2/3 Port Valve

VX3324-03 VX3234-03 VX3334-03 VX3244-03 VX3344-03 6 0.33 0.5 4 9 0.19 2.2 3.4 3 8 0.33 3 6 (10A) Option Material 0.5 4 9 No.

Pilot Operated

Description Size Option Stainless steel Option Stainless steel Brass (C37) Brass (C37) 15A to 25A 32A to 50A 15A to 25A 32A to 50A 15A to 25A 32A to 50A 15A to 50A 15A to 25A 32A to 50A 15A to 25A 15A to 25A 32A to 50A 10A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 10A to 25A 32A to 50A 10A to 25A 32A to 50A 10A to 50A 32A to 50A 10A to 50A 10A to 25A 32A to

/

VXE2320-03 VXE2230-03 VXE2330-03 VXE2240-03 VXE2340-03 VXE2250-03 VXE2350-03 VXE2260-03 VXE2360-03 VXE2260-04 VXE2360-04 Non-leak/ Medium vacuum 106 Pam3/sec or less Note) 1/8 (6A) Air 300 NBR, FKM 1 cm3/min or less Note) Value for V and M options (Non-leak/Medium vacuum) 470 620 300 470 620 470 620 560 700 560 700 470 620 470 620 470 620 560 700 560 700 560 700 3 0.45 0.33 3.0 4.5 2.3 0.46

42

Circuit diagram Plug lead type Plug-in type Individual SUP spacer VVQ5000 P 1 03 179 (Plug-in type) 32 133 (Plug lead type) Thread type 16 Port size 03 3/8 04 1/2 Manifold Nil Rc F G N NPT T NPTF 1 Plug-in type 5 Plug lead type 1 P 40.3 1(P) 4(A) 03: 3/8 04: 1/2 2(B) 1(P') 3(R2) 5(R1) Circuit diagram Plug-in type Plug lead type Individual EXH spacer 179 (Plug-in type) VVQ5000 R 1 03 133

Proposals for Energy Saving

(P .E.)

Fluoropolymer Piping Equipment

2 3 4 5 6 LQHB Panel mounting nut LQNP TL TIL TLM TILM P.908 Nut insert bush LQ1-U B N TD TID TH TIH P.909 Blanking plug LQ-P P.909 Tubing plug LQ1-CP P.909 Note) Basic size With reducer 869 LQ3 Series LQ3 Series P.912 Port size Tubing O.D.

VQ5000

5 (R1) 3 (R2) Circuit diagram Plug lead type Plug-in type Individual SUP spacer 179 (plug-in type) 133 (plug lead type) VVQ5000-P-1T (Plug-in type) VVQ5000-P-5T (Plug lead type) 03 04 03 04 32 16 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 1 P 40.3 1(P) 4(A) 2(B) 03: 3/8 04: 1/2 1(P') 5(R1) 3(R2) Circuit diagram

2/3 Port Valve for Various

Description Size Option Stainless steel Standard Brass BC6 Brass BC6 NBR Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless

Table of Contents

Body type Plug-in type VVFS3000-P-03-1 Non plug-in type VVFS3000-P-03-2 Part no. Individual EXH spacer An individual EXH spacer set on manifold block can form EXH port for every valve.

VXD21/22/23

Option Stainless steel Standard Brass BC6 Brass BC6 NBR Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless steel, Brass

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

LQ3 P 03 1 1 Packaging Size Symbol 1 2 3 4 5 6 7 Thread type Used to block fittings which are not being used.

