Bore Size: 20mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Symmetric, Stroke: 20mm, Adjuster: w/o Adjuster, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Bore Size: 20mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: L (Symmetric), Stroke: 20mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers)

Bore Size: 20mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: L (Symmetric), Stroke: 20mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)

Bore Size: 20mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Symmetric, Stroke: 20mm, Adjuster: Both Sides Adjusters/Rubber Stoppers, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 20mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Symmetric, Stroke: 20mm, Adjuster: Both Sides Adjusters/Rubber Stoppers, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 1 pc.

Air slide table w/built-in guide rail, Bore size *: 6, 8, 12, 16, 20, 25, Standard or symetric styles, Adjuster options: rubber stopper, shock absorber, metal stopper, Auto switch capable, Cyl, Slide Table, Secondary Batt Comp, GUIDED CYLINDER, D79, 1221 lb

Air slide table w/built-in guide rail, Bore size *: 6, 8, 12, 16, 20, 25, Standard or symetric styles, Adjuster options: rubber stopper, shock absorber, metal stopper, Auto switch capable, Cyl, Slide Table, Secondary Batt Comp, GUIDED CYLINDER, D79, 1221.00000 lb

Air slide table w/built-in guide rail, Bore size *: 6, 8, 12, 16, 20, 25, Standard or symetric styles, Adjuster options: rubber stopper, shock absorber, metal stopper, Auto switch capable, Cyl, Slide Table, Secondary Batt Comp, GUIDED CYLINDER, D77, 1230 lb

Air slide table w/built-in guide rail, Bore size *: 6, 8, 12, 16, 20, 25, Standard or symetric styles, Adjuster options: rubber stopper, shock absorber, metal stopper, Auto switch capable, Cyl, Slide Table, Secondary Batt Comp, GUIDED CYLINDER, D77, 1165.00000 lb

Air Slide Table

25 Double-ported type MXQA 10 10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC

MXQ

-10 MXQ20L-20 MXQ20L-30 MXQ20L-40 MXQ20L-50 MXQ20L-75 MXQ20L-100 MXQ20L-125 MXQ20L-150 Note) Note) Note) Refer to the bottom view of MXQ20L-50. 8-5-34 35 Air Slide Table Series MXQ With shock absorber (20): MXQ20L-BS/BT/B Stroke Adjustable Range (mm) MX 16 Maximum 54 13 0.5 Max. 35 Extension end 35 Retraction end 35 0.5 MTS 46.5 46.5 Shock absorber at retraction end Shock absorber at extension

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-100 13-/22-MXQ20L-125 13-/22-MXQ20L-150 Note) Note) 1322Note) Refer to the bottom view of MXQ20L-50. 819 MXQ 1322Air Slide Table Dimensions: MXQ20L / Symmetric Type 1322Axial piping (20): MXQ20L-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

2

) Note 20) Note 20) Note 20) Note 20) Note 20) Note 20) Note 15) The combination of metal bowl: 2 and 8 is not available.

Table of Contents

20 20 74.5 90 98 30 35 40 19 25 25 20 23 25.5 29 32 32 VX31 VX32 VX33 1 4 1 8 3 8 1 4 27.5 27.5 3 8 1 4 17-3-85 6 The models VX31/32/33 have been revised.

7

Valve Leakage Rate Fluid and Ambient Temperature Internal Leakage Seal material Leakage rate (Water) Note 1) Fluid temperature (C) Ambient temperature (C) VXD23 to 26 (8A to 25A) VXD27 to 29 (32A to 50A) 1 to 60 Note) 20 to 60 NBR (FKM) Note 2) 0.2 cm3/min or less 1 cm3/min or less Note) No freezing External Leakage Seal material Leakage rate (Water) Note 1) VXD23 to 26 (8A to 25A) VXD27

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

Environment

kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500 1500 Mep 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m L3 Z 500 500 500 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 1500 1500 1500 L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500

Process Valve Series VNA

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U 3 8 1 2 3 4 1 VNB2-10A VNB2-15A VNB3-20A VNB4-25A 72.5 80.5 84.5 124 144.5 24.3 2.3 25 34 55 75 80 125.5 52 26 4.5 63 42 28 14 93.5 99.5 28.3 33.3 2.3 2.3 30 35 43 49 17.5 20 84 100 92 108 84 90 89 95 135.5 137 153 156 172 62 72 31 36 5.5 6.5 60.5 73 80 90 50 60 35 40 151.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot Applicable

1

COM. () 20 COM.

Pilot Operated

Description Size Option Stainless steel Option Stainless steel Brass (C37) Brass (C37) 15A to 25A 32A to 50A 15A to 25A 32A to 50A 15A to 25A 32A to 50A 15A to 50A 15A to 25A 32A to 50A 15A to 25A 15A to 25A 32A to 50A 10A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 10A to 25A 32A to 50A 10A to 25A 32A to 50A 10A to 50A 32A to 50A 10A to 50A 10A to 25A 32A to