Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

/ Wiring top entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] Digital type Note 3) PNP output / Wiring bottom entry ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring top entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] Copper, Fluorine and Silicone-free + Low Particle Generation (21-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket assembly Note 1) ARP20P

1

AXT100-FC26-1 1.5 m AXT100-FC20-1 AXT100-FC10-1 AXT100-FC26-2 3 m AXT100-FC20-2 AXT100-FC10-2 AXT100-FC26-3 5 m AXT100-FC20-3 AXT100-FC10-3 Specified Layout COM. COM. 25 26 23 24 COM. COM. 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 COM. COM. 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 9 10 7 8 7 8 7 8 7 8 5 6 5 6 5 6 5 6 3 4 3 4 3 4 3 4 1 2 1 2 1 2 1 2 COM. COM.

Table of Contents

19 21 19 21 21 21.8 21 21.8 21 21.8 18.8 21 18.8 21 21 23 21 23 21 23 23 23.8 23 23.8 23 23.8 22 23 30 31 39 41 47 49 61 63 69 74 73 78 95 100 Dimension with cover Reference dimension of NPT thread after installation. 1/4" 5/16" 1/4" 5/16" 5/16" 3/16" 5/16" 3/16" 5/16" 3/16" 3/16" 1/2" 3/16" 1/2" 3/16" 1/2" 12.7 NPT 1/8 23.4 27.4 39.8 45.8 17.6 14.3 NPT 1/4 25.4 31.4 39.8 45.8 17.6 12.7

Air Cylinder Series MB

21 21 30 30 13 13 14 14 20 20 16 16 16 16 16 16 13 14 15.5 16.5 19 19 4 4 5 5 5 5 21 27 27.5 28.5 37 37 -W Stroke range (mm) Bore size (mm) MO N NB P RF S MM V W WL ZZ S ZZ 32 40 50 63 80 100 to 500 to 500 to 600 to 600 to 800 to 800 15 19 19 19 23 23 27 27 31.5 31.5 38 38 35 40 43.5 43.5 56 56 1/8 1/4 1/4 3/8 3/8 1/2 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 11 11 11

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Note 3) Operation manual is included.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Note 3) Operation manual is included.

MB

3, !4 and !

AS

54.7 17 20.9 AS3001F-07-3 167 88 18.5 10 5/16" 21 15.2 32.1 3.5 60.9 55.5 18 16 AS4001F-10-3 77.7 64.4 8.2 82.1 11.3 35 69.3 61 21 18.5 AS3001F-09-3 27 21 24.5 3.5 171 95 12 AS4001F-12-3 36 70.3 62 22 3/8" 17.2 33.3 62.1 56.7 21 70.8 9.5 20.9 AS3001F-11-3 Note 1) Reference dimensions 175 3/8" 27 21 17.9 34.9 3.5 69.2 60.9 21 76.9 10.3 AS4001F-11-3 24.5 188 AS4001F-13-3 21.7 1/2" 83.1 36.3

CL

(#1+#3+#12) CLM2L25SCLM225, #3 (#1+#3+#12) CLM2L32SCLM232, #3 (#1+#3+#12) CLM2L40SCLM240, #3 (#1+#3+#12) CLM2G20SCLM220, #5 (#1+#5+#12) CLM2G25SCLM225, #5 (#1+#5+#12) CLM2G32SCLM232, #5 (#1+#5+#12) CLM2G40SCLM240, #5 (#1+#5+#12) 3.1-21 Series CLM2 Front Flange (F) CAD CLM2F Bore size Stroke Boss cut (mm) BP Bore Stroke range BN 80 90 90 BQ BZ E FZ 75 75 75 82 D 8 10 12 14 B 34 40 40 52 FD

Combination Cylinder

8 3/8 1/2 1/2 1/2 1/2 3/4 11 11 14 17 17 30 24 26 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 M30 X 1.5 M30 X 1.5 M36 X 1.5 27 30 31 37 40 35 35 39 84 90 98 116 126 98 98 106 60 70 86 102 116 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 M8 M8 M10 X 1.25 M12 M12 M14 X 1.5 M14 X 1.5 M16 X 1.5 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 22

