Bore Size: 12mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 75mm, Adjuster: Both Sides Adjusters/Rubber Stoppers, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 1 pc.

The MXQ precision slide is ideal for applications requiring closely held parallelism and perpendicular specifications. The table and bearing guide are integrated into one precisely machined part made of hardened stainless steel. This minimizes tolerance stack-up associated with multiple part assemblies, and affords height tolerances of /-0.05mm. The bearing is a recirculating linear guide

The MXQ precision slide is ideal for applications requiring closely held parallelism and perpendicular specifications. The table and bearing guide are integrated into one precisely machined part made of hardened stainless steel. This minimizes tolerance stack-up associated with multiple part assemblies, and affords height tolerances of +/-0.05mm. The bearing is a recirculating linear guide

Air Slide Table

MXQ 12-2 With end lock (12) Dimensions [mm] Model J MXQ12-10Z2 68 MXQ12-20Z2 70 MXQ12-30Z2 80 MXQ12-40Z2 98 MXQ12-50Z2 108 MXQ12-75Z2 152 MXQ12-100Z2 177 Pilot port 2 x M5 x 0.8 30 11.4 5 J 12 8.5 0.5 3 11 6 36.2 18.7 MXQ12-10Z2 Symmetric type * Dimensions other than those listed above are the same as those for the standard type.

1

SY3000 SY5000 SY7000 Standard (0.7 MPa) Quick response type (0.7 MPa) High pressure type (1.0 MPa) SY30V-25A Gasket SY50V-25A Only metal seal type is available for the high pressure type. (1.0 MPa) a-side pilot valve Pilot cover x 1 + B tight flat head screw x 1 Coil type Nil T w Standard With power saving circuit Pilot cover Socket q w Rated voltage 5 6 24 VDC 12 VDC b-side pilot valve

Table of Contents

MGPL25-75A is selected.

2

Rc thread and G thread: 12 NPT thread: 1/2" (Maintenance space 100 mm or more) IDG60, 75, 100 IDG60A, 75A, 100A With fitting for purge air discharge (Semi-standard: P) Port size L 91 82 60 50 Purge air for dew point indicator Purge air discharge tubing port for dew point indicator 2.3 14 17 7 Applicable tubing O.D.

Dual Rod Cylinder Series CXSJ/CXS

CXS20-20A CXS20-25A CXS20-30A CXS20-35A CXS20-40A CXS20-45A CXS20-50A CXS20-60A CXS20-70A CXS20-75A CXS20-80A CXS20-90A CXS20-100A 20 92 116 30 25 97 121 30 102 126 35 107 131 40 40 112 136 45 117 141 50 122 146 60 132 156 70 142 166 75 147 171 60 80 152 176 90 162 186 100 172 196 574 Series CXS Dual Rod Cylinder With Air Cushion Dimensions: 25 57.5 22 45.5 10 2 x cushion needle 2 x Rc 1/

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

CXS20-20A CXS20-25A CXS20-30A CXS20-35A CXS20-40A CXS20-45A CXS20-50A CXS20-60A CXS20-70A CXS20-75A CXS20-80A CXS20-90A CXS20-100A 92 116 20 30 97 121 25 102 126 30 107 131 35 112 136 40 40 117 141 45 122 146 50 132 156 60 142 166 70 147 171 75 60 152 176 80 162 186 90 172 196 100 8-29-14 15 Dual Rod Cylinder: With Air Cushion Series CXS Dimensions: 25 57.5 22 45.5 10 2-cushion needle MX

smcmaintenancepartslist

table Model Level difference t mm Model Level difference t mm MXS6 MXQ6 MXS8 MXQ8 0.5 0.3 MXS12 MXQ12 MXS16 MXQ16 0.3 MXS20 MXQ20 0.5 0.5 MXS25 MXQ25 323 Series MXF Replacement Procedure of Seal 1 Caution 1-2.

42

Silencer box assembly: VVQ5000-75A (With gasket, screw) Type SU Specifications Caution Double check spacer with residual pressure exhaust VVQ5000-25A-1 (Plug-in type) VVQ5000-25A-5 (Plug lead type) Handling Precautions Double check spacer part no. VVQ5000-25A1 5 Intermediate stop Drop prevention Can hold an intermediate cylinder position for an extended time.

