The MXQ precision slide is ideal for applications requiring closely held parallelism and perpendicular specifications. The table and bearing guide are integrated into one precisely machined part made of hardened stainless steel. This minimizes tolerance stack-up associated with multiple part assemblies, and affords height tolerances of +/-0.05mm. The bearing is a recirculating linear guide

MXQ

15 14 Average speed Va (mm/s) Collision speed V (mm/s) 13 13 13 13 18 31 31 31 31 36 23 41 42 41 42 41 19 19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

13-/22-MXQ25L10 13-/22-MXQ25L20 13-/22-MXQ25L30 13-/22-MXQ25L40 13-/22-MXQ25L50 13-/22-MXQ25L75 13-/22-MXQ25L-100 13-/22-MXQ25L-125 13-/22-MXQ25L-150 Note) Note) Note) Refer to the bottom view of MXQ25L-75. 1322823 MXQ 1322Air Slide Table Dimensions: MXQ25L / Symmetric Type 1322Axial piping (25): MXQ25L-P 132220 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment

Air Slide Table

Metal stopper with bumper Rubber stopper Shock absorber L1 L1 L1 10 5.5 33.5 8 9 6 20 5.5 39.5 11 12 9 30 14 39.5 11 13 10 40 17 39.5 11 13 10 50 22 39.5 11 13 10 75 41 39.5 11 13 10 100 47 39.5 11 13 10 125 72 39.5 11 13 10 Stroke K MZ Low thrust with high rigidity type MXQB Single side-ported type MXQC Height interchangeable type MXQ Auto Switch Mounting Made to Order Model Selection Common

1

st 76 to 100 st 101 to 125 st 126 to 150 st 6 12 21 25 39 5.5 D-M9l D-M9lW/M9lWV D-M9lA/M9lAV 10 13 20.5 32.5 44.5 6 CJ2 16 12.5 21 33 45 51 75 93 105 6.5 6 12 12 21 25 39 5.5 CM2 D-M9lV 10 13 13 20.5 32.5 44.5 6 16 12.5 12.5 21 33 45 51 75 93 105 6.5 CG1 6 8 17 21 35 1.5 Band mounting D-A9l 10 9 16.5 28.5 40.5 2 MB 16 8.5 17 29 41 47 71 89 101 2.5 6 8 8 17 21 35 1.5 CA2 D-A9lV 10

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

2

) v Note 13) v Note 13) v Note 13) v Note 13) v Note 13) Note 1) Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

CATALOG

274 15 23depth17 M18x2.5depth32 85 153 190 245 Bore Size Stroke range (mm) M N O P Q R S T U V W X Y Z (mm) 20 75, 100, 125, 150, 200 25 45 M6X1depth9 1/8 21 14 26 12 86 48 36 30 80 157 25 35 54 M6X1depth13 1/8 21 14 31 13 100 57 42 37 80 175 32 35 60 M6X2depth13 1/8 21 13 38 16 114 65 48 37 82 201 75, 100, 40 50 75 M8X1.25depth16 1/8 25 14 47 20 140 84 58 44 92 238 125, 150, 200, 50 56

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Table of Contents

26 8 13 4 60 75 10 41 20 RS Q G FX 25 Up to 700 22 19.5 40 17 32 10 13 4 60 75 10 45 26 32 Up to 1000 22 19.5 40 17 32 12 13 4 60 75 11 45 26 20, 25, 32 RS H A 40 Up to 1000 24 21 52 22 41 14 16 5 66 36 82 12.5 50 32 NA NN P S Z ZZ H1 H2 I K MM N RZQ Bore (mm) Stroke range 20 30 M20 x 1.5 Up to 700 1/8 146 37 200 M8 x 1.25 5 8 33.5 5 20 25 MI W S 34.5 M26 x 1.5 Up to 700 1/8 146 41 204

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

162 23 12.5 80 119.5 53.5 18 101.5 10 27 38 28 56 10 100 142 63 22 120 13 31 45 32 64 12 Double clevis bracket material: Cast iron Rod Side Flange Style Bore size (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Without auto switch With auto switch A 54 64 63.5 73.5 75 85 Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Bore size (mm) L1 N RR

ZP

(Male thread) Mounting Male thread Female thread Female thread Vacuum entry port Female thread Common Female thread Female thread Female thread P. 13-11-91 to 92 P. 13-11-86 to 88 P. 13-11-86 to 88 P. 13-11-89 to 90 P. 13-11-93 to 94 Buffer stroke Pad dia. 40 50 63 80 100 125 Buffer stroke (mm) 25 50 75 100 Pad Material and Characteristics : Little or no influence : Can be used depending

