cylinder With Air Cushion Dimensions: 25 57.5 22 45.5 10 2 x cushion needle 2 x Rc 1/

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

CXS20-20A CXS20-25A CXS20-30A CXS20-35A CXS20-40A CXS20-45A CXS20-50A CXS20-60A CXS20-70A CXS20-75A CXS20-80A CXS20-90A CXS20-100A 92 116 20 30 97 121 25 102 126 30 107 131 35 112 136 40 40 117 141 45 122 146 50 132 156 60 142 166 70 147 171 75 60 152 176 80 162 186 90 172 196 100 8-29-14 15 Dual Rod Cylinder: With Air Cushion Series CXS Dimensions: 25 57.5 22 45.5 10 2-cushion needle MX

Table of Contents

CXS20-20A CXS20-25A CXS20-30A CXS20-35A CXS20-40A CXS20-45A CXS20-50A CXS20-60A CXS20-70A CXS20-75A CXS20-80A CXS20-90A CXS20-100A 92 116 20 30 97 121 25 102 126 30 107 131 35 112 136 40 40 117 141 45 122 146 50 132 156 60 142 166 70 147 171 75 60 152 176 80 162 186 90 172 196 100 8-29-14 15 Dual Rod Cylinder: With Air Cushion Series CXS Dimensions: 25 57.5 22 45.5 10 2-cushion needle MX

JXCx-OMT0023

No-fuse breaker Fuse Current [A] (Note 2) Driver Voltage (Note 1) Class Current [A] Voltage Magnetic contactor Not using power factor improving Using power factor AC [V] AC [V] improving reactor reactor LECSA2-S1 30A frame 5A 30A frame 5A 10A LECSA2-S3/ LECSA1-S1 30A frame 10A 30A frame 10A 240V T 15A 300V S-N10 LECSA2-S4/ LECSA1-S3 30A frame 15A 30A frame 10A 20A Note 1.

Series CKQG/CKQP Guide Pins Assembly,Clamp Arm Assembly Kit Number

CKQG-25A CKQG-R200S CKQG-30A 183

03-ckqg_ckqp-e

CKQG-25A CKQG-R200S CKQG-30A 183

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Applicable model D7 L26 L28 AS-10A AS1002FS 9.2 4 18.7 AS-20A AS2002FS 9.4 8.8 20.4 AS-25A AS2052FS 11.4 6.3 27 AS-30A AS3002FS 11.8 5.9 32.1 Part no. Applicable model D7 L27 L28 AS-10A1 AS1002FS 9.2 4.5 18.7 AS-20A1 AS2002FS 9.4 9.3 20.4 AS-25A1 AS2052FS 11.4 7.1 27 AS-30A1 AS3002FS 11.8 6.4 32.1 2 x D7 2 x D7 L26 L27 L28 L28 The AS4002FS can be mounted without the adapter.

PF-OMN0009_C

SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06 3/4 10 1/1 12 11/4 14 11/2 / OUT1 OUT2 1 1~5 V 2 4~20 mA 1T 1~5 V 1~5 V (PF3W3)1~5V (-1-1T) 4~20mA(47) -11No.PF-OMN0009CN-F PVC PF3W5 U 48 () 3 A : 11 21 10~100 L/min 30~250 L/min U PVC 2 11 21 R (PVC) 11 21 40 11 21 25 25A

Air Slide Table Series MXQ

F A F Lr 6 6 6 Lr = 40mm MXQ6-30 0.015 0.03 0.05 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-40 Table displacement mm Table displacement mm Table displacement mm MXQ6-50 0.04 MXQ6-20 MXQ6-40 0.010 0.02 MXQ6-20 MXQ6-40 0.03 0.02 MXQ6-10 0.01 0.005 MXQ6-10 0.01 0 0 40 80 120 10 20 30 10 20 30 0 Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf

MX-OMP0051

(C) Nm MXQ6(A) RJ0603 0.85 MXQ8(A,C) MXQ6B RJ0603 0.85 MXQ12(A,C) MXQ8B RJ0805 1.67 MXQ16(A) MXQ12B RJ1006 3.14 MXQ20(A) MXQ16B RJ1007H 3.14 MXQ25(A) MXQ20B RH1410 10.8 12 2-8 kg RJ MXQ6(A) 0.6 0.6 0.6 MXQ8(A,C) 1 1 1 1 MXQ12(A,C) 2 2 2 1 MXQ16(A) 4 4 4 2.5 MXQ20(A) 6 6 6 5 MXQ25(A) 9 9 9 5.5 2 45 3 , , 13 OFF MXQ6(A) 2.85 5.65 MXQ8(A,C) 2.4 5.6 MXQ12(A,C) 4 5.5 MXQ16(A) 5 5.5 MXQ20(A

AIR SLIDE TABLE

Description Material Note Chromate treatment 40 Bushing Aluminum alloy (MXQ6,MXQ8(C),MXQ12(C) only) 41 O-ring NBR (MXQ6,MXQ8(C),MXQ12(C) only) 42 Parallel pin Stainless steel (MXQ6,MXQ8(C),MXQ12(C) only) 43 Steel ball High carbon chromium bearing steel 20 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com

Bore Size: 6mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 30mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers)

Bore Size: 6mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 30mm, Adjuster: Both Sides Adjusters/Rubber Stoppers, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

1

Double clevis pin made of stainless steel Double clevis style DY XC27 020B, 032B, 040B CDP XC27 2A, 3A, 4A, 5A, 6A, 7A -X Clevis pin Knuckle pin made of stainless steel 20Y XC27 04C, 05C, 08C, 10C Clevis pin Knuckle pin Data Y XC27 12A, 14A, 16A, 18A, 20A, 25A, 30A Double clevis pin made of stainless steel Double knuckle joint Specifications Only double clevis style (D) Mounting style Stainless

Flow ranges (lpm): 10-100, 30-250; Port sizes: 25A (32mm) or 30A (38mm) (flow range dependent); Temperature rating: 0-70°C; Output options: 1-5V, 4-20mA; Accuracy: ±3% F.S. ; Repeatability: ±2% F.S.

Flow ranges (lpm): 10-100, 30-250; Port sizes: 25A (32mm) or 30A (38mm) (flow range dependent); Temperature rating: 0-70°C; Output options: NPN/PNP, 1-5V, 4-20mA; Accuracy: ±3% F.S.; Repeatability: ±2% F.S.