1

SY3000 SY5000 SY7000 Standard (0.7 MPa) Quick response type (0.7 MPa) High pressure type (1.0 MPa) SY30V-25A Gasket SY50V-25A Only metal seal type is available for the high pressure type. (1.0 MPa) a-side pilot valve Pilot cover x 1 + B tight flat head screw x 1 Coil type Nil T w Standard With power saving circuit Pilot cover Socket q w Rated voltage 5 6 24 VDC 12 VDC b-side pilot valve

Air Slide Table

ZZ MXQ 25-mm2 With end lock (25) Pilot port 2 x M5 x 0.8 Q 5 J 13 13 0.5 12.5 3 19 Dimensions [mm] 66 88 Model J Q MXQ25-10Zm2 109 48 MXQ25-20Zm2 104 11 43 MXQ25-30Zm2 114 MXQ25-40Zm2 124 MXQ25-50Zm2 147 MXQ25-75Zm2 172 MXQ25-100Zm2 213 3 MXQ25-10Z2 3 5 J 73 MXQ25-125Zm2 277 MXQ25-150Zm2 302 * Dimensions other than those listed above are the same as those for the standard type.

smcmaintenancepartslist

table Model Level difference t mm Model Level difference t mm MXS6 MXQ6 MXS8 MXQ8 0.5 0.3 MXS12 MXQ12 MXS16 MXQ16 0.3 MXS20 MXQ20 0.5 0.5 MXS25 MXQ25 323 Series MXF Replacement Procedure of Seal 1 Caution 1-2.

JXCx-OMU0026

Example) When LEFSH25RH-300 isordered, input LEFS25RH-300 (c) When a Clean type (11-) or Secondary battery type (25A-) is ordered. Search without inputting 11or 25A-, and find the actuator to which 11or 25Ais applicable.

MXQ

MXQ25-100 MXQ25-100 MXQ25-75 MXQ25-75 MXQ25-30 MXQ25-30 MXQ25-125 MXQ25-100 MXQ25-75 MXQ25-40 MXQ25-40 MXQ25-40 MXQ25-100 MXQ25-100 MXQ25-125 MXQ25-125 MXQ25-150 MXQ25-150 MXQ25-150 MXQ25-150 MXQ25-100 MXQ25-100 MXQ25-150 MXQ25-100 0.06 0.08 MXQ25-30 MXQ25-50 MXQ25-50 MXQ25-50 MXQ25-30 MXQ25-30 MXQ25-50 MXQ25-50 MXQ25-125 MXQ25-125 MXQ25-30 MXQ25-50 MXQ25-125 0.08 0.06 MXQ25-20 MXQ25-20

Air Slide Table Series MXQ

-50 MXQ25-75 MXQ25-10 MXQ25-20 MXQ25-30 MXQ25-40 MXQ25-150 MXQ25-40 0.12 0.10 MXQ25-75 MXQ25-125 MXQ25-100 MXQ25-75 MXQ25-40 MXQ25-150 MXQ25-100 MXQ25-100 MXQ25-125 MXQ25-150 Table displacement mm Table displacement mm Table displacement mm 0.06 0.08 MXQ25-50 MXQ25-30 MXQ25-30 MXQ25-50 MXQ25-125 0.08 0.06 MXQ25-20 0.04 MXQ25-20 0.04 MXQ25-10 MXQ25-10 0.04 0.02 0.02 0 0 800 200 400 600 0 100

MX-OMP0051

A,C) MXQ8B M81 12.5 MXQ16(A) MXQ12B M101 25 MXQ20(A) MXQ16B M121 43 MXQ25(A) MXQ20B M141.5 69 11 (MPa) (MPa) MXQ8(A,C) 0.3 MXQ8B 0.3 MXQ12(A,C) 0.3 MXQ12B 0.3 MXQ16(A) 0.2 MXQ16B 0.2 MXQ20(A) 0.2 MXQ20B 0.2 MXQ25(A) 0.2 MXQ8(A,C) MXQA-A887 MXQ8B MXQB-A887 MXQ12(A,C) MXQA-A1287 MXQ12B MXQB-A1287 MXQ16(A) MXQA-A1687 MXQ16B MXQB-A1687 MXQ20(A) MXQA-A2087 MXQ20B MXQB-A2087 MXQ25(A) MXQA-A2587

