Table of Contents

size A B 2-P Port size A B M M 2-J, thread depth K 2-J, thread depth K G1/2 Specifications with bracket Orifice 2, 3, 4.5, 6 Orifice 8, 10 7.5 2.3 Bracket Y 29 Mounting hole 2-5.3 Bracket 22 5.5 52 28 W U 67 X (mm) Grommet Conduit DIN terminal Electrical entry Mounting dimensions Bracket mounting Port size P Model Orifice size A B C D E F H Conduit terminal J M4 M5 M5 M5 M5 K M Q R 50 60

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T.T. 12 10 1 (P) 10.5 (37.1) (47.6) (A) 2 3 port 30 12 10 1 (P) 3 (R) 17 44 2 x 4.6 mounting hole 25.4 2 x M5 x 0.8 depth 4 14 8.5 * 0.5 MPa supply F.O.F.* 13 N P .T. 3.2 mm O.T. 2.3 mm T.T. 5.5 mm One way roller lever VM123-M5-02A VM133-M5-02A VM123-M5-02SA VM133-M5-02SA 10 Polyacetal or hard steel roller 46.5 29.2 (A) 2 Symbol 2 port 8 P.T. O.T. T.T.

Air Slide Table

J I Pilot port 2 x M5 x 0.8 7 5H9 ( ) depth 2 +0.030 0 43 7.3 (Maximum screw-in depth) 5.5 38.6 +0.030 0 5H9 ( ) depth 2 3.3 (Minimum screw-in depth) B 30 42 60 3 72 36 B N x M5 x 0.812 F N 2 1 x F 29 Cross-sectional view B-B 2 x M5 x 0.8 thread depth 7 27 16 36 48 M 0.5 7 ZZ Z J I Bottom view of MXQ20A-50Z Pilot port 2 x M5 x 0.8 (Plug: Width across flats 7) G (NN 1) x H 5H9 ( ) depth

Battery-less

Provided by the customer Provided by the customer Provided by the customer Provided by the customer IO-Link master PLC PLC PLC PLC PLC Communication plug connector for DeviceNet Communication plug connector for CC-Link p. 177 p. 177 Communication plug connector for IO-Link p. 177 JXC-CD-S Straight type LEC-CMJ-S Straight type JXC-CL-S Straight type T-branch type T-branch type JXC-CD-T LEC-CMJ-T

New

g d C J IN OUT G1/2 j f 2 x M Depth 5 J J IN OUT H G A 2 x P Port size B B1 2 x M Depth 5 H B1 G A 2 x P Port size B i b Faston type D 11 Q F Terminal part Faston connector 250 Series Bracket mounting hole dimensions a1 (VXZ23, 25) Note) a a1 (VXZ24, 26) Note) 11 E C R 9 6.5 6.5 IN OUT 15 2 x M Depth 5 H B B1 G A 10.5 2 x P Port size (mm) Model A B B1 C D E F G Port size P 1/4, 3/8 1/2 3/

Proposals for Energy Saving

with M5 thread Flow direction: Right to left With element service indicator Size 1/8 1/4 3/8 1/2 3/4 1 1 1/2 2 01 02 03 04 06 10 14 20 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B, 650 75B, 850 Rc NPT G 1/8 1/4 3/8 1/2 3/4 1 1 1/2 Nil J M R T Nil B C D Option Accessory Size Bore size RT T R JR JRT MR J MRT JT MT M 03 06 04 01 02 20 14 Size 10 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B

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IN OUT M M 1 2 x P 1 (IN), 2 (OUT) port 2 x P 1 (IN), 2 (OUT) port F I J K L I F J (D) DIN terminal: D Conduit terminal: T E (U) (V) E V U 32 31.5 25 (44) G1/2 T T G1/2 M M Cable 6 to 12 2 x P 1 (IN), 2 (OUT) port 2 x P 1 (IN), 2 (OUT) port I F J I F J With bracket 1 f 2.6 Bracket e 2 x 8.5 b a d (mm) Electrical entry Bracket mounting dimension Grommet Model Port size P Conduit DIN terminal

