Base Mounted Metal Seal/Rubber Seal Series VQ

SOL.A () () (+) (+) 15 13 6 stations SOL.B SOL.A () () (+) (+) 11 9 7 stations SOL.B Connector terminal no.

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Note 2) 2-4-16 17 Body Ported Series VQ1000 Plug-in Unit: Flip Type 23.5 L2 6.2 41 L1 35 P = 11 13.2 1.5 Indicator light 19.5 (11) 1.5 Mounting hole size Mounting hole size Manual override 2-M4 mounting hole 9 (35) PCW type VQC R4.5 97 SQ (5.5) 62.5 61.5 VQ0 26 VQ4 4.5 52 (L3) (5.2) (L4) VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

0.4

Station 9 SOL.B 22 SOL.A 10 Station 10 SOL.B 23 SOL.A 11 Station 11 SOL.B 24 SOL.A 12 Station 12 SOL.B 25 Note) COM. 13 VV5Q21 Positive COM spec. Negative COM spec. The total number of stations is tabulated starting from station one on the D-side. Note) When using the negative common specifications, use valves for negative common. (Refer to page 56.)

0.4

Station 9 SQ SOL.B SOL.A 23 10 Station 10 SOL.A VFS SOL.B 24 11 Station 11 SOL.B SOL.A 25 12 Station 12 VFR VV5Q21 COM. () Orange Red (+) 13 VQ7 Positive COM spec. Negative COM spec. The total number of stations is tabulated starting from station one on the D-side. Note) When using the negative common specifications, use valves for negative common. (Refer to page 419.)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Station 9 SOL.B 22 SOL.A 10 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Station 10 SOL.B 23 SOL.A 11 Station 11 SOL.B 24 SOL.A 12 Station 12 SOL.B 25 Note) COM. 13 Positive COM spec. Negative COM spec. 1021-VV5Q21 The total number of stations is tabulated starting from station one on the D-side.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Station 9 SOL.B 22 SOL.A 10 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Station 10 SOL.B 23 SOL.A 11 Station 11 SOL.B 24 SOL.A 12 Station 12 SOL.B 25 Note) COM. 13 Positive COM spec. Negative COM spec. 1021-VV5Q21 The total number of stations is tabulated starting from station one on the D-side.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Using the D-sub connector (25P), (15P as an option) conforming to MIL standard permits the use of connectors put on the market and gives a wide interchangeability. Top or side receptacle position can be selected in accordance with the available mounting space. Maximum stations are 16.

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 6 mm, Symmetric Type: L (Symmetric), Stroke: 15mm, Adjuster: w/o Adjuster, Function: P (Axial Piping Type)

Specification: Clean Series, Vacuum Type, Bore Size: 6 mm, Symmetric Type: Symmetric, Stroke: 15mm, Adjuster: w/o Adjuster, Function: Axial Piping Type, Switch Rail: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

LEC-OM07605CN

(FR-BSF01FR-BLF) 7) 8) 11 20 11.

LEC-OM02904

11.1.1 113 11.1.2 116 11.1.3 118 11.1.4 11-10 11.1.5 SSCNET 11-12 11.2 11-14 TM 11-17 11.3 MR Configurator2 11.4 LEC-MR-J3BAT 11-19 3 - 11.5 11-20 11.6 () 11-24 11.7 11-25 11.8 11-31 11.9 EMC() 11-34 12 121 125 12.1 122 12.2 123 12.3 124 12.3.1 124 12.4 124 12.5 125 13 131 136 13.1 132 13.1.1 132 13.1.2 134 13.2 . 135 13.3 . 135 13.4 . 135 13.5

LEC-OM02704CN

PA12 P A 11 PA12 P A 11 PA12 15 46 15 1.

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12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

A-HEC-OM-J004

If installed improperly, the product might leak water or topple, resulting in injury. 4.4 Installation 4-11 A_HEC-OM-J004-4 Chapter 5 Operation Chapter 5 Operation 5.1 Start of Operation 1. Confirm that the recirculating fluid has reached the LOW level of the tank and supply cooling water to the Liquid Tank. 2.

VP4

Made to Order Specifications (For details, refer to page 3-6-11.)

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0 0.036 0 0.043 0 0.043 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 12 14 17 23 31.5 8 10 11 15 21.5 2H9 8h9 6 7 9 11 12 3H9 8h9 4H9 10h9 6H9 12h9 8H9 14h9 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 SC 9 9 12 14 19 SB 8 9.5 9.5 11 11 R 44 53 62 76 95 SA 4.5 5.5 5.5 6.6 6.6 Y O 4.5 4.5 5 5.5 6 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Q 11 12 14 17 20 TB 8 8 10 10 12 UA M4 x 0.7 M5

High Vacuum Angle Valve

Example) -M9NL !

Free Mount Cylinder

Applicable Auto Switch/ Refer to Best Pneumatics Vol. 11/12 for further infomation on auto switches.

Aluminum High Vacuum Angle Valve

Example) -M9NL !

NCG/CG1

Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM NA P S TA TB ZZ 114 119 121 139 162 162 196 196 11 11 11 12 13 13 12 12 12 13 14 14 20 20 35 40 40 50 58 58 71 71 5 6 6 8 11 11 13 16 26 31 38 47 58 72 89 110 5 M8 x 1.25 24 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 77 77 79 87 102 102 122 122 11 11 11 12 13 13 12 12 12 13 14 14 20 20 Up to 350 Up to