Bore Size: 6mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 10mm, Adjuster: AS (Adjuster at Forwarding End/Rubber Stopper), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bore Size: 6mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 10mm, Adjuster: Adjuster at Forwarding End/Rubber Stopper, Auto Switch: M9BV--Solid State, Gen. Purpose, 2 Wire, Vertical, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 6mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 10mm, Adjuster: Adjuster at Forwarding End/Rubber Stopper, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Bore Size: 6mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 10mm, Adjuster: Adjuster at Forwarding End/Rubber Stopper, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 6mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 10mm, Adjuster: Adjuster at Forwarding End/Rubber Stopper, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

The MXQ precision slide is ideal for applications requiring closely held parallelism and perpendicular specifications. The table and bearing guide are integrated into one precisely machined part made of hardened stainless steel. This minimizes tolerance stack-up associated with multiple part assemblies, and affords height tolerances of +/-0.05mm. The bearing is a recirculating linear guide

The MXQ precision slide is ideal for applications requiring closely held parallelism and perpendicular specifications. The table and bearing guide are integrated into one precisely machined part made of hardened stainless steel. This minimizes tolerance stack-up associated with multiple part assemblies, and affords height tolerances of +/-0.05mm. The bearing is a recirculating linear guide

The MXQ precision slide is ideal for applications requiring closely held parallelism and perpendicular specifications. The table and bearing guide are integrated into one precisely machined part made of hardened stainless steel. This minimizes tolerance stack-up associated with multiple part assemblies, and affords height tolerances of +/-0.05mm. The bearing is a recirculating linear guide

The MXQ precision slide is ideal for applications requiring closely held parallelism and perpendicular specifications. The table and bearing guide are integrated into one precisely machined part made of hardened stainless steel. This minimizes tolerance stack-up associated with multiple part assemblies, and affords height tolerances of +/-0.05mm. The bearing is a recirculating linear guide

smcmaintenancepartslist

GB2-10AS GB2-3AS AD27 Y200 Y200T VHS20-01, 02 GB3-10AS GB3-3AS AD37 AD38 Y300 Y300T VHS30-02, 03 GB4-10AS GB4-3AS AD47 AD48 Y400 Y400T VHS40-02, 03, 04 Float type auto drain Note 2) Spacer Spacer with bracket Residual pressure relief 3 port valve Note 3) Attachments Note 1) Contact SMC regarding pressure gauge supply for psi unit specifications.

Air Slide Table

Dimensions [mm] Model M MXQ6-10ZN 55 MXQ6-20ZN 65 MXQ6-30ZN 86 MXQ6-40ZN 98 MXQ6-50ZN 108 * Dimensions other than those listed above are the same as those for the standard type. 88 MXQ Series Dimensions: MXQ [Functional Option] 6 MXQ 6-mm1 With buffer (6) Dimensions [mm] 12 Model Standard type Shorter total length type ZZ M M MXQ6-10Zm1 81.5 72 77 MXQ6-20Zm1 91.5 82 MXQ6-30Zm1 112.5 103 90

1

SY3000 SY5000 SY7000 Standard (0.7 MPa) Quick response type (0.7 MPa) High pressure type (1.0 MPa) SY30V-25A Gasket SY50V-25A Only metal seal type is available for the high pressure type. (1.0 MPa) a-side pilot valve Pilot cover x 1 + B tight flat head screw x 1 Coil type Nil T w Standard With power saving circuit Pilot cover Socket q w Rated voltage 5 6 24 VDC 12 VDC b-side pilot valve

2

Flow Control Equipment X214 Laser printing AS Clean Series 4 10AS-FS Example) 10-AS2201F-01-04SA Note 1) Fluorine grease is used. Note 2) The particulate generation grade is 3.

MXQ

F F A Lr 6 6 6 Lr = 40 mm MXQ6-30 MXQ6-30 0.015 0.03 0.05 MXQ6-30 MXQ6-50 MXQ6-10 MXQ6-10 MXQ6-20 MXQ6-20 MXQ6-30 MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-40 MXQ6-40 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-50 MXQ6-40 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-50 0.04 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Air Slide Table Series MXQ

F A F Lr 6 6 6 Lr = 40mm MXQ6-30 0.015 0.03 0.05 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-40 Table displacement mm Table displacement mm Table displacement mm MXQ6-50 0.04 MXQ6-20 MXQ6-40 0.010 0.02 MXQ6-20 MXQ6-40 0.03 0.02 MXQ6-10 0.01 0.005 MXQ6-10 0.01 0 0 40 80 120 10 20 30 10 20 30 0 Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf

MX-OMP0051

(C) Nm MXQ6(A) RJ0603 0.85 MXQ8(A,C) MXQ6B RJ0603 0.85 MXQ12(A,C) MXQ8B RJ0805 1.67 MXQ16(A) MXQ12B RJ1006 3.14 MXQ20(A) MXQ16B RJ1007H 3.14 MXQ25(A) MXQ20B RH1410 10.8 12 2-8 kg RJ MXQ6(A) 0.6 0.6 0.6 MXQ8(A,C) 1 1 1 1 MXQ12(A,C) 2 2 2 1 MXQ16(A) 4 4 4 2.5 MXQ20(A) 6 6 6 5 MXQ25(A) 9 9 9 5.5 2 45 3 , , 13 OFF MXQ6(A) 2.85 5.65 MXQ8(A,C) 2.4 5.6 MXQ12(A,C) 4 5.5 MXQ16(A) 5 5.5 MXQ20(A

AIR SLIDE TABLE

Description Material Note Chromate treatment 40 Bushing Aluminum alloy (MXQ6,MXQ8(C),MXQ12(C) only) 41 O-ring NBR (MXQ6,MXQ8(C),MXQ12(C) only) 42 Parallel pin Stainless steel (MXQ6,MXQ8(C),MXQ12(C) only) 43 Steel ball High carbon chromium bearing steel 20 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-10 13-/22-MXQ6-20 13-/22-MXQ6-30 13-/22-MXQ6-40 13-/22-MXQ6-50 Note) Note) 1322Note) Refer to the bottom view of MXQ6-30. 801 MXQ 1322Air Slide Table Dimensions: MXQ6 1322Axial piping (6): MXQ6-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

MXQ

P FR (2) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 FP Note 2) W/ end lock is not available in Series MXQ6.

modular-press-e

ACG20B ACG30B ACG40B Model Description Pressure gauge Note 1) GB2-10AS GB3-10AS GB4-10AS GB2-10AS GB2-3AS AD27 Y200 Y200T IS10M-20 VHS20-01, 02 0 to 1.0 MPa 0 to 0.3 MPa Standard Optional N.C. N.O.