A

274 15 23depth17 M18x2.5depth32 85 153 190 245 Bore Size Stroke range (mm) M N O P Q R S T U V W X Y Z (mm) 20 75, 100, 125, 150, 200 25 45 M6X1depth9 1/8 21 14 26 12 86 48 36 30 80 157 25 35 54 M6X1depth13 1/8 21 14 31 13 100 57 42 37 80 175 32 35 60 M6X2depth13 1/8 21 13 38 16 114 65 48 37 82 201 75, 100, 40 50 75 M8X1.25depth16 1/8 25 14 47 20 140 84 58 44 92 238 125, 150, 200, 50 56

Smooth Cylinder/Low Speed Cylinder

FL A B2 C2 D H2 I FD AL E F FT B FX B1 FY FZ G H H1 Bore size (mm) 20 13 26 30 5 8 10.5 18 8 28 7 15.5 13 4 34 60 75 8 0 0.033 41 20 25 17 32 37 6 8 10.5 22 10 33.5 7 19.5 13 4 40 60 75 8 0 0.033 45 26 32 17 32 37 6 8 10.5 22 12 37.5 7 19.5 13 4 40 60 75 8 0 0.033 45 26 40 22 41 47.3 8 10 13.5 24 14 46.5 7 21 16 5 52 66 36 82 0 0.039 11 50 32 (mm) P S KA N Z NA ZZ NN K MM Bore size (mm

Table of Contents

Data View A-A Mounting dimensions Bore size (mm) Stroke range (mm) N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA A 20 25 32 40 50 75, 100, 125, 150, 200 25 38 80 60 44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 32 46 95 70 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 75, 100 125, 150 200, 250 300 32 50 105 80 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 38 60 125 95

CQ2

53.5 74.5 20 4.5 59 7 13 23.5 118 53.5 80 80 43.5 12 63 98 86 22 6 29 71 7 13 137 53.5 100 100 Double clevis (mm) Bore (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Y LY LZ X W/o auto switch With auto switch A 88 98 109.5 119.5 132 142 Bore (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 CD CL CT CU CW CX CZ L 9 91.5 113 16.2 63 B 36 46

Hydraulic

M10 x 1.5 20 11 52 172 10 53 88.5 12 22 M16 x 1.5 30 26 63 8 21 55 28 80 80 60 22.4 30 17 17 13 M10 x 1.5 22 11 55 190 10 60 95 12 25 M18 x 1.5 30 26 80 8 26 65 32 100 100 75 28 32 22 20 15 M12 x 1.75 26 13 65 207 12 75 115 14 29 M22 x 1.5 35 30 100 6.5 34 80 38 118 118 90 35.5 35 27 19 16 M12 x 1.75 27 13 80 231 14 90 139 14 34 M27 x 2 35 32 125 6.5 34 80 38 140 140 112 35.5 35 27 19 16

5

(mm) ZZ + Stroke H Bore size A AL B B1 B2 C2 D E F FL FD FT FX FY FZ G H H1 H2 I K KA MM NA NN P S Z ZZ 20 18 15.5 34 13 26 30 8 20 0 0.033 13 10.5 7 4 60 75 8 41 5 8 28 5 6 M8 x 1.25 24 M20 x 1.5 1/8 62 37 116 D25 22 19.5 40 17 32 37 10 26 0 0.033 13 10.5 7 4 60 75 8 45 6 8 33.5 5.5 8 M10 x 1.25 30 M26 x 1.5 1/8 62 41 120 32 22 19.5 40 17 32 37 12 26 0 0.033 13 10.5 7 4 60 75 8 45 6 8

Made to Order

15st 5st 10st 15st 5st 10st 15st 5st 10st 15st 6 8 9 42 42 47 52 57 47 52 57 52 62 67 52 62 67 10 8 9 45 45 50 55 65 50 55 65 55 65 80 55 65 80 16 8 9 39 49 44 49 59 54 59 69 59 69 84 69 79 94 20 8 9 45 55 50 55 65 60 65 75 55 65 80 65 75 90 25 10 11 51 61 56 61 71 66 71 81 61 71 86 71 81 96 32 12 13 55 65 60 65 75 70 75 85 65 75 90 75 85 100 Dimensions except mentioned above are the same

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

162 23 12.5 80 119.5 53.5 18 101.5 10 27 38 28 56 10 100 142 63 22 120 13 31 45 32 64 12 Double clevis bracket material: Cast iron Rod Side Flange Style Bore size (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Without auto switch With auto switch A 54 64 63.5 73.5 75 85 Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Bore size (mm) L1 N RR