Bracket mounting inserts found on the standard ISE20A are omitted as well. 25A-ISE20A is UL/CSA, CE and RoHS compliant with an IP40 enclosure rating.

Bracket mounting inserts found on the standard ISE20A are omitted as well. 25A-ISE20A is UL/CSA, CE and RoHS compliant with an IP40 enclosure rating.

2

Connection thread Face seal M R G Uni UNF NPT M R Uni P.319 P.319 P.391 Metric size P.383 New New P.419 P.351 P.351 P.403 Inch size P.375 P.413 P.375 P.427 Series KQ2 INDEX 316 Series KQ2 Selectable seal method Face seal adopted for threading Connection thread: R, NPT Improved installability (Reduced tool-tightening after hand-tightening) Face seal Face seal Sealant 1/6 of a rotation or

Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

1

P.T. 4 Max. 6 R port (3 port only) (68) 30 38 24 10.5 16 Symbol 2 port (A) 2 12 10 1 (P) 3 port (A) 2 17 44 25.4 10 12 1 (P) 3 (R) 2 x 4.6 mounting hole 2 x M5 x 0.8 depth 4 8.5 14 * 0.5 MPa supply F.O.F.* 29 N P .T. 2 mm O.T. 1.5 mm T.T. 3.5 mm Cross roller plunger VM122-M5-07A VM132-M5-07A VM122-M5-07SA VM132-M5-07SA Panel mounting hole 2 x M14 x 1 Hexagon nut Thickness 5, Width across

ZISE20A.eng

Bracket B MPa ISE20A ISE20A: 0.050 MPa/ZSE20A: 5.1 kPa/ ZSE20AF: 5.0 kPa "Nil" or M Hysteresis kPa ZSE20A(F) Safety Instructions ISE20A Delay time 1.5 ms or less Mounting with panel mount adapter Mount part (a) to the front of the body and fix it. Then insert the body with (a) into the panel until (a) comes into contact with the panel front surface.

Battery-less

/Belt Drive LEFB Series Battery-less Absolute (Step Motor 24 VDC) p. 12 Model Selection p. 13 How to Order p. 43 Specifications p. 45 Weight p. 45 Construction p. 46 Dimensions p. 47 Rod Type LEY Series Battery-less Absolute (Step Motor 24 VDC) p. 54 Model Selection p. 55 How to Order p. 61 Specifications p. 63 Weight p. 64 Construction p. 65 Dimensions p. 67 Guide Rod Type

Air Slide Table

Pilot port 2 x M5 x 0.8 (Plug: Width across flats 7) MXQ 25A-mm2 With end lock, extension stroke end adjuster (25) Type Adjuster part no.

42

/set) When supplying two different pressures to one manifold, this is used to shut off between stations with different pressures. 11.8 21.8 R P R R P R R P R SUP/EXH passage blocked EXH passage blocked SUP passage blocked Indication labels to confirm the blocking position are attached.

New

C R E IN OUT IN OUT 1.2 1.2 E B B1 B1 B 2 x P Port size 2 x P Port size Terminal part Faston connector 250 Series 11 9 6.5 15 (mm) Bracket mounting B B1 C D E F U U1 W X X1 Y One-touch fitting P Model 69 37.5 90 (96.5) 35 15.5 22 54 27 44 65 32.5 56 VXZ2 3 A 10, 3/8", 12 Electrical entry Conduit Faston One-touch fitting P Model Q R Q R 10, 3/8", 12 50 57.5 (64) 25.5 63.5 (70) VXZ2 3 A ( )

Proposals for Energy Saving

1/8, M5 x 0.8, NPTF 1/8, M5 x 0.8 ZX ejector mounted type: M5 x 0.8 Port size R 1/8, M5 x 0.8, NPTF 1/8, M5 x 0.8 Enclosure IP40 Note 1) For vacuum operation, a momentary pressure of 0.5MPa will not be a problem.

/

size P A Q R Conduit T DIN terminal Conduit terminal E D B C F H N.C.

VQ5000

Note ) 2 position double and 3 position cannot be mounted. 40.6 3(R2) 5(R1) P1 Po 1(P) Circuit diagram Plug-in type Plug lead type SUP blocking plate VVQ5000-16A-1 EXH blocking plate VVQ5000-16A-2 18.5 20.2 When 2 or more different pressures are supplied to one manifold, blocking plates are installed between stations under different pressures. 28.8 44.6 R P R R P R R P R SUP/EXH passages

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

Table of Contents

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

VQ7-6/7-8

1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Side port Rc3/8 Bottom port Rc1/4 FHG Bottom port Rc3/8 1 (P) 5 (R1) 3 (R2) Port R is Rc3/8 (A) 4 (B) 2 Seal type FJG Nil R Metal seal Rubber seal 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Options FPG Nil N None Indicator light Indicator light with surge voltage suppressor Individual pilot exhaust 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Z FIG V 5 (R1) 3 (R2) 1 (P) Optional

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note ) 2 position double and 3 position cannot be mounted. 40.6 3(R2) 5(R1) P1 Po 1(P) Circuit diagram Plug-in type Plug lead type SUP blocking plate VVQ5000-16A-1 EXH blocking plate VVQ5000-16A-2 18.5 20.2 When 2 or more different pressures are supplied to one manifold, blocking plates are installed between stations under different pressures. 28.8 44.6 R P R R P R R P R SUP/EXH passages

Table of Contents

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

VQ7-6/7-8

AXT632-45-1 AXT632-45-2 AXT632-45-4 AXT632-45-5 AXT632-45-6 AXT632-45-7 AXT632-45-8 AXT632-45-9 AXT632-45-10 AXT632-45-11 AXT632-45-12 AXT632-45-13 Mounting bolt Size M5 x 35 with SW M5 x 15 with SW M5 x 45 with SW M5 x 60 with SW M5 x 65 with SW M5 x 70 with SW M5 x 75 with SW M5 x 90 with SW M5 x 95 with SW M5 x 100 with SW M5 x 105 with SW M5 x 115 with SW VK Option mounting diagram SMC

VQ7-6/7-8

A B A B Interface regulator 254 P A B ARB250-00127 SMC SMC 193.5 (165.5) 205.5 (177.5) 195.5 (167.5) 183.5 (155.5) Manual override E R Residual pressure release valve spacer (AZ503-82 ) A B 65 (37) 105 (77) 14 PA 12 PB B 1 95 (67) 65 (37) 12 PB 14 PA B 1 PA 5 3 R PA A 5 3 R P A SMC P R1 R2 SMC R1 R2 Dimensions inside ( ) are for sub-plate.