Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Vacuum

Flat wlth rib 1 0 1 2 21 29.946 5 6 1 . 7 1 3 1 5 't2 21 29.946 5 6 3 1 . 8 '19 20 1 6 1 8 12.5 215t301 46.S 5 3.5 Dep type 23 23 22 23 23 22 50 48 50 Applicable Tube ) 56 54 56 54 57 co 57 '5l3e" lube may be subslituled for 4mm.

Vacuum

Flat wlth rib 1 0 1 2 21 29.946 5 6 1 . 7 1 3 1 5 't2 21 29.946 5 6 3 1 . 8 '19 20 1 6 1 8 12.5 215t301 46.S 5 3.5 Dep type 23 23 22 23 23 22 50 48 50 Applicable Tube 56 54 56 54 57 co 57 '5l3e" lube may be subslituled for 4mm.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Cylinder: Non-lube type 1 2 1 2 2 1 2 1 1 1 VER 3 L L 2 2 VEA 10 AFM AF ARP20K/30K/40K VHS VY1 1 1 12 2 4 14 Solenoid valve: Non-lube type VBA VBAT 5 1 3 AP100 2 1 2 1 2 1 L L AFM AF ARP 701 Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 RoHS Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Symbol Regulator with backflow function Regulator

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Cylinder: Non-lube type 1 2 1 2 2 1 2 1 1 1 VY1 3 L L VBA VBAT 2 2 10 AFM AF ARP20K/30K/40K VHS AP100 1 1 12 2 4 14 Solenoid valve: Non-lube type 5 1 3 2 1 2 1 2 1 L L AFM AF ARP 759 Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 Series RoHS Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Series Symbol Regulator with backflow function

Table of Contents

-07ST ASD430F-N02-09ST ASD430F-N02-11ST ASD530F-N02-07ST ASD530F-N02-09ST ASD530F-N02-11ST ASD530F-N03-07ST ASD530F-N03-09ST ASD530F-N03-11ST ASD630F-N04-11ST 8.4 9.3 11.4 12 11.6 13.2 15.2 13.2 15.2 18.5 13.2 15.2 18.5 13.2 15.2 18.5 18.5 12.9 17.5 29.4 10-32 UNF 7.8 27.4 0.7 31 30.7 11.7 4.5 10 9.6 8 16.5 13.5 16.5 17 18.5 17 18.5 21 17 18.5 21 17 18.5 21 21 23.3 20.7 23.9 25.6 28.2 25.6

AS

21 32.1 39.2 18.5 13.2 1/4" 18.5 19 AS221FG-02-04 AS221FG-N01-09 4 14.1 25.3 32.4 16 25.2 34.4 15.2 10.4 5/16" 21 21 32 AS221FG-02-06 AS221FG-N02-03 6 25.2 34.4 17.7 17 25.2 10.4 34.4 12.8 5/32" 16 17 R 1/4 18.5 34.9 39.9 34.4 29.4 32 AS221FG-02-08 AS221FG-N02-05 8 17.7 24.9 34.2 34 18.5 27.2 11.4 36.4 15.2 3/16" 17 NPT 1/4 AS221FG-02-10 AS221FG-N02-07 17.5 10 25.2 34.5 19.5 36 21 35.3 13.2

Tamper Proof and Flat Head Screw

-07ST 25.6 43.9 13.2 1/4" 17 18 ASD430F-N02-09ST 28.2 41.7 40.7 1.5 18.5 15 7 46.5 17.5 15.2 5/16" NPT1/4 36.9 11 18.5 ASD430F-N02-11ST 31 49.3 19.7 18.5 3/8" 21 ASD530F-N02-07ST 25.6 48.7 13.2 1/4" 17 20.3 ASD530F-N02-09ST 28.2 53.7 55.3 1.5 51.3 23 19.8 9.5 19 15.2 5/16" NPT1/4 18.5 49.5 15.4 ASD530F-N02-11ST 32.6 54.1 23.1 18.5 3/8" 21 ASD530F-N03-07ST 25.6 48.7 13.2 1/4" 17 20.3 ASD530F-N03

