MXS

-125 MXS25-150 MXS25-100 0.035 MXS25-150 MXS25-75 MXS25-50 MXS25-40 MXS25-30 MXS25-20 MXS25-10 MGP 0.06 MXS25-125 MXS25-150 MXS25-125 MXS25-100 MXS25-100 0.04 Table deflection (mm) 0.030 Table deflection (mm) Table deflection (mm) 0.05 MXS2575 MXS2575 MGQ MXS2540 MXS2550 0.025 0.04 0.03 MXS2550 MXS2540 0.020 0.03 MXS2530 MGG 0.02 0.015 MXS2530 MXS2520 MXS2510 MXS2520 MXS2510 0.02 0.010 MGC

MXS Series Air Slide Table

-125 MXS25-150 MXS25-100 0.035 MXS25-150 MXS25-75 MXS25-50 MXS25-40 MXS25-30 MXS25-20 MXS25-10 0.06 MXS25-125 MXS25-100 MXS25-125 MXS25-150 MXS25-100 0.04 0.030 0.05 MXS2575 MXS2575 Table deflection mm Table deflection mm Table deflection mm 0.025 MXS2540 MXS2550 0.04 0.03 MXS2550 MXS2540 0.020 0.03 MXS2530 0.02 0.015 MXS2530 MXS2520 MXS2510 MXS2520 MXS2510 0.02 0.010 0.01 0.01 0.005 0 100

SMC

-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30 13-/22-MXS25-40 13-/22-MXS25-50 13-/22-MXS25-75 13-/22-MXS25-100 13-/22-MXS25-125 13-/22-MXS25-150 149 MXS Air slide table 1322Dimensions / MXS25 1322Axial piping (25) MXS25-P 132280.7 Maximum 11.5 35.5 Operating port 2-Rc, G, NPT1/8 40 18 20 Other dimensions are the same as those of basic style. 150 MXS Air slide table 1322Dimensions / MXS25L

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30 13-/22-MXS25-40 13-/22-MXS25-50 13-/22-MXS25-75 13-/22-MXS25-100 13-/22-MXS25-125 13-/22-MXS25-150 795 MXS 1322Air Slide Table Dimensions: MXS25 1322Axial piping (25) MXS25-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

Slide Tables MX Series

Tightening torque Nm{kgfcm} 3.0{29} 5.0{49} 12.5{122} 25.0{245} 43.9{430} 70.4{690} Model MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 Tightening torque Nm{kgfcm} Model MXS 8 MXS12 1.67{17.1} MXS16 3.14{32.1} 10.8{110.2} MXS20 MXS25 1 N M = 0.7375 ft lb 13 MXS Series Air Slide Table Precautions Precautions on Functional Option With end lock With buffer mechanism Caution Caution 1.2 position, 4

A

12 47 M6x1 Depth 12 6 14 M14x1.5 44 18 78 12 10 M10x1.25 50 40 130 50 ~300 32 35 32 20 30 2 14 13 58 M8x1.25 Depth 16 7 18 M18x1.5 55 14 90 13 12 M12x1.25 50 150 58 63 150 58 63 ~300 32 35 38 20 32 2 14 13 72 M10x1.5 Depth 16 7 18 M18x1.5 69 14 90 13 12 M14x1.5 80 182 71 80 ~300 37 40 50 25 40 3 20 20 89 M10x1.5 Depth 22 11 22 M22x1.5 80 38 108 100 182 71 100 ~300 37 40 60 30 50 3 20 20

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

2

) v Note 13) v Note 13) v Note 13) v Note 13) v Note 13) Note 1) Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

Table of Contents

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

Table of Contents

Refer to page 3-13-4.)

Air Slide Table

range 16 13 Adjustment range 18 13 Adjustment range 9 Max. 30 Max. 31 Max. 26 57 58.5 52.8 * Dimensions other than those listed above are the same as those for the standard type. 43 Air Slide Table/Double-ported Type MXQA Series Dimensions: MXQ 20A [Functional Option] MXQ 20A-mm3 Axial piping (20) Double-ported type MXQA Pilot port M5 x 0.8 (OUT) 61 Pilot port M5 x 0.8 (IN) 5.5 Low thrust

1

Calculation: Example) CJ2L10-45Z OBasic weight 22 (10) OAdditional weight 4/15 stroke OCylinder stroke 45 stroke OMounting bracket weight 8 (Axial foot) 22 + 4/15 x 45 + 8 = 42 g Single foot 8 8 25 8 25 Double foot 16 50 16 50 Rod flange 5 5 13 5 13 Head flange 5 13 5 13 Mounting bracket weight CJ2 Single knuckle joint 17 23 17 23 Double knuckle joint (including knuckle pin) 25 21 25

SY

SS5Y51, #3 + #13 M type plug connector .

5 Port Solenoid Valve Series SY3000/5000/7000/9000

250 262.5 275 287.5 300 300 63.3 58.1 48.4 L3 91.5 81 102 112.5 123 133.5 144 154.5 70.5 181.5 192 202.5 213 223.5 234 42.6 34.5 7.5 L4 14 13 12 15 16 17 12 13 14 13 14 15 16 17 11.5 Two SUP/EXH blocks are provided for models with 11 stations or more.

VFR

Refer to page 3-13-4.)

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-20A P294030-20A P294030-20A @8 CRA180 Nickel plated Steel wire Needle valve P294040-23 P294040-20 P294040-20 P294040-20 @9 CRA1100 Nickel plated Steel wire Lock nut P294050-23A P294050-20A P294050-20A P294050-20A #0 Corresponding parts o, !

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-20A P294030-20A P294030-20A @8 CRA180 Nickel plated Steel wire Needle valve P294040-23 P294040-20 P294040-20 P294040-20 @9 CRA1100 Nickel plated Steel wire Lock nut P294050-23A P294050-20A P294050-20A P294050-20A #0 Corresponding parts o, !

Proposals for Energy Saving

Specifications are the same as those on page 3.4-13.