Bore Size: 20mm, Stroke: 20mm, Adjuster: Adjusters Both Ends, Function: Standard, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Bore Size: 20mm, Stroke: 20mm, Adjuster: Adjusters Both Ends, Function: Standard, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m Lead Wire, Number: -

Bore Size: 20mm, Stroke: 20mm, Adjuster: AS (Adjuster on Extension End), Function: Standard, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m Lead Wire)

Bore Size: 20mm, Stroke: 20mm, Adjuster: Adjuster on Extension End, Function: Standard, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m Lead Wire, Number: -

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, 20MM MXS CLEAN-ROOM, ACTUATOR, MXS/MXJ GUIDED CYLINDER, H5, 20MM MXS CLEAN-ROOM, 3.56413 lb, ModelABEAuto switch operation range StrokeStroke 10203040507510012515010203040507510012515013-MXS2018.932.622.612.612.617.631.659.688.6115.630.6(28.1)20.6(18.1)10.6(8.1)10.6(8.1)15.6(13.1)29.6(

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, 20MM MXS CLEAN-ROOM, ACTUATOR, MXS/MXJ GUIDED CYLINDER, H5, 20MM MXS CLEAN-ROOM, 3.34551 lb

Applications that call for precise movement ranging from 10-150mm * typically require a cylinder and a precision guide. The MXS accomplishes this by integrating a cross roller bearing with a guide and two small air cylinders for compact force generation. The MXS is available in six sizes each with set stroke lengths and is standard with auto switch capability. Stroke adjustments are available

smcmaintenancepartslist

(FKM can be selected.) 12 12 Bumper A Bumper A Resin Resin 13 !4 13 !4 Bumper B Bumper B Resin Resin (Only 63 is common to the bumper A.) Tube gasket Tube gasket NBR NBR (FKM can be selected.) (FKM can be selected.) 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit. 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit.

CATALOG

7.7 12 3 ZP10D D10 10 12 4 13 10.7 15 6 ZP13U U13 13 15 4 13 7.7 12 3 ZP16D D16 16 18 4 13 11.7 16 7 H Y Part No Type A B C D E F G ZP16U U16 16 18 4 13 8.2 12.5 3.5 ZP25D D25 25 28 4 15 15.5 20 10 ZP06B B06 6 7 2.5 7 13 3.3 9.1 4 ZP20U U20 20 23 4 15 9.5 14 4 ZP40D D40 40 43 7 18 24.2 29 17 ZP08B B08 8 9 2.5 7 13 4.7 10.1 4 ZP25U U25 25 28 4 15 9.5 14 4 ZP10B B10 10 12 4 13 11.7 16 5.5

MXS

deep 13 M 0.5 45.5 50 Z ZZ (NN-1) X H G H 29 11.5 29 11.5 A B 9.5 5.1 11 11 5H9 5 deep +0.030 0 30 1.5 NN-M6 X 1 thread 12 deep A B 6 Cross section AA Cross section BB 5H9 5 deep +0.030 0 HA GA With auto switch Basic style MXS20-10 MXS20-20 MXS20-30 MXS20-40 MXS20-50 MXS20-75 MXS20-100 VWith stroke adjuster MXS20-10AS MXS20-20AS MXS20-30AS MXS20-40AS MXS20-50AS MXS20-75AS MXS20-100AS SMXS20A

MXS Series Air Slide Table

-125 MXS20-150 MXS20-100 MXS20-150 MXS20-75 MXS20-50 MXS20-40 MXS20-30 MXS20-20 MXS20-10 0.04 0.08 MXS20-125 MXS20-150 MXS20-100 MXS2075 MXS2050 MXS2040 MXS20-125 MXS20-100 0.030 Table deflection mm Table deflection mm Table deflection mm 0.025 0.03 0.06 MXS2075 0.020 MXS2030 0.02 0.04 MXS2020 0.015 MXS2050 MXS2040 MXS2010 0.010 MXS2030 MXS2020 MXS2010 0.01 0.02 0.005 100 200 300 0 0 0 100

SMC

-/22-MXS20-10 13-/22-MXS20-20 13-/22-MXS20-30 13-/22-MXS20-40 13-/22-MXS20-50 13-/22-MXS20-75 13-/22-MXS20-100 13-/22-MXS20-125 13-/22-MXS20-150 146 MXS Air slide table 1322Dimensions / MXS 20 1322Axial piping (20) MXS20-P 1322Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-/22-MXS20-10 13-/22-MXS20-20 13-/22-MXS20-30 13-/22-MXS20-40 13-/22-MXS20-50 13-/22-MXS20-75 13-/22-MXS20-100 13-/22-MXS20-125 13-/22-MXS20-150 792 MXS 1322Air Slide Table Dimensions: MXS 20 1322Axial piping (20) MXS20-P 132265.7 Maximum 11.5 29.5 Operating port 2 x Rc, G, NPT1/8 32 15 20 Other dimensions are the same as those of basic type. 793 MXS 1322Air Slide Table Dimensions: MXS20L

Slide Tables MX Series

Tightening torque Nm{kgfcm} 3.0{29} 5.0{49} 12.5{122} 25.0{245} 43.9{430} 70.4{690} Model MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 Tightening torque Nm{kgfcm} Model MXS 8 MXS12 1.67{17.1} MXS16 3.14{32.1} 10.8{110.2} MXS20 MXS25 1 N M = 0.7375 ft lb 13 MXS Series Air Slide Table Precautions Precautions on Functional Option With end lock With buffer mechanism Caution Caution 1.2 position, 4

A

12 47 M6x1 Depth 12 6 14 M14x1.5 44 18 78 12 10 M10x1.25 50 40 130 50 ~300 32 35 32 20 30 2 14 13 58 M8x1.25 Depth 16 7 18 M18x1.5 55 14 90 13 12 M12x1.25 50 150 58 63 150 58 63 ~300 32 35 38 20 32 2 14 13 72 M10x1.5 Depth 16 7 18 M18x1.5 69 14 90 13 12 M14x1.5 80 182 71 80 ~300 37 40 50 25 40 3 20 20 89 M10x1.5 Depth 22 11 22 M22x1.5 80 38 108 100 182 71 100 ~300 37 40 60 30 50 3 20 20

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

MXQ

15 14 Average speed Va (mm/s) Collision speed V (mm/s) 13 13 13 13 18 31 31 31 31 36 23 41 42 41 42 41 19 19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

2

) v Note 13) v Note 13) v Note 13) v Note 13) v Note 13) Note 1) Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).