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Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D H R 3 10 R M9B S 22 M D H R 3 10 R M9B S Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 pcs. 1 pc.

10 23 23 11 MXF16 3.41 5.69 7.96 10 12 10 28 28 12 MXF20 6.66 9.14 13.70 18.27 11 17 11 34 34 17 *Note) 16mm only for MXF8-10.

10 23 23 11 MXF16 3.41 5.69 7.96 10 12 10 28 28 12 MXF20 6.66 9.14 13.70 18.27 11 17 11 34 34 17 *Note) 16mm only for MXF8-10.

[mm] (Reference value) 17 Weight 5.5 Most sensitive position [g] Auto switch model D-M9Nm-5 D-M9Pm-5 D-M9Bm-5 0.5 m (Nil) 7 6 Lead wire length 1 m (M) 13 11 3 m (L) 35 31 5 m (Z) 57 51 17-E683 D-M9m-5

(Rated voltage 125 V, Plug JIS C8303, Inlet IEC60320-C8) Flow rate adjustment function Nil Without flow rate adjustment function R With flow rate adjustment function Without flow rate adjustment function With flow rate adjustment function e-con connector Cartridge case Bracket IZF 10 IZF 10 IZF 10R IZF 10 IZF 10R 28 ZS C IZF 10 IZF10 A1 B1 *: 4 retaining bolts are included.

5.5 5.5 11 MY1 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 20 30 20 28 38 ZZ 48 58 68 90 106 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21 31 43 41 MXS6L-10 MXS6L-20 MXS6L-30 MXS6L-40 MXS6L-50 3.11-29 Series MXS Dimensions MXS 8L

3H9 2.5 deep +0.025 0 5 M 0.5 18 20 Z ZZ (NN-1) x H G H 11 5.5 5.5 11 A B 3.2 6.5 7 7 12 4 NN-M4 x 0.7 thread 8 deep A B 3H9 2.5 deep +0.025 0 3H9 2.5 deep +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 GA 11 21 31 43 41 HA 20 20 20 30 48 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 Z 41.5 51.5 61.5

D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65 + 50 (n2) D-G5

1 Auto Switch Series MDHR2/MDHR3 Series MDHR2/MDHR3 Auto Switch Installation Example and Mounting Position 2) Detection when Gripping Exterior of Workpiece/Auto Switch Mounted from Direction B 1. Confirmation of fingers in reset position 2. Confirmation of workpiece held 3.

1 Auto Switch Series MDHR2/MDHR3 Series MDHR2/MDHR3 Auto Switch Installation Example and Mounting Position 2) Detection when Gripping Exterior of Workpiece/Auto Switch Mounted from Direction B 1. Confirmation of fingers in reset position 2. Confirmation of workpiece held 3.

Switch fastening position Light illuminating position 0.3 to 0.5mm Switch fastening position 2.10-11 Corporation of America The worlds leader in pneumatics A New Solution for High Temperature Applications with SMCs Series CQ2...

SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 When this signal is OFF, an alarm is being generated for the actuator/controller.

21.5 M4 x 0.7 11 20, 25 18-(0 to 10) R thread Auto switch Minimum bending radius of lead wire 10 In case of connector 2-M5 x 0.8 F (2) M8 x 1.25 Effective thread depth 11 through 2 x 2counterbore depth 7 depth 3 R + Clamp stroke Q + 2 x Clamp stroke Both ends tapped style: MKA M6 x 1.0 R + Clamp stroke (Basic) (mm) U S R K L Oh9 Q F E C B A Model MKB20 MKB25 0 0.052 0 0.052 0.15 0.15

14 17 20 A 26 26.5 30 21 25.5 26 B 3.5 4 8 11 14 17 A 33 33.5 37 28 32.5 33 B 10.5 11 15 18 21 24 A 19.5 24 24.5 B 9.5 12.5 15.5 A 31.5 22.5 27 27.5 B 9.5 12.5 15.5 18.5 A 35.5 26.5 31 31.5 B 13.5 16.5 19.5 22.5 MK2l20 MK2l25 MK2l32 MK2l40 MK2l50 MK2l63 Auto Switch Mounting Bracket Part No.

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D HR 2 10 R M9B S 22 M D HR 2 10 R M9B S Number of fingers Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 2 fingers Nil S 2 pcs. 1 pc. 22 Vacuum suction type Nominal size 10 15 20 30 Auto switch Without auto switch (without magnet) Nil Connecting

Clean Series: 11 (Vacuum Suction Type), Magnet: D (With Magnet), Nominal Size: 10, Connecting Port: R (Body Side)

Clean Series: Vacuum Suction Type, Magnet: With Magnet, Nominal Size: 10, Connecting Port: Body Side, Auto Switch: -, Lead Wire: -, Number: -

Set the mounting band perpendicularly to cylinder tube. 20 50 63 80 100 25 32 40 D-B7/B80 8 10 9 10 10 11 D-B73C/B80C D-C7/C80 8 10 9 10 10 11 D-C73C/C80C 8 10 9 10 10 11 D-B5/B64 11 11 MX Mounting correctly Mounting incorrectly 13 13 14 14 14 17 D-B59W 18 16 D-G79/K79 8 10 9 10 10 11 Auto Switch Mounting Bracket Part No.

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

SET-ON 10 Start readiness signal CN2 24VDC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 <1> When this signal is OFF, an alarm is being generated for the actuator/controller.