Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 20mm, Adjuster: Adjuster at Forwarding End/Shock Absorber, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

The MXQ precision slide is ideal for applications requiring closely held parallelism and perpendicular specifications. The table and bearing guide are integrated into one precisely machined part made of hardened stainless steel. This minimizes tolerance stack-up associated with multiple part assemblies, and affords height tolerances of +/-0.05mm. The bearing is a recirculating linear guide

The MXQ precision slide is ideal for applications requiring closely held parallelism and perpendicular specifications. The table and bearing guide are integrated into one precisely machined part made of hardened stainless steel. This minimizes tolerance stack-up associated with multiple part assemblies, and affords height tolerances of +/-0.05mm. The bearing is a recirculating linear guide

Air Slide Table

ZZ MXQ 16-2 With end lock (16) Dimensions [mm] Pilot port 2 x M5 x 0.8 33 Model J MXQ16-10Z2 78 MXQ16-20Z2 82 MXQ16-30Z2 92 MXQ16-40Z2 109 MXQ16-50Z2 119 MXQ16-75Z2 150 MXQ16-100Z2 194 MXQ16-125Z2 219 5 J 7.5 3 7.5 4.5 0.5 3 62 43 3 13.8 7.5 MXQ16-10Z2 5 J * Dimensions other than those listed above are the same as those for the standard type.

1

SY3000 SY5000 SY7000 Standard (0.7 MPa) Quick response type (0.7 MPa) High pressure type (1.0 MPa) SY30V-25A Gasket SY50V-25A Only metal seal type is available for the high pressure type. (1.0 MPa) a-side pilot valve Pilot cover x 1 + B tight flat head screw x 1 Coil type Nil T w Standard With power saving circuit Pilot cover Socket q w Rated voltage 5 6 24 VDC 12 VDC b-side pilot valve

smcmaintenancepartslist

table Model Level difference t mm Model Level difference t mm MXS6 MXQ6 MXS8 MXQ8 0.5 0.3 MXS12 MXQ12 MXS16 MXQ16 0.3 MXS20 MXQ20 0.5 0.5 MXS25 MXQ25 323 Series MXF Replacement Procedure of Seal 1 Caution 1-2.

MXQ

F A F MX MTS Lr MY 16 16 16 Lr = 120 mm MXQ16-10 MXQ16-10 MXQ16-10 0.04 MXQ16-75 MXQ16-100 MXQ16-125 MXQ16-75 MXQ16-100 MXQ16-125 MXQ16-125 MXQ16-125 MXQ16-125 CY MXQ16-50 MXQ16-50 MXQ16-50 0.06 MXQ16-75 MXQ16-20 MXQ16-30 MXQ16-20 MXQ16-20 MXQ16-30 MXQ16-30 0.12 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ16-75 MXQ16-40 MXQ16-75 MXQ16-75

Air Slide Table Series MXQ

F A F Lr 16 16 16 Lr = 120mm MXQ16-125 MXQ16-100 MXQ16-75 0.04 MXQ16-125 MXQ16-10 MXQ16-50 0.06 0.12 MXQ16-20 MXQ16-30 MXQ16-75 MXQ16-40 MXQ16-75 MXQ16-40 MXQ16-100 MXQ16-125 Table displacement mm Table displacement mm Table displacement mm 0.03 MXQ16-50 MXQ16-50 MXQ16-40 MXQ16-100 MXQ16-30 0.04 0.08 0.02 MXQ16-30 MXQ16-20 MXQ16-20 MXQ16-20 0.02 0.04 MXQ16-10 MXQ16-10 0.01 MXQ16-10 0 0 400