Digital Pressure Switch

[F 0] Units selection function Page 30 Units specification Pressure range Default setting ISE20A MPa "Nil" or M ZSE20A(F) kPa ISE20A P psi ZSE20A(F) [F 1] Setting of OUT1 Page 31 Item Explanation Default setting Output mode Either hysteresis mode, window comparator mode, error output or output off can be selected.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LER MH LEH ML + Stroke MA MC MD Section XX LEY -X5 Section XX details 11LEFS XB 11LEJS XA H9 XA 25A[mm] Size Stroke range [mm] C D EH EV H J K L M O1 R S T U B V LEC 25 15 to 100 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 46.5 1.5 136.5 40 105 to 400 161.5 LEC S 32 20 to 100 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 61 1 156 60 105 to 500 186 LEC SS-T 63 50 to 200 21 40

Table of Contents

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

Dual Rod Cylinder Series CXSJ/CXS

) N Z L V (Opposite side: Same) QQ TT Q T U R UU (Piping port) (Opposite side: Same) Z L I N W G NN (mm) A B C D E G H I J K L M N P NN F Model 2 x 5.5 through 2 x M4 x 0.7 thread depth 6 2 x M5 x 0.8 thread depth 7.5 2 x M5 x 0.8 thread depth 8 CXS20 64 25 62 23 11.5 50 28 6 12 12 30 10 53 2 x M5 x 0.8 2 x 9.5 counterbore depth 5.3 2 x 6.9 through CXS25 80 30 78 28 14 60 35 6 12 12 30 12

Pilot Operated

Body material: Brass (C37) (32A or more: CAC407), Stainless steel Body material: Brass (C37) (32A or more: CAC407), Stainless steel VXD2142/2152/2262 (15A to 25A) VXD2140/2150/2260 (15A to 25A) VXD2130 (10A) !4 !5 !3 o !1 !2 i e t !0 A !3 !2 !1 o i t !0 !3 !2 !1 o i e t !

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Pin name 1 2 3 4 DC (+) OUT2 DC () OUT1 1 3 2 x Piping port Z U T S 4 x WX G 2 4 (35.5) 42 H For PF3W721 OUT IN AA G 4 x P K L 2 x Piping port G N DD PF3W504/520/540/511/521 Remote sensor unit Y A E J F 30 W B V 2 x Piping port Z S T U 4 x WX G H 42 (35.5) For PF3W521 IN OUT AA G 4 x P K L 2 x Piping port G N (mm) Bracket dimensions Model Port size A AA B D DD E F G H J K L N P (Rc, NPT,

2/3 Port Valve

2 2-Rc 3 4 2-Rc1 Model J L K M N O P Q R S T U V M5 X 0.8 Depth 5.5 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 X 8 7 X 0 9 X 2 9 X 2 202.5 232 267 286.5 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B M6 X 1 Depth 6 70 92 109 M8 X 1.25 Depth 6 M8 X 1.25 Depth 6 4.2-34 2 Port Valve for Steam

Process Valve Series VNA

2 x 2 x A B A B A B A B 60 80 100 115 235 (221) 264.5 (250.5) 300 (286) 319 (305) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 95.5 111 119 1 8 VNC 1 4 1 4 VNH Note) ( ): CE compliant product (-Q) VND Model J K L M N O P Q R S T U V VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth

5-Port Solenoid Valve

EX500: pp. 110, 112 EX600: p. 124 EX245: p. 124-1 EX250: p. 132 EX260: p. 140 EX126: p. 148 EX120: p. 156 EX180: p. 156-1 Lead Wire t Back pressure check valve (Built-in valve type) * Only Nil is available for M5. Circular Connector Nil None H Built-in !3 Type of mounting screw EX500 * Only the rubber seal type is available.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Z) TT QQ (G) D-X T Q 20U R UU (Piping port) (Opposite side: Same) Data N (I) (L) (Z) W C (mm) A B C D E F G H I J K L M N OO NN P Model 2-5.5 through 2-M4 x 0.7 thread depth 6 2-M5 x 0.8 thread depth 7.5 2-M5 x 0.8 thread depth 8 CXS20 64 25 62 23 50 28 6 12 12 30 10 M6 x 1.0 x 18.5l 53 11.5 2-M5 x 0.8 2-9.5 counterbore depth 5.3 2-6.9 through CXS25 80 30 78 28 60 35 6 12 12 30 12 M6 x 1.0

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H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

energy saving effect

/Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt fixing brackets 2 pcs.

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Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.