MXQ

-30 MXQ12-30 MXQ12-20 MXQ12-20 MXQ12-10 MXQ12-10 MXQ12-100 MXQ12-75 MXQ12-50 MXQ12-40 MXQ12-30 MXQ12-20 MXQ12-10 MXQ12-100 MXQ12-100 0.10 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.020 MXQ12-30 MXQ12-30 MXQ12-100 MXQ12-100 MXQ12-30 MXQ12-100 0.04 MXQ12-100 MXQ12-100 MXQ12-75 MXQ12-75 MXQ12-50 MXQ12-50 MXQ12-40 MXQ12-40 0.08 MXQ12-50 MXQ12

Air Slide Table Series MXQ

-30 MXQ12-20 MXQ12-10 MXQ12-100 0.10 0.020 MXQ12-100 0.04 MXQ12-30 MXQ12-50 MXQ12-100 MXQ12-75 MXQ12-50 MXQ12-40 Table displacement mm Table displacement mm Table displacement mm 0.08 0.016 MXQ12-50 MXQ12-75 MXQ12-30 MXQ12-40 0.03 MXQ12-75 MXQ12-40 0.06 0.012 MXQ12-20 0.02 0.04 0.008 MXQ12-20 MXQ12-10 0.01 MXQ12-10 0.02 0.004 0 0 160 40 80 120 0 20 40 60 80 100 20 40 60 80 100 Load N (1N

MX-OMP0051

)MXQ6B MXQ6(C) Nm MXQ6(A) RJ0603 0.85 MXQ8(A,C) MXQ6B RJ0603 0.85 MXQ12(A,C) MXQ8B RJ0805 1.67 MXQ16(A) MXQ12B RJ1006 3.14 MXQ20(A) MXQ16B RJ1007H 3.14 MXQ25(A) MXQ20B RH1410 10.8 12 2-8 kg RJ MXQ6(A) 0.6 0.6 0.6 MXQ8(A,C) 1 1 1 1 MXQ12(A,C) 2 2 2 1 MXQ16(A) 4 4 4 2.5 MXQ20(A) 6 6 6 5 MXQ25(A) 9 9 9 5.5 2 45 3 , , 13 OFF MXQ6(A) 2.85 5.65 MXQ8(A,C) 2.4 5.6 MXQ12(A,C) 4 5.5 MXQ16(A) 5

AIR SLIDE TABLE

Description Material Note Chromate treatment 40 Bushing Aluminum alloy (MXQ6,MXQ8(C),MXQ12(C) only) 41 O-ring NBR (MXQ6,MXQ8(C),MXQ12(C) only) 42 Parallel pin Stainless steel (MXQ6,MXQ8(C),MXQ12(C) only) 43 Steel ball High carbon chromium bearing steel 20 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com

Compressed Air Cleaning Filter Series

Standard size (Applicable compressor) Compressor output Symbol 75A 75 kW 125A 110 to 125 kW 150A 150 kW 220A 180 to 220 kW Page for details Description Symbol Nil Mist separator for high flow rate (Nominal filtration rating: 0.3 m) X13 P.71 Accessory Port size Symbol Nil Description D G F L Size Symbol 75A Applicable body size 125A 150A 220A Auto drain Pressure gauge Companion flange Anchor

Slide Tables MX Series

Shock absorber RB0805 RB0806 RB1007 RB1411 RB1412 Applicable size MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 4.Follow the table for tightening torque of shock absorber lock nuts.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-100 Note) Note) 1322Note) Refer to the bottom view of MXQ12-40. 809 MXQ 1322Air Slide Table Dimensions: MXQ12 1322Axial piping (12): MXQ12-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

AFF

Standard size (Applicable compressor) Compressor output Symbol 75A 75 kW 125A 110 to 125 kW 150A 150 kW 220A 180 to 220 kW Page for details Description Symbol Nil Mist separator for high flow rate (Nominal filtration rating: 0.3 m) X13 P.71 Accessory Port size Symbol Nil Description D G F L Size Symbol 75A Applicable body size 125A 150A 220A Auto drain Pressure gauge Companion flange Anchor

Main Line Filter

RATING Symbol Nil ) 1 EC700-003N EC800-003N EC900-003N 4 ELEMENT ( for FILTRATION RATING Symbol X13 ) 1 EC700-X30NX0 EC800-X30NX0 EC900-X30NX0 5 HEX.BOLT(M12) 12 6 SPRING WASHER 12 7 PLUG(1/4) 2 8 PLUG(1/4) 2 -6- FGX-OM-P003-A 3.Specifications 1How to Order Filtration rating of ELEMENT Standard size (Applicable compressor) Symbol Filtration rating Nil 3m Symbol Compressor output X13 0.3m 75A