Rotary Actuator

Without air cushion With air cushion Air-hydro 50 P694020-20 P694020-21 P694020-23 63 P694030-20 P694030-21 P694030-23 80 P694040-20 P694040-21 P694040-23 100 P694050-20 P694050-21 P694050-23 Corresponding parts u, o, !0, !3 are included as a set. u, o, !0, !3, @3 are included as a set. u, o, !0, !3 are included as a set.

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Size Foot bracket Description Mounting screws included in foot bracket 50 CRA1L50 -Y-1Z M8 1.2535 Foot bracket 2pcs. 63 CRA1L63 -Y-1Z M10 1.540 Mounting thread4pcs. 80 CRA1L80 -Y-1Z M121.7550 Collar 4pcs. M121.7550 100 CRA1L100-Y-1Z After the foot bracket removed the mounting screws of the basic style, mount to the cover with the mounting screws included in foot bracket.

LEC-OM02904

PB06 GD2 PB07 PG1 PB08 PG2 PB09 VG2 PB10 VIC 1 2000r/min5s 150r/min 100 10% 2 (2) 2 21 (No.PB06) 2 No.

REGULATOR

7 AR40K-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50K-B 70 66 65.8 11 13 90 3.2 AR60K-B 70 66 65.8 11 13 90 3.2 Note 1) B dimension is a size in the state to unlock the handle.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

FILTER REGULATOR

AW20-B 11 AW20-B 0.80.1Nm AW30-B 17 AW30-B 2.350.3Nm AW40-B 21 AW40-B 3.50.3Nm Disassembly Remove the bowl assembly, housing, and element. Hexagon Remove a housing from a body by turning 4 mounting screws to the left with a hexagon wrench key. wrench key Nominal5 Remove the valve guide.

FILTER REGULATOR

Hexagon wrench Tightening torque key Nominal5 4.51.0N 21 ) Bracket assembly, panel mount Applicable model Process Procedure Tools Check items Assembly Mount the parts to the bracket (panel) Mate the bracket(panel) concave and the bonnet convex to mount the bracket. Settle the bracket (panel) with set nut.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

/ Wiring top entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] Digital type Note 3) PNP output / Wiring bottom entry ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring top entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] Copper, Fluorine and Silicone-free + Low Particle Generation (21-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket assembly Note 1) ARP20P

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

/ Wiring top entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] Digital type Note 3) PNP output / Wiring bottom entry ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring top entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] Copper, Fluorine and Silicone-free + Low Particle Generation (21-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket assembly Note 1) ARP20P

Size: 20, Backflow Function: None, Thread: N (NPT), Port Size: 02 (1/4), Accessory: G (Round Pressure Gauge w/Limit Indicator), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): No, Supply Side Connection Type: [NPT] NPT, Supply Side, Connection Diameter: 1/4, Flow Direction: [Right] From Left to Right, Control Side Connection Type

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 20, Backflow Function: None, Thread: N (NPT), Port Size: 02 (1/4), Accessory: G [Round Pressure Gauge ("20-" Type Includes Limit Indicator)], Specifications: 1R (1+R), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: Clean-room, Copper-free, Fluorine-free, Silicon-free, Size: 20, Backflow Function: None, Thread: NPT, Port Size: 1/4, Accessory: G [Round Pressure Gauge ("20-" Type Includes Limit Indicator)], Specifications: 1+R, Pressure Unit: Name plate & Pressure Gauge in Imperial Units: psi

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

For how to order the digital pressure switch, refer to page 709. 704 Direct Operated Precision Regulator/Modular Type Series ARP20/30/40 Conditions: Inlet pressure 0.5 MPa Outlet pressure 0.2 MPa Flow rate 20 L/min (ANR) Condition: Inlet pressure 0.7 MPa Flow Characteristics (Representative values) Pressure Characteristics (Representative values) ARP20(K) ARP20(K) Rc 1/4 0.50 0.25 0.45 ARJ

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

For how to order the digital pressure switch, refer to page 767. 762 Direct Operated Precision Regulator/Modular Type ARP20/30/40 Series Conditions: Inlet pressure 0.5 MPa Outlet pressure 0.2 MPa Flow rate 20 L/min (ANR) Condition: Inlet pressure 0.7 MPa Flow Rate Characteristics (Representative values) Pressure Characteristics (Representative values) ARP20(K) ARP20(K) Rc 1/4 0.50 0.25 0.45

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 20, Backflow Function: None, Thread: N (NPT), Port Size: 02 (1/4), Accessory: BG (B+G), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 20, Backflow Function: None, Thread: N (NPT), Port Size: 02 (1/4), Accessory: None, Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 20, Backflow Function: None, Thread: N (NPT), Port Size: 01 (1/8), Accessory: BG (B+G), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: Clean-room, Copper-free, Fluorine-free, Silicon-free, Size: 20, Backflow Function: None, Thread: NPT, Port Size: 1/4, Accessory: B+G, Specifications: 0.005 to 0.2 MPa Setting, Pressure Unit: Name plate & Pressure Gauge in Imperial Units: psi