AIR SLIDE TABLE

M61 7.4 7 12 MXQ16B M61 7.4 10 15 MXQ20B M81.25 18 14 20 MXQ8C M40.7 2.1 6 9 MXQ12C M50.8 4.4 8 12 Caution Types other than MXQ20(A) and MXQ25(A) have through tapped hole Use the bolt shorter than max. screw depth (L2) by 0.5mm or more.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-100 13-/22-MXQ25-125 13-/22-MXQ25-150 Note) Note) 1322Note) Refer to the bottom view of MXQ25-75. 821 MXQ 1322Air Slide Table Dimensions: MXQ25 1322Axial piping (25): MXQ25-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

Slide Tables MX Series

Shock absorber RB0805 RB0806 RB1007 RB1411 RB1412 Applicable size MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 4.Follow the table for tightening torque of shock absorber lock nuts.

Electric Actuators

T-slot B dimension T-slot A dimension T-slot B 27.5 4H9 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Cross section C-C LXSH2BD-50B LXSH2BD-75B LXSH2BD-100B LXSH2BD-125B LXSH2BD-150B Refer to page 301 for mounting.

LX

T-slot B dimension T-slot A dimension T-slot B 27.5 4H9 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Cross section C-C LXSH2BD-50B LXSH2BD-75B LXSH2BD-100B LXSH2BD-125B LXSH2BD-150B Refer to page 301 for mounting.

LX

T-slot B dimension T-slot A dimension T-slot B 27.5 4H9 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Cross section C-C LXSH2BD-50B LXSH2BD-75B LXSH2BD-100B LXSH2BD-125B LXSH2BD-150B Refer to page 301 for mounting.

Electric Actuator

(Except cable specifications and actuator options) Example: Enter LEFS16B-100 for the LEFS16B-100B-R1AN1D. 5 When controller equipped type is selected when ordering the LE series, you do not need to order this driver. The driver is sold as single unit after the compatible actuator is set. Confirm that the combination of the driver and the actuator is correct.

Table of Contents

T-slot B dimension T-slot A dimension T-slot B 27.5 4H9 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Cross section C-C LXSH2BD-50B LXSH2BD-75B LXSH2BD-100B LXSH2BD-125B LXSH2BD-150B Refer to page 301 for mounting.

2 Phase Stepper Motor/Without Motor Brake Series LXS

T-slot B dimension T-slot A dimension T-slot B 27.5 4H9 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Cross section C-C LXSH2BD-50B LXSH2BD-75B LXSH2BD-100B LXSH2BD-125B LXSH2BD-150B Refer to page 301 for mounting.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(Example: LEFS16B-100B-S1) * For the SpeedWork Load graph of the actuator, refer to the LECPA section on the model selection page of the electric actuators Web Catalog. Specifications For the setting of functions and operation methods, refer to the operation manual on the SMC website.

2 Phase Stepper Motor/Without Motor Brake Series LXP

micro sensor wire (300mm) Brake wire (300mm) 4.5 4H9 +0.030 0 Brake electrical circuit +24V Brown [Yellow] 4H9 +0.030 0 3 6 0V 49 38 White [Yellow] Section C detail (Scale: 2/1) Stroke + 104 (Stroke: 50 to 100mm) Stroke + 121 (Stroke: 125 to 200mm) 4H9 +0.030 0 depth 6 E Note) A contact protection circuit is required when connecting a brake. 12 D E Model LXPB5BC-50B LXPB5BC-75B LXPB5BC-100B

SI Unit for Vacuum Manifold

DetailedDeviceStatus EventQualifier (byte 0) Event Sub index Size Content Code (byte 1-2) Value MODE TYPE SOURCE INSTANCE bit 6-7 bit 4-5 bit 3 bit 0-2 1 Device hardware failure 0x5000 2 Non volatile memory failure 0x5011 3 Valve short circuit 0x1800 4 Pressure sensor short circuit 0x1801 11b 11b 100b 5 Pressure sensor failure/disconnection 0x1802 (3) 0 0xF4 (3) (4) (Event (Device) (Error

Air Slide Table Series MXQ

MXQ6-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Piston seal MXQ8-PS Rod seal NBR MXQ12-PS Set of left nos. !8, !9, @0 O-ring MXQ16-PS With end lock MXQ20-PS MXQ25-PS #3 #4 #5 #6 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.