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

AS321F-02-06SD AS221F-N02-09SD 5/16" 15.2 27.2 36.4 6 12.8 39.3 27.8 17 33.9 43.2 20 21 AS321F-02-08SD AS221F-N02-11SD 3/8" 17.9 8 15.2 41 29.5 18.5 55.3 23 9.8 49.3 R 1/4 1.2 19 21.8 AS321F-02-10SD AS321F-N02-07SD 1/4" 13.2 27.8 39.3 17 10 18.5 43.3 21 31.8 AS321F-02-12SD AS321F-N02-09SD NPT 1/4 19 23 9.8 21.8 55.3 1.2 49.3 5/16" 15.2 29.5 41 18.5 12 20.9 44.3 32.8 22 AS321F-03-06SD AS321F-N02

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

-11ST 21 18.5 35.3 44.5 3/8" 29.5 41 8 18.5 15.2 76 R1/4 19 23 9.5 1.5 49.3 21.3 54.8 73 AS321F-02-10ST AS321F-N02-07ST 17 1/4" 13.2 27.8 39.3 31.8 43.3 10 21 18.5 80 76 21.3 54.8 AS321F-02-12ST AS321F-N02-09ST 18.5 1.5 49.3 5/16" 15.2 29.5 41 NPT1/4 19 23 9.5 32.8 44.3 12 22 20.9 82 80 AS321F-03-06ST AS321F-N02-11ST 21 3/8" 17.9 31.8 43.3 27.8 39.3 6 17 12.8 77 77 AS321F-03-08ST AS321F-N03

Dual Speed Controller with One-touch Fitting Series ASD

-07ST ASD430F-N02-09ST ASD430F-N02-11ST ASD530F-N02-07ST ASD530F-N02-09ST ASD530F-N02-11ST ASD530F-N03-07ST ASD530F-N03-09ST ASD530F-N03-11ST ASD630F-N04-11ST 8.4 9.3 11.4 12 11.6 13.2 15.2 13.2 15.2 18.5 13.2 15.2 18.5 13.2 15.2 18.5 18.5 12.9 17.5 29.4 10-32 UNF 7.8 27.4 0.7 30.7 31 4.5 11.7 10 9.6 8 16.5 13.5 16.5 17 18.5 17 18.5 21 17 18.5 21 17 18.5 21 21 23.3 20.7 23.9 25.6 28.2 25.6

CATALOG

17.2/10 10 14 KQS10-U02 8 17 28.5 22 21 39/26.6 10 38 KQS10-U03 8 17 26.5 20 21 39/26.6 10 12 KQS10-U04 8 21 27 19 21 39/26.6 12 14 KQS12-U02 8 19 35 25.5 22 46/44.5 12 38 KQS12-U03 9 19 28 19 22 60/44.5 12 12 KQS12-U04 9 21 27 19 22 60/44.5 P R O D U C T S E L E C T O R 45 M A L E E L B O W : KQK (KQ2K) Use to tubing toward 45 from the thread part.

Stainless Steel 316 Fittings

(inch) H (Width across flat) 12 17 12 17 12 17 19 14 17 19 17 19 24 21 24 Connection thread NPT Note 1) D M Weight (g) L1 L2 Model KQG2F01-N01 KQG2F01-N02 KQG2F03-N01 KQG2F03-N02 KQG2F07-N01 KQG2F07-N02 KQG2F07-N03 KQG2F09-N01 KQG2F09-N02 KQG2F09-N03 KQG2F11-N02 KQG2F11-N03 KQG2F11-N04 KQG2F13-N03 KQG2F13-N04 24.1 29.1 24.6 29.6 25 30 31.2 27.2 32.2 33.4 32.1 33.3 38.6 34.6 39.9 1/8 1/4 1

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

AS321F-02-08SD 18.3 35.3 44.5 41 3/8" 29.5 18.5 8 15.2 21 76 18.3 R 1/4 19 23 9.8 1.2 49.3 21.3 54.8 AS321F-N02-07SD AS321F-02-10SD 1/4" 13.2 27.8 39.3 17 43.3 31.8 21 10 18.5 80 73 AS321F-N02-09SD AS321F-02-12SD NPT 1/4 19 23 9.8 1.2 49.3 5/16" 15.2 29.5 41 18.5 44.3 32.8 22 12 20.9 82 76 21.3 54.8 AS321F-N02-11SD AS321F-03-06SD 3/8" 17.9 31.8 43.3 21 39.3 27.8 17 6 12.8 77 80 AS321F-N03

