Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Symmetric, Stroke: 20mm, Adjuster: Adjuster at Forwarding End/Rubber Stopper, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: L (Symmetric), Stroke: 20mm, Adjuster: AS (Adjuster at Forwarding End/Rubber Stopper), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: L (Symmetric), Stroke: 20mm, Adjuster: AS (Adjuster at Forwarding End/Rubber Stopper), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

The MXQ precision slide is ideal for applications requiring closely held parallelism and perpendicular specifications. The table and bearing guide are integrated into one precisely machined part made of hardened stainless steel. This minimizes tolerance stack-up associated with multiple part assemblies, and affords height tolerances of +/-0.05mm. The bearing is a recirculating linear guide

The MXQ precision slide is ideal for applications requiring closely held parallelism and perpendicular specifications. The table and bearing guide are integrated into one precisely machined part made of hardened stainless steel. This minimizes tolerance stack-up associated with multiple part assemblies, and affords height tolerances of +/-0.05mm. The bearing is a recirculating linear guide

The MXQ precision slide is ideal for applications requiring closely held parallelism and perpendicular specifications. The table and bearing guide are integrated into one precisely machined part made of hardened stainless steel. This minimizes tolerance stack-up associated with multiple part assemblies, and affords height tolerances of /-0.05mm. The bearing is a recirculating linear guide

The MXQ precision slide is ideal for applications requiring closely held parallelism and perpendicular specifications. The table and bearing guide are integrated into one precisely machined part made of hardened stainless steel. This minimizes tolerance stack-up associated with multiple part assemblies, and affords height tolerances of +/-0.05mm. The bearing is a recirculating linear guide

Air Slide Table

For details, refer to page 126. 40 MXQA Series Dimensions: MXQ 20A [Standard] MXQ 20A-mZ Standard type *1 If long bolts are used, they may touch the guide block and cause a malfunction, etc. Use a screw which has an intermediate length between the maximum screw-in depth and minimum screw-in depth.

MXQ

-10 MXQ16L-20 MXQ16L-30 MXQ16L-40 MXQ16L-50 MXQ16L-75 MXQ16L-100 MXQ16L-125 Note) Note) Note) Refer to the bottom view of MXQ16L-50. 8-5-30 31 Air Slide Table Series MXQ With shock absorber (16): MXQ16L-BS/BT/B 12.5 Stroke Adjustable Range (mm) MX Maximum 34 12 Extension end 22 Retraction end 22 MTS 36.5 36.5 Maximum 20 Shock absorber at extension end Shock absorber at retraction end MY

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-100 13-/22-MXQ16L-125 Note) Note) Note) Refer to the bottom view of MXQ16L-50. 1322815 MXQ 1322Air Slide Table Dimensions: MXQ16L / Symmetric Type 1322Axial piping (16): MXQ16L-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Table of Contents

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

2/3 Port Valve

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

7

F 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC 6 25A N.C. N P C37 Stainless steel 25 1 K 200 VAC D N.O. L 230 VAC 7 32A N.C. Q CAC408 35 32A Flange M Conduit terminal 24 VDC E N.O. With surge voltage suppressor N 100 VAC 8 40A N.C. R CAC408 40 40A Flange P 110 VAC F N.O. Q 200 VAC 9 50A N.C.

1

SY3000 SY5000 SY7000 Standard (0.7 MPa) Quick response type (0.7 MPa) High pressure type (1.0 MPa) SY30V-25A Gasket SY50V-25A Only metal seal type is available for the high pressure type. (1.0 MPa) a-side pilot valve Pilot cover x 1 + B tight flat head screw x 1 Coil type Nil T w Standard With power saving circuit Pilot cover Socket q w Rated voltage 5 6 24 VDC 12 VDC b-side pilot valve

Pulse Valve

), 1 (25A), 1 1/2 (40A) 3/4 (20A), 1 (25A), 1 1/2 (40A) 1 (25A) Dedicated Controller for Operation VXFC Series p. 14 The valve controller can turn the many valves for the dust controller ON/OFF .

Process Valve

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB4 -25A VNB5 -32A, 32F VNB5 4 -32A, 32F VNB6 -40A, 40F VNB6 4 -40A, -40F VNB7 -50A, 50F VNB7 4 -50A, 50F No.

VNB

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB5 -32A, 32F VNB6 -40A, 40F VNB7 -50A, 50F VNB4 -25A VNB54 -32A, 32F VNB64 -40A, -40F VNB74 -50A, 50F No.

42

Silencer box assembly: VVQ4000-33A (With gasket, screw) Type SU Double check spacer with residual pressure exhaust VVQ4000-25A-1 (Plug-in type) VVQ4000-25A-5 (Plug lead type) Caution Specifications Double check spacer part no.

Coolant Valve

Description VNC1 -6A, 8A, 10A VNC2 -10A, 15A VNC3 -20A VNC4 -25A VNC5 -32A, 32F VNC6 -40A, 40F VNC7 -50A, 50F No.