MX-OMP0051

A,C) MXQ8B M81 12.5 MXQ16(A) MXQ12B M101 25 MXQ20(A) MXQ16B M121 43 MXQ25(A) MXQ20B M141.5 69 11 (MPa) (MPa) MXQ8(A,C) 0.3 MXQ8B 0.3 MXQ12(A,C) 0.3 MXQ12B 0.3 MXQ16(A) 0.2 MXQ16B 0.2 MXQ20(A) 0.2 MXQ20B 0.2 MXQ25(A) 0.2 MXQ8(A,C) MXQA-A887 MXQ8B MXQB-A887 MXQ12(A,C) MXQA-A1287 MXQ12B MXQB-A1287 MXQ16(A) MXQA-A1687 MXQ16B MXQB-A1687 MXQ20(A) MXQA-A2087 MXQ20B MXQB-A2087 MXQ25(A) MXQA-A2587

AIR SLIDE TABLE

A,B),25(A) has magnets on both sides. 10 Rod cover Aluminum alloy Anodized Stainless steel (MXQ6(A,B)) 11 Seal support Brass (MXQ8(A,B,C),12(A,B,C)) Electroless nickel plating (MXQ8(A,B,C),12(A,B,C)) Aluminum alloy (MXQ16(A,B),20(A,B),25(A)) Chromate treatment(MXQ16(A,B),20(A,B),25(A)) 12 Head cap Aluminum alloy Anodized 13 Floating bushing Stainless steel 14 Floating bushing Stainless steel

Slide Tables MX Series

Shock absorber RB0805 RB0806 RB1007 RB1411 RB1412 Applicable size MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 4.Follow the table for tightening torque of shock absorber lock nuts.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-100 13-/22-MXQ16-125 Note) Note) Note) Refer to the bottom view of MXQ16-50. 1322813 MXQ 1322Air Slide Table Dimensions: MXQ16 1322Axial piping (16): MXQ16-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

Air Slide Table Series MXQ

MXQ6-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Piston seal MXQ8-PS Rod seal NBR MXQ12-PS Set of left nos. !8, !9, @0 O-ring MXQ16-PS With end lock MXQ20-PS MXQ25-PS #3 #4 #5 #6 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.

Air Slide Table/Reversible Type Series MXQR

MXQ6-PS MXQ8-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Set of left nos. !8, !9, @0 Piston seal Rod seal NBR MXQ12-PS O-ring MXQ20-PS MXQ16-PS MXQ25-PS Seal kit includes these seals to provide as a set. Order the seal kit, based on each bore size. Replacement Parts: Grease Pack Grease pack part no.

01-mxq-e

MXQ6-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Piston seal MXQ8-PS Rod seal NBR MXQ12-PS Set of left nos. !8, !9, @0 O-ring MXQ16-PS With end lock MXQ20-PS MXQ25-PS #3 #4 #5 #6 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.

01-mxqr-e

MXQ6-PS MXQ8-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Set of left nos. !8, !9, @0 Piston seal Rod seal NBR MXQ12-PS O-ring MXQ20-PS MXQ16-PS MXQ25-PS Seal kit includes these seals to provide as a set. Order the seal kit, based on each bore size. Replacement Parts: Grease Pack Grease pack part no.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Connector structure ZSE/ISE40, 80 Series Available Mounting Options Series IP40 IP65 20 20A 20B(-L) 20C With waterproof cover (20B, 20C) Lead wire Mounting Available Mounting Options Series Bracket A Bracket B Bracket C Panel mount 20 20A 20B(-L) 20C The bracket configuration allows for mounting in four orientations.

High-Precision Digital Pressure Switch

. *2 Further reduced by approx. 60% in power-saving mode (For 20 series) The 20A, 20B, and 20C series have been added to the product lineup.

Air Slide Table Series MXP

L3 L3 End face Guide block Table 3 L3 (mm) 19 15 15 15 15 15 Model MXP10-10B MXP10-20B MXP12-15B MXP12-25B MXP16-20B MXP16-30B 212

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Table (3) Guide block L3 L3 End face L3 (mm) 19 15 15 15 15 15 Model MXP10-10B MXP10-20B MXP12-15B MXP12-25B MXP16-20B MXP16-30B Tightening torque (Nm) Model MXP10 MXP12 MXP16 1.67 8-8-5 5 Series MXP Model Selection Model Selection Step Formula/Data Selection Example Operating Conditions 1 Enumerate the operating conditions considering the mounting position and workpiece configuration.