Bore Size: 20mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Symmetric, Stroke: 10mm, Adjuster: Adjuster at Forwarding End/Rubber Stopper, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 5m, Number: 1 pc.

The MXQ precision slide is ideal for applications requiring closely held parallelism and perpendicular specifications. The table and bearing guide are integrated into one precisely machined part made of hardened stainless steel. This minimizes tolerance stack-up associated with multiple part assemblies, and affords height tolerances of +/-0.05mm. The bearing is a recirculating linear guide

The MXQ precision slide is ideal for applications requiring closely held parallelism and perpendicular specifications. The table and bearing guide are integrated into one precisely machined part made of hardened stainless steel. This minimizes tolerance stack-up associated with multiple part assemblies, and affords height tolerances of +/-0.05mm. The bearing is a recirculating linear guide

Air Slide Table

For details, refer to page 126. 46 MXQA Series Dimensions: MXQ 25A [Standard] MXQ 25A-mZ Standard type *1 If long bolts are used, they may touch the guide block and cause a malfunction, etc. Use a screw which has an intermediate length between the maximum screw-in depth and minimum screw-in depth.

MXQ

-10 MXQ20L-20 MXQ20L-30 MXQ20L-40 MXQ20L-50 MXQ20L-75 MXQ20L-100 MXQ20L-125 MXQ20L-150 Note) Note) Note) Refer to the bottom view of MXQ20L-50. 8-5-34 35 Air Slide Table Series MXQ With shock absorber (20): MXQ20L-BS/BT/B Stroke Adjustable Range (mm) MX 16 Maximum 54 13 0.5 Max. 35 Extension end 35 Retraction end 35 0.5 MTS 46.5 46.5 Shock absorber at retraction end Shock absorber at extension

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-100 13-/22-MXQ20L-125 13-/22-MXQ20L-150 Note) Note) 1322Note) Refer to the bottom view of MXQ20L-50. 819 MXQ 1322Air Slide Table Dimensions: MXQ20L / Symmetric Type 1322Axial piping (20): MXQ20L-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

2

-10A 10 15.9 26.7 37.9 35.7 15.6 52 AS32l1FG-G02-12A 12 18.5 29.7 40.9 34.5 17 53 AS32l1FG-G03-06A 6 10.4 21.8 33 36.4 1/4 21 16.6 50 48.4 43.5 41.9 AS 13.3 37 AS32l1FG-G03-08A 8 13.2 22.7 33.9 14.2 38 AS32l1FG-G03-10A 10 15.9 26.7 37.9 28 15.6 39 AS32l1FG-G03-12A 12 18.5 29.7 40.9 26.8 17 41 AS42l1FG-G04-10A 10 10.4 21.8 33 28.7 AS-FS 3/8 21 16.6 42.3 40.7 34.8 33.2 15.6 69 AS42l1FG-G04-

Table of Contents

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

2/3 Port Valve

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

Process Valve Series VNA

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB4 -25A VNB5 -32A, 32F VNB5 4 -32A, 32F VNB6 -40A, 40F VNB6 4 -40A, -40F VNB7 -50A, 50F VNB7 4 -50A, 50F No.

7

VXS 8A 1/2 10 10A 1/4 VXB 15A Stainless steel A N.O. 3/8 B Grommet 100 VAC With surge voltage suppressor 1/2 VXE C 110 VAC G H J K 3/8 D 200 VAC 4 10A C37 N.C. VXP 1/2 E 230 VAC 15 15A 3/8 Stainless steel B N.O. F VXR 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. VXH With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC VXF 6 25A N.C.

Pilot Operated

Description Size Option Stainless steel Option Stainless steel Brass (C37) Brass (C37) 15A to 25A 32A to 50A 15A to 25A 32A to 50A 15A to 25A 32A to 50A 15A to 50A 15A to 25A 32A to 50A 15A to 25A 15A to 25A 32A to 50A 10A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 10A to 25A 32A to 50A 10A to 25A 32A to 50A 10A to 50A 32A to 50A 10A to 50A 10A to 25A 32A to

1

9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A Station 2 Station 3 Station 4 Station 5 10A COM 10B Station 6 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B Station 7 Station 8 If alignment is not specified, the internal wiring is double wiring (connected to SOL. a and SOL. b) regardless of number

New

C37 25A 1 25 F 24 VDC Stainless steel N.O.

2/3 Port Valve

C Stainless steel 10A to 25A (3) High temp. water(D, E, N, P) Temperature Power Water (Standard) Air (Standard) Oil (Standard) (3) High temp. oil (D, N) Body q 32A to 50A 99 (4) 100 (4) 10A to 25A Stainless steel 60 40 _ _ _ _ 40 60 80 60 10 AC DC AC/DC 60 40 1 Bonnet Max. w 32A to 50A O ring 10 (1) 5 (2) Min.

42

Silencer box assembly: VVQ4000-33A (With gasket, screw) Type SU Double check spacer with residual pressure exhaust VVQ4000-25A-1 (Plug-in type) VVQ4000-25A-5 (Plug lead type) Caution Specifications Double check spacer part no.

/

Body material: Brass (C37) (32A or more: CAC407), Stainless steel (32A or more: not available) VXED2130 (8A/10A) VXED2140/2150/2260 (10A to 25A) !2 !2 !1 o i t !0 e u w y q !1 o i t e !0 P1 P2 P1 u y w OUT IN OUT P2 IN VXED2270/2380/2390 (32A to 50A) q !2 !1 i t e o !0 w r u Working principle When the coil !

VNB

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB5 -32A, 32F VNB6 -40A, 40F VNB7 -50A, 50F VNB4 -25A VNB54 -32A, 32F VNB64 -40A, -40F VNB74 -50A, 50F No.

Process Valve

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB4 -25A VNB5 -32A, 32F VNB5 4 -32A, 32F VNB6 -40A, 40F VNB6 4 -40A, -40F VNB7 -50A, 50F VNB7 4 -50A, 50F No.

2/3 Port Valve for Various

Description Size Option Stainless steel Standard Brass BC6 Brass BC6 NBR Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless