PSxx-OMU0005CN

B -15No.PS-OMU0005CN-C (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -16No.PS-OMU0005CN-C (-M5) 1/6~1/4 1~1.5Nm (ZS-46-N) -01-N01 23 3~5 Nm -C4L-C6L 1/61/4 1~1.5Nm -17No.PS-OMU0005CN-C -18No.PS-OMU0005CN-C () TU0425( 42.5) -19No.PS-OMU0005CN-C FG -20No.PS-OMU0005CN-C Z/ISE20B(F)-S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -X () -S

ZISE20B.eng

MPa ISE20B ISE20B: 0.050 MPa/ZSE20B: 5.1 kPa/ ZSE20BF: 5.0 kPa "Nil" or M Hysteresis kPa ZSE20B(F) Safety Instructions Bracket A ISE20B Delay time 1.5 ms or less Bracket B psi P ZSE20B(F) Display color OUT1 ON: Green/OUT1 OFF: Red : Arbitrary display These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Settable range of user set value Settable value range Range Lower limit Upper limit -10..+10 V -10.50 to +10.45 V -10.45 to +10.50 V -5..+5 V -5.25 to +5.22 V -5.22 to +5.25 V -20..+20 mA -21.00 to +20.90 mA -20.90 to +21.00 mA 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V 0..5 V 0.00 to +5.22 V +0.03 to +5.25 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V 0..20 mA 0.00 to +20.90 mA +0.10 to +21.00

2

Example) AC30-F03DM-KSTV-13NR-A r t y w V q Body size 10 20 25 30 40 Symbol Description V w Pipe thread type Nil Metric thread (M5) V Rc V V V V N Note 1) NPT V V V V F Note 2) G V V V V + M5 M5 V 01 1/8 V 02 1/4 V V V V 03 3/8 V V V 04 1/2 V 06 3/4 V + V e Port size Nil Without auto drain V V V V V C Note 4) N.C.

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Rated voltage S L Z For VX21: VVX21-3A-P For VX22: VVX22-3A-P For VX23: VVX23-3A-P Voltage With surge voltage suppressor With light and surge voltage suppressor AC/ DC Voltage symbol 1 2 3 4 7 8 J 5 6 With light 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V Seal material: PTFE AC How to Order Manifold Assemblies (Example) Enter the valve and blanking plate to be mounted under the manifold

1

r e q w r 2-position single 5 (EA) 3 (EB) 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 1 (P) (A)4 2(B) 1 (P) (EA)5 3(EB) 2-position double t e q w r 2-position double 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 2(B) (A)4 (EA)5 1 (P) 3(EB) 3-position closed center/exhaust center/pressure center t e q w r 3-position closed center 3-position exhaust center 2(B) (A)4 2(B) (A)4 (EA)5 1 (P) 3(EB) (EA)5 1 (P) 3(EB) 3-position

Air Slide Table

Dimensions [mm] X Metal stopper with bumper2 v v ZHF1 Rubber stopper v v ZHM1 Metal stopper v v ZLC1 Metal stopper Series X Y MM MQ MXQ6 20 11 M3 x 0.5 5 MXQ8 24 13 M4 x 0.7 6 MXQ12 29 17 M5 x 0.8 6 MXQ16 29 23 M6 x 1 10 MXQ20 35 28 M6 x 1 13 MXQ25 44 33.5 M8 x 1.25 15 Metal stopper with bumper2 v v ZLF1 Rubber stopper v v ZLJ1 Shock absorber/RJ v v Y 1 Only for use with a centralized adjuster

Battery-less

LEFS v 11-LEFS v 25A-LEFS v LEFB v LEL v LEM v LEY v 25A-LEY v LEY-X5/X7 v LEYG v LES v LESH v LEPY v LEPS v LER v LEHZ v LEHZJ v LEHF v LEHS v High performance step motor (24 VDC) LEFS v LEFS v 11-LEFS v 25A-LEFS v LEFB v LEY v LEY-X5/X7 v LEYG v LES v LESH v LEPY v LEPS v Servo motor (24 VDC) Step motor (Incremental) LEFS v

42

) 1 (P) 5 (R1) 3 (R2) e q w q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 VQ5201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w e r q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5301 VQ5401 (A) 4 (B) 2 (A) 4 (B) 2 VQ5300 VQ5400 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5500 (A) 4 (B) 2 VQ5501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component Parts

Proposals for Energy Saving

(P .E.)

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 LEFS25 V V V V V V V V V V V V V V V V LEFS32 V V V V V V V V V V V V V V V V V V V V LEFS40 V V V V V V V V V V V V V V V V V V V V * Please consult with SMC for non-standard strokes as they are produced as special orders.

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A B P A B P A B P VFR3000 VFR4000 ARBF5050 VFR5000 1.0 MPa (1) 0.1 to 0.83 MPa (2) 0.05 to 0.83 MPa 5 to 60C (No freezing) (3) 1 8 0.16 0.46 0.72 0.83 5.5 5.1 12 11 M5 x 0.8 Rc 21 18.5 11 35 31 26 18.5 22 12 31 31 40 55 36 45 24 44 38 32 38 40 90 77 P A P B A EA B EB Effective area at supply side (mm 2) S at P1 = 0.7 MPa/P2 = 0.5 MPa 31 Effective area at exhaust side (mm 2) S at P2 =

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Load weight W (kg) MX 3. Operating pressure P (MPa) P 0.7 MPa MTS 4.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

I) (L) (Z) W C (mm) A B C D E F G H I J K L M N OO NN P Model 2-5.5 through 2-M4 x 0.7 thread depth 6 2-M5 x 0.8 thread depth 7.5 2-M5 x 0.8 thread depth 8 CXS20 64 25 62 23 50 28 6 12 12 30 10 M6 x 1.0 x 18.5l 53 11.5 2-M5 x 0.8 2-9.5 counterbore depth 5.3 2-6.9 through CXS25 80 30 78 28 60 35 6 12 12 30 12 M6 x 1.0 x 18.5l 64 14 2-M6 x 1.0 2-11 counterbore depth 6.3 2-6.9 through CXS32

VQ5000

35 53 Bottom ports 3-1/2 (ports P, A, B) 16 M5 ground screw SMC (Ports A, B) 31.5 37 41 50 98 G1/2 Electrical entry PE X 26.5 P R1 R2 18.4 18 27.5 41 41 27.5 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 0 1 0 1 0 1 0 1 3 position double check: VQ560 0 1 2 position double: VQ520 3 position closed center: VQ530 3 position exhaust center: VQ540 3 position pressure center:

VQ7-6/7-8

P reduced pressure A reduced pressure B reduced pressure ARB350-00-P ARB350-00-A ARB350-00-B A B A B 27 Series VQ7-8 Manifold Options Interface regulator Main EXH back pressure check plate P A B ARB350-00AXT512-25A Interface regulator Main EXH back pressure check plate (AXT512-25A) 282 ARB350-00P A B 146 SMC SMC 238.5 (208) 221 226.5 (196) 209 193.5 181.5 135.5 (105) 118 PA B PE PE P 90.5

VQ7-6/7-8

When the release valve w is OFF , the supply pressure from port Po is blocked, and the air which was being supplied to the manifold side port P passes through the release valve and is X Pressure switch discharged from port R1. P' 3. The pressure switch is piped into the outlet side of the release valve w. (It operates when the Air filter regulator release valve w is energized.)

VQ4000

5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 24 VDC 1 W DC (42 mA), 0.5 W DC (21 mA) 3 position exhaust center 12 VDC 1 W DC (83 mA), 0.5 W DC (42 mA) 2 position double (Metal) (A) 4 (B) 2 (A) 4 (B) 2 100 VAC Inrush 1.2 VA (12 mA), Holding 1.2 VA (12 mA) Power consumption (Current) 110 VAC Inrush 1.3 VA (11.7 mA), Holding 1.3 VA (11.7 mA) 1 (P) 5 (R1) 3 (R2) 200 VAC Inrush 2.4 VA (12 mA), Holding 2.4

VQC

3 18.5 9.5 7.5 4-M8 2-M12 M3 2n-C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread (7.5) 20.5 2-C8 1(P) port 34 P = 10.5 Formulas: L1 = 10.5n + 45, L2 = 10.5n + 167.5 (for 1 input block.

2/3 Port Valve

Main port Rc(PT) A E K T B F G L M N P U C H Q V D I R W J S Model VNB2V-10A VNB2V-15A VNB3V-20A VNB4V-25A 3 8 1 2 3 4 1 72.5 80.5 126.5 170.5 173.5 180.5 24.3 63 2.3 42 75 52 25 28 87 26 34 14 97 4.5 55 114 28.3 33.3 80 90 17.5 20 84 100 92 108 125.5 138 154 182 198 185 201 192 208 2.3 2.3 60.5 73 50 60 80 81 62 72 30 35 35 40 92 93 31 36 43 49 102 103 5.5 6.5 141.5 4.2-16 VNB 32A, 40A,