1

SY3000 SY5000 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10 KQ2H12-17-X899 VVQ2000-51A-N7 VVQ2000-51A-N9 VVQ2000-51A-N11 SY7000 Port size 2 3.2 4 6 8 10 12 1/8" 5/32" 1/4" 5/16" 3/8" VVQ1000-50A-C2 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 Metric size

smcmaintenancepartslist

table Model Level difference t mm Model Level difference t mm MXS6 MXQ6 MXS8 MXQ8 0.5 0.3 MXS12 MXQ12 MXS16 MXQ16 0.3 MXS20 MXQ20 0.5 0.5 MXS25 MXQ25 323 Series MXF Replacement Procedure of Seal 1 Caution 1-2.

Air Slide Table

MXQ 12-2 With end lock (12) Dimensions [mm] Model J MXQ12-10Z2 68 MXQ12-20Z2 70 MXQ12-30Z2 80 MXQ12-40Z2 98 MXQ12-50Z2 108 MXQ12-75Z2 152 MXQ12-100Z2 177 Pilot port 2 x M5 x 0.8 30 11.4 5 J 12 8.5 0.5 3 11 6 36.2 18.7 MXQ12-10Z2 Symmetric type * Dimensions other than those listed above are the same as those for the standard type.

2

Do not use standard dew point 40C (symbol: L) type, standard dew point 60C (symbol: S) type and IDG30A, 50A, 30HA, 50HA for dehumidifying breathing air. Do not use only outlet air (dry air) in a closed room. 1. Consider the purge air flow rate. Find the purge air flow rate from the charts and calculate the required outlet air flow rate + purge air flow rate.

Table of Contents

CXS20-20A CXS20-25A CXS20-30A CXS20-35A CXS20-40A CXS20-45A CXS20-50A CXS20-60A CXS20-70A CXS20-75A CXS20-80A CXS20-90A CXS20-100A 92 116 20 30 97 121 25 102 126 30 107 131 35 112 136 40 40 117 141 45 122 146 50 132 156 60 142 166 70 147 171 75 60 152 176 80 162 186 90 172 196 100 8-29-14 15 Dual Rod Cylinder: With Air Cushion Series CXS Dimensions: 25 57.5 22 45.5 10 2-cushion needle MX

Dual Rod Cylinder Series CXSJ/CXS

CXS20-20A CXS20-25A CXS20-30A CXS20-35A CXS20-40A CXS20-45A CXS20-50A CXS20-60A CXS20-70A CXS20-75A CXS20-80A CXS20-90A CXS20-100A 20 92 116 30 25 97 121 30 102 126 35 107 131 40 40 112 136 45 117 141 50 122 146 60 132 156 70 142 166 75 147 171 60 80 152 176 90 162 186 100 172 196 574 Series CXS Dual Rod Cylinder With Air Cushion Dimensions: 25 57.5 22 45.5 10 2 x cushion needle 2 x Rc 1/

MXQ

-30 MXQ12-30 MXQ12-20 MXQ12-20 MXQ12-10 MXQ12-10 MXQ12-100 MXQ12-75 MXQ12-50 MXQ12-40 MXQ12-30 MXQ12-20 MXQ12-10 MXQ12-100 MXQ12-100 0.10 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.020 MXQ12-30 MXQ12-30 MXQ12-100 MXQ12-100 MXQ12-30 MXQ12-100 0.04 MXQ12-100 MXQ12-100 MXQ12-75 MXQ12-75 MXQ12-50 MXQ12-50 MXQ12-40 MXQ12-40 0.08 MXQ12-50 MXQ12

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Nil (Example) M9N 1 m . M (Example) M9NM 3 m . L (Example) M9NL 5 m .

Table of Contents

Option Stainless steel Standard Brass BC6 Brass BC6 NBR Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless steel, Brass

7

Valve Leakage Rate Fluid and Ambient Temperature Internal Leakage Seal material Leakage rate (Water) Note) Fluid temperature (C) Ambient temperature (C) VXD23 to 26 (8A to 25A) VXD27 to 29 (32A to 50A) 1 to 99 20 to 60 EPDM 0.2 cm3/min or less 1 cm3/min or less Note) No freezing External Leakage Seal material Leakage rate (Water) Note) VXD23 to 26 (8A to 25A) VXD27 to 29 (32A to 50A) 0.1

2/3 Port Valve

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

Pilot Operated

Description Size Option Stainless steel Option Stainless steel Brass (C37) Brass (C37) 15A to 25A 32A to 50A 15A to 25A 32A to 50A 15A to 25A 32A to 50A 15A to 50A 15A to 25A 32A to 50A 15A to 25A 15A to 25A 32A to 50A 10A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 10A to 25A 32A to 50A 10A to 25A 32A to 50A 10A to 50A 32A to 50A 10A to 50A 10A to 25A 32A to

Process Valve Series VNA

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB4 -25A VNB5 -32A, 32F VNB5 4 -32A, 32F VNB6 -40A, 40F VNB6 4 -40A, -40F VNB7 -50A, 50F VNB7 4 -50A, 50F No.

2/3 Port Valve

Note 4) 32A to 50A are 80oC. q 32A to 50A 15A to 25A Stainless steel FPM/EPR Bonnet w 32A to 50A O ring e Stainless steel, FPM, 15A to 25A Stainless steel, Brass, NBR Stainless steel, EPR Diaphragm assembly r Stainess steel, Brass FPM/EPR 32A to 50A Valve spring Stainless steel t Stainless steel Copper NBR Polyacetal PTFE Class B molded Stainless steel, Silver FPM/EPR, PTFE 15A to 25A

/

Description Size Brass (C37) (CAC407) body specification Stainless steel body specification Brass (C37) 8A to 25A Stainless steel Body 1 CAC407 32A to 50A Brass (C37) 8A to 25A Stainless steel Bonnet 2 CAC407 32A to 50A Brass (C37) 8A to 50A Brass (C37), Ni plated Nut 3 (NBR, FKM, EPDM) 32A to 50A O-ring 4 (NBR, FKM, EPDM) 8A to 50A O-ring 5 (NBR, FKM, EPDM) Stainless steel 8A to 25A Diaphragm

2/3 Port Valve for Various

Description Size Option Stainless steel Standard Brass BC6 Brass BC6 NBR Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless

VXD21/22/23

Option Stainless steel Standard Brass BC6 Brass BC6 NBR Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless steel, Brass

VXP21/22/23

Description Size Standard Brass BC6 Brass BC6 NBR Option Stainless steel Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless

VNB

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB5 -32A, 32F VNB6 -40A, 40F VNB7 -50A, 50F VNB4 -25A VNB54 -32A, 32F VNB64 -40A, -40F VNB74 -50A, 50F No.

Process Valve

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB4 -25A VNB5 -32A, 32F VNB5 4 -32A, 32F VNB6 -40A, 40F VNB6 4 -40A, -40F VNB7 -50A, 50F VNB7 4 -50A, 50F No.