Tamper Proof and Flat Head Screw

15.2 1/4" 13.2 27.8 39.3 17 29.5 8 18.5 41 53.7 9.5 R 3/8 19 1.5 47.7 23 20.9 AS321F-N03-09ST AS321F-03-10ST 18.5 NPT3/8 19 23 9.5 20.9 53.7 1.5 47.7 31.8 5/16" 15.2 29.5 41 18.5 10 43.3 21 AS321F-N03-11ST AS321F-03-12ST 20.9 31.8 43.3 32.8 21 17.9 3/8" 12 22 44.3 AS321F-N04-11ST AS421F-04-10ST 18.5 33.6 3/8" 17.9 33.6 47.9 21 21 10 47.9 28.6 1/2" NPT1/2 23.8 21.7 28.6 12 35.2 49.5 25.4

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

39.3 27.8 17 AS321F-03-08SD AS321F-N03-07SD 8 15.2 41 29.5 18.5 1/4" 13.2 27.8 39.3 17 53.7 23 9.8 47.4 R 3/8 1.2 19 20.9 AS321F-03-10SD AS321F-N03-09SD 10 NPT 3/8 19 23 9.8 20.9 53.7 1.2 47.4 18.5 43.3 31.8 21 5/16" 15.2 29.5 41 18.5 AS321F-03-12SD AS321F-N03-11SD 12 20.9 44.3 32.8 22 17.9 31.8 43.3 21 3/8" AS421F-04-10SD AS421F-N04-11SD 10 18.5 47.9 21 33.6 3/8" 17.9 33.6 47.9 21 1/2"

10

-Wl Bore size [mm] MM MO N NB P RF S V W WL ZZ S ZZ 32 M10 x 1.25 15 27 35 1/8 11 92 4 6.5 24 143 40 M14 x 1.5 19 27 40 1/4 11 97 4 9 24 152 50 M18 x 1.5 19 31.5 43.5 1/4 11 106 5 10.5 24 168 63 M18 x 1.5 19 31.5 43.5 3/8 11 106 9 12 24 168 80 M22 x 1.5 23 38 56 3/8 21 132 11.5 14 40 208 100 M26 x 1.5 23 38 56 1/2 21 132 17 15 40 208 100 151 110 165 118 180 118 180 150 226 150 226 420 Air

CATALOG

28 23 21 41.5 1/4 3/8 KQH07-U03 17.46 18.5 12.5 17 4.6 10 14 KQH10-U02 17 28 22 21 41.5 5/16 1/8 KQH09-U01 14.29 25.5 21.5 18.5 6 10 38 KQH10-U03 17 24 18 21 41.5 5/16 1/4 KQH09-U02 14.29 21.5 15.5 18.5 6 10 12 KQH10-U04 22 22 14 21 41.5 5/16 3/8 KQH09-U03 17.46 21 15 18.5 6 12 14 KQH12-U02 19 30.5 24.5 22 58.3 3/8 1/4 KQH11-U02 17.46 28 22 21 7 12 38 KQH12-U03 19 25.5 19.5 22 58.3 3/8 3

Table of Contents

Nickel plated Spring washer Steel wire @3 Felt Felt @4 Holder Stainless steel @5 8-21-19 19 Series MGG Construction 63 to 100/MGGB #3 !5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M1 Weight (g) 4 6 6 8 6 8 10 8 10 8 10 10 12 Applicable tubing O.D. d T H D1 D2 L1 L2 L3 Model AS121-M5-F04 AS121-M5-F06 AS221-01-F06S AS221-01-F08S AS221-02-F06S AS221-02-F08S AS221-02-F10S AS321-02-F08S AS321-02-F10S AS321-03-F08S AS321-03-F10S AS421-04-F10S AS421-04-F12S 16 17 17 18.5 17 18.5 21 18.5 21 18.5 21 21 22 13 13 34 31 54 50 52 86 81 93 88 154 146 21 21.5 25.5 26 M5 x 0.8 28.3

MU

For details, refer to page 7-9-36. 7-8-21

MU

For details, refer to page 7-9-36. 7-8-21

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

3 !4 !5 !6 !7 !8 !