3

PF3W720/520-;04 (at 16 L /min) PF3W740/540-;04 (at 40 L /min) PF3W704/504-;03 (at 4 L /min) PF3W740/540-;06 (at 40 L /min) PF3W720/520-;03 (at 8 L /min) 0 2 4 6 8 0 2 4 6 8 0 2 4 6 8 Straight piping length [cm] Straight piping length [cm] Straight piping length [cm] Pressure: 0.3 MPa Piping diameter: 25A (Port size 10) Pressure: 0.3 MPa Piping diameter: 32A (Port size 12) PF3W711/511 PF3W721

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

5 (R1) 3 (R2) Circuit diagram Plug lead type Plug-in type Individual SUP spacer 179 (plug-in type) 133 (plug lead type) VVQ5000-P-1T (Plug-in type) VVQ5000-P-5T (Plug lead type) 03 04 03 04 32 16 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 1 P 40.3 1(P) 4(A) 2(B) 03: 3/8 04: 1/2 1(P') 5(R1) 3(R2) Circuit diagram

VQ7-6/7-8

P reduced pressure A reduced pressure B reduced pressure ARB350-00-P ARB350-00-A ARB350-00-B A B A B 27 Series VQ7-8 Manifold Options Interface regulator Main EXH back pressure check plate P A B ARB350-00AXT512-25A Interface regulator Main EXH back pressure check plate (AXT512-25A) 282 ARB350-00P A B 146 SMC SMC 238.5 (208) 221 226.5 (196) 209 193.5 181.5 135.5 (105) 118 PA B PE PE P 90.5

3 Port Solenoid Valve/

3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X 6 VP500/700-X536 Dimensions Residual Pressure Release Valve (-X536) VP542(R)-5 D YZ1-03 -X536 VP542(R)-5 D YZ1-03 -M -X536 3/8" [2(A) port] Port size: 1/8" (Without check valve) Applicable tube O.D.: 6, 1/4" (With check valve) (External pilot port) 31 2 x 4.2 (For mounting) Safety limit switch Made by OMRON 3.5 7

3 Port Solenoid Valve/

M12 connector pin number 1(P) 1(P) Safety limit switch Made by Rockwell Automation Symbol Pin Numbers (Built-in switch 3N.C.)

VQ4000

Blanking plate assembly VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-1Individual EXH spacer VVQ4000-R-102 03 02 03 Throttle valve spacer VVQ4000-20A-1 SUP stop valve spacer VVQ4000-37A-1 SUP/EXH block plate VVQ4000-16A Interface regulator ARBQ4000-00-1 A B P < EXH blocking plate > < SUP blocking plate > For exhaust cleaner mounting [-C ](1) Release valve spacer VVQ4000-24A-1D (1, 2) Double

Plug-in/Plug Lead: Single Unit

5 (R1) 3 (R2) Circuit diagram Plug lead type Plug-in type Individual SUP spacer 03 04 03 04 VVQ5000-P-1(Plug-in type) VVQ5000-P-5(Plug lead type) 179 (Plug-in type) 133 (Plug lead type) 32 16 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 1 P 40.3 1(P) 4(A) 2(B) 03: Rc 3/8 04: Rc 1/2 1(P') 5(R1) 3(R2) Circuit diagram

VQ7-6/7-8

Dimensions inside are for sub-plate aperture Rc 3/4. 3-10-33 34 Series VQ7-8 Manifold Option Parts Individual EXH spacer VV72-R-03/04 Individual SUP spacer VV72-P-03/04 R1/R2 individual EXH spacer VV72-R2-04 Reverse pressure spacer AXT512-19A-1 2 Silencer box AXT512-26A SMC SMC 223.5 211.5 183.5 171.5 120.5 140 PA B PE PE PA B PE PE PE P 80.5 P R1 R2 78 R2 R1 EA EB Courtesy of Steven Engineering

VQ7-6/7-8

Dimensions inside are for sub-plate aperture Rc 3/4. 3-10-33 Series VQ7-8 Manifold Option Parts Individual EXH spacer VV72-R-03/04 Individual SUP spacer VV72-P-03/04 R1/R2 individual EXH spacer VV72-R2-04 Reverse pressure spacer AXT512-19A-1 2 Silencer box AXT512-26A SMC SMC 223.5 211.5 183.5 171.5 120.5 140 PA B PE PE PA B PE PE PE P 80.5 P R1 R2 78 R2 R1 EA EB A EA EB 2-3/8, 1/2 Individual