Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

ARP30-02BG 0.005 to 0.4 MPa Set pressure range Note 1) For 0.2 MPa setting Ex.) ARP30-02BG-1 0.005 to 0.2 MPa For 0.6 MPa setting Ex.) ARP30-02BG-3 0.008 to 0.6 MPa Sensitivity Within 0.2% F.S. Within 1% F.S. (or 3 kPa) Repeatability Note 2) For 0.4 MPa setting Ex.) ARP30-02BG 1 L/min (ANR) or less (at P2 = 0.4 MPa) Air consumption For 0.2 MPa setting Ex.)

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

ARP30-02BG 0.005 to 0.4 MPa Set pressure range Note 1) For 0.2 MPa setting Ex.) ARP30-02BG-1 0.005 to 0.2 MPa For 0.6 MPa setting Ex.) ARP30-02BG-3 0.008 to 0.6 MPa Sensitivity Within 0.2% F.S. Within 1% F.S. (or 3 kPa) Repeatability Note 2) For 0.4 MPa setting Ex.) ARP30-02BG 1 L/min (ANR) or less (at P2 = 0.4 MPa) Air consumption For 0.2 MPa setting Ex.)

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Table of Contents

20 16 (15) 19 (16) 22 (18) 3.6 4.0 5.2 3.6 4.0 5.2 4.0 4.7 5.3 3.9 4.5 5.1 0.22 0.15 0.13 0.22 0.15 0.13 0.28 0.27 0.19 0.28 0.24 0.15 15 17 21 15 17 21 16 18 22 16 18 21 2.5 Single VP4150 2 position 3 position 3.3 3.0 VP4250 Double 3.8 3.6 Closed center VP4350 4.4 3.6 VP4450 Exhaust center 4.4 ( ): Denotes the normal position.

2

20.6 50.2 50.2 9 24 3/8 KQ2L16-03P 21 23.8 21 27.1 32.7 37.0 20.6 71 58.9 11 33.8 1/2 KQ2L16-04P 27 23.8 21 27.1 34.7 36.2 20.6 100 58.9 13 59.9 New New Note) D1 is maximum diameter.

Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 02 (1/4), Accessory: BG (B+G), Specifications: 1R (1 + R)

Size: 20, Backflow Function: Backflow Function, Thread: Rc, Port Size: 1/4, Accessory: B+G, Specifications: 1 + R, Pressure Unit: -

Shock Absorbers and Rate Controls

.63 Pnol z5tt 5.t2 (lf)IYs.lzU t .38 Ll3 1.20 3.41 l{/a N/A .21 1.25 PR0220tt 8. t4 8.34 {lt} I /4-12 UNt .38 Ll3 1.20 5.03 N/A N/A .21 Ll2 .63 PR0225tt 8 . l 4 8.34 (lf)IYs,l?U f .38 Ll3 r.20 5.03 N/A N/A .21 1.25 .DJ Notes: 1.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Brown Brown White White Pink Pink Gray Gray Sky blue Sky blue Light green Light green 13 14 15 16 17 18 19 20 21 22 24 Yellow Pink Blue Purple Gray Orange Red Brown Pink 14 15 16 17 18 19 20 21 22 Gray Black White 23 24 25 23 Terminal no.

VFS

Brown Brown White White Pink Pink Gray Gray Unused Unused Light green Light green 13 14 15 16 17 18 19 20 21 22 24 Yellow Pink Blue Purple Gray Orange Red Brown Pink 14 15 16 17 18 19 20 21 22 Gray Black White 23 24 25 23 Terminal no.

AC Servo Motor Driver (SSCNET /H Type)

Turn to "0" in the position control and speed control. 1r/min 21 Speed limit value (by 0.1 r/min) The speed limit value at the torque control or stopper control is displayed.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Lead wire color Dot marking 18 19 14 15 Pink 16 17 20 21 22 Pink 23 24 25 13 Terminal no.

VFR

Lead wire color Dot marking Orange Orange Yes Black Black Yes Green Green Yes Yellow Yellow Yes Brown Black Brown Orange Yellow Purple White White Red Yellow Red Black White Black 14 15 Pink 16 Blue 17 20 Red 21 22 Pink Red 23 Gray Red 24 25 18 Gray 19 13 14 15 17 Pink 19 Gray 21 23 16 18 Pink Yes 20 Gray Yes 22 24 Terminal no. Lead wire color Dot marking Terminal no.

AC Servo Motor Driver (SSCNET Type)

. 1r/min 6 Droop pulse (by 100 pulse) The droop pulse on the deviation counter is displayed in units of 100pulse.

AC Servo Motor Driver (Pulse input type/Positioning type)

motor speed and displayed. 1r/min 6 Droop pulse (by 100 pulse) The droop pulse on the deviation counter is displayed in units of 100 pulse.

AC Servo Motor Driver (Pulse input type)

motor speed and displayed. 1r/min 6 Droop pulse (by 100 pulse) The droop pulse on the deviation counter is displayed in units of 100pulse.

AC Servo Motor Driver (CC-Link Type)

. 1r/min 6 Droop pulse (by 100 pulse) The droop pulse on the deviation counter is displayed in units of 100pulse.

AC Servo Motor Driver (CC-Link Type)

. 1r/min 6 Droop pulse (by 100 pulse) The droop pulse on the deviation counter is displayed in units of 100pulse.

Dual Rod Cylinder Series CXSJ/CXS

CXSJ10-10 21-/2211-/12CXSJ10-20 21-/2211-/12CXSJ10-30 21-/2211-/12CXSJ10-40 21-/2211-/12CXSJ10-50 21-/2211-/1279