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

AS321F-02-06SD AS221F-N02-09SD 5/16" 15.2 27.2 36.4 6 12.8 39.3 17 27.8 33.9 43.2 20 21 AS321F-02-08SD AS221F-N02-11SD 3/8" 17.9 8 15.2 41 18.5 29.5 55.3 23 9.8 49.3 R 1/4 1.2 19 21.8 AS321F-02-10SD AS321F-N02-07SD 1/4" 13.2 27.8 39.3 17 10 18.5 43.3 21 31.8 AS321F-02-12SD AS321F-N02-09SD NPT 1/4 19 23 9.8 21.8 55.3 1.2 49.3 12 5/16" 15.2 29.5 41 18.5 20.9 44.3 22 32.8 AS321F-03-06SD AS321F-N02

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

-07ST ASD430F-N02-09ST ASD430F-N02-11ST ASD530F-N02-07ST ASD530F-N02-09ST ASD530F-N02-11ST ASD530F-N03-07ST ASD530F-N03-09ST ASD530F-N03-11ST ASD630F-N04-11ST 8.4 9.3 11.4 12 11.6 13.2 15.2 13.2 15.2 18.5 13.2 15.2 18.5 13.2 15.2 18.5 18.5 12.9 17.5 29.4 10-32 UNF 7.8 27.4 0.7 31 30.7 11.7 4.5 10 9.6 8 16.5 13.5 16.5 17 18.5 17 18.5 21 17 18.5 21 17 18.5 21 21 23.3 20.7 23.9 25.6 28.2 25.6

AS-FG/ASD-FG

21 33.1 40.2 18.5 10 13.2 1/4" 18.5 19 15 25.3 32.4 AS221FG-02-04 AS221FG-N01-09 16 25.2 34.4 10.4 4 15.2 5/16" 21 21 32 25.2 34.4 18.2 AS221FG-02-06 AS221FG-N02-03 17 25.2 34.4 12.8 6 10.4 5/32" 16 R(PT) 1/4 18.5 35.4 40.4 17 34.4 29.4 32 18.2 24.9 34.2 AS221FG-02-08 AS221FG-N02-05 34 18.5 27.2 36.4 15.2 8 11.4 3/16" 17 NPT 1/4 17.5 25.2 34.5 20 AS221FG-02-10 AS221FG-N02-07 36 21 33.9 43.2

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

21 33.1 40.2 18.5 13.2 10 1/4" 18.5 19 AS221FG-02-04 AS221FG-N01-09 15 25.3 32.4 16 25.2 34.4 10.4 15.2 4 5/16" 21 21 32 AS221FG-02-06 AS221FG-N02-03 25.2 34.4 18.2 17 25.2 34.4 12.8 10.4 6 5/32" 16 18.5 35.4 40.4 17 34.4 29.4 R 1/4 32 AS221FG-02-08 AS221FG-N02-05 18.2 24.9 34.2 34 18.5 27.2 36.4 15.2 11.4 8 3/16" 17 NPT 1/4 AS221FG-02-10 AS221FG-N02-07 17.5 25.2 34.5 20 36 21 33.9 43.2

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

-07S 17 43.9 1/4" 13.2 25.6 18 55 15 36.7 ASD430FG-N02-09S 34.9 34.6 29.6 17.5 18.5 41.7 39.9 11 18.5 46.5 5/16" NPT 1/4 15.2 28.2 ASD430FG-N02-11S 21 19.7 49.3 62 3/8" 18.5 31 ASD530FG-N02-07S 17 48.7 1/4" 13.2 25.6 20.3 76 41.9 ASD530FG-N02-09S 43.3 43 38 19 18.5 46.9 48.3 15.4 23 51.3 5/16" NPT 1/4 15.2 28.2 19.8 ASD530FG-N02-11S 21 23.1 54.1 84 3/8" 18.5 32.6 ASD530FG-N03-07S 17 48.7