1

) 1(P) 5(R1) 3(R2) N.C.

0.4

3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) S kit Dual 3 port valve: SQ2 31 A B C Component Parts r e w q No.

5 Port Solenoid Valve Series VQZ1000/2000/3000

) port] D side U side L4 L3 SYJ 11 L5 PE port 3/8 [1(P) port] Manual override SZ Output no. (5.5) 5.5 + + 13 11 VP4 + + (8) 9 7 (DIN rail) S0700 150.3 [154.7] 50.4 (42) 136.8 [141.2] 36.9 42 1 P 5 R1 3 R2 1 P 3 R2 5 R1 B B B B B B B 21 21 73 (35) VQ 23 26 35.9 67.9 [70.1] A A A A A A A (5.5) VQ4 34.5 VQ5 12 10 8 6 4 2 0 + + + + + + + 4 x 4.5 (For mounting) M5 x 0.8 (X: External pilot port

42

with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed = 100 with AMC610-10 installed 118 (135) (=105 with AMC810-14 installed) ( 105 with AMC810-14 installed) 118 (135) 159 (172.5) (105 with AMC810-14 installed) (= 105 with AMC810-14 installed) 159 (172.5) 158.7 158.7 3/4" 1(P), 5(R1), 3(R2) port 3/4" 1(P), 5(R1), 3(R2) port 2 x G1 (Electrical entry) 12 21

SQ1000/2000

SQ1441 SQ1341 (A)(B) (A)(B) (A)(B) 2 4 (A)(B) (A)(B) 2 4 (A)(B) 4 2 4 2 4 2 4 2 5 1 3 (R1) (P)(R2) 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) (R1)(P)(R2) Parts list Dual 3 port valve: SQ1 41 A B C No.

0.4

) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQC1200 VQC1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQC1301 VQC1401 VQC1300 VQC1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQC1500 VQC1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

12 10 11 11 12 11 12 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 Closed center 50 or less 0.82 VFS4310 600 VFS4300 Exhaust center 50 or less 0.82 VFS4410 VFS4400 600 Pressure center 50 or less 0.82

2

IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E IDF15E1 IDF22E IDF37E IDF55E IDF75E 0.75 1.5 2.2 3.7 5.5 7.5 11 15 22 37 55 75 Rc3/8 Rc1/2 35C 0.7 MPa Rated inlet condition Applicable air compressor (kW) Port size Model Rc3/4 IDF100F IDF125F IDF150F IDF190D IDF240D R2 65 (2 1/2B) Flange 100 125 150 190 240 Rc1 R1 R1 1/2 IDFE 40C 0.7 MPa 80 (3B) Flange 40C 0.7 MPa 100 (4B) Flange R2 35C 0.7 MPa

SYJ3000/5000/7000

length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to page 1-5-79 for dimentions with connector cable. 1-5-11 12 Series SYJ3000 2 Position Double [ ]: AC G H Grommet (G), (H): SYJ3240-M5 M5 x 0.8 (A, B port) 10 5 10 2-3.2 (For mounting) 22 2.5 Manual override B A 11 A B Courtesy of Steven Engineering

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

) 1 (P) (R2)3 5(R1) G, H, L, M, W 24, 12, 6, 5, 3 D, Y 24, 12 DC AC 50/60 Hz 2 position double solenoid 2 position double Coil rated voltage (V) 100, 110, 200, 220 10% of rated voltage 0.35 {With light: 0.4 (DIN terminal with light: 0.45)} 2(B) (A)4 4(A) (B)2 Allowable voltage fluctuation Standard With power saving circuit (R1)5 1 (P) 3(R2) 5(R1) (R2)3 1 (P) 0.1 (With light only) [Starting

Fluoropolymer Piping Equipment

LQ3U11-R1 4 3 10 9 10 9 11 11 46.5 44.5 14 14 2 10 LQ3U21-R1 6 4 17 16 10 9 16 11 51 48.5 20 14 2.5 14 LQ3U21-R2 3 2 LQ3U31-R1 10 8 22.5 19.5 22.5 19.5 21 21 79 73 25 25 6.4 18 LQ3U31-R2 6 17 16 16 66.5 62 20 4 LQ3U32-R1 8 6 22.5 19.5 17 16 21 16 66.5 62 25 20 18 LQ3U32-R2 4 10 9 11 62 58 14 2.5 LQ3U41-R1 12 10 24 22 22.5 19.5 24 21 82.5 77 29 25 7.5 22 LQ3U41-R2 8 6.4 LQ3U51-R1 19 12 26.5

VQZ1000/2000/3000

54.5 <59.5> 48 <53> 1 P 1 P Cover diameter 1.5 Cross section 0.23 mm2 R1 5 R2 3 R1 5 R2 3 < >: AC < >: AC Formula L1 = 10.5n + 9.5, L2 = 10.5n + 17.5 n: Stations (Maximum 20 stations) Dimensions L n 2 30.5 38.5 62.5 73 3 41 49 75 85.5 4 51.5 59.5 87.5 98 5 62 70 100 110.5 6 72.5 80.5 100 110.5 7 83 91 112.5 123 8 93.5 101.5 125 135.5 9 104 112 137.5 148 10 114.5 122.5 150 160.5 11 125 133

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(Lead wire length) 64.3[66.5] 54.5[56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to page 563 for dimensions with connector cable. 501 10-SYJ3000 4/5 port solenoid valve Series 2 position double [ ]: AC G H Grommet (G), (H): 10-SYJ3243-M5 M5 x 0.8 (A, B port) 10 5 10 2-3.2 (For mounting) 22 2.5 Manual override 11

High Vacuum Angle Valve

XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 50 123 48 1 12 40 26 16 7.5 41 65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

5 Port Solenoid Valve

N.C. 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) N.O. N.O. 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) N.C.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

0.4

) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5(R1) 1(P) 3(R2) 5(R1) 1(P) 3(R2) r VQ1C01 2(B) 4(A) 5(R1) 1(P) 3(R2) Component Parts Component Parts No.

VFS

[dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Weight (kg) Plug-in Non plug-in VF 2.6 2.8 2.6 2.8 2.5 2.7 2.6 2.9 2.7 2.9 2.8 3.1 2.8 3.1 2.3 2.6 2.3 2.4 2.7 2.8 3 8 0.20 0.22 0.20 0.22 0.14 0.22 0.15 0.15 0.22 0.22 VFS4110 11 12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Port Symbol Caution VF1000 VF3000 VF5000 Supply P P (SUP) P Cylinder A, B A (CYL2) B (CYL1) A, B Connector R1 (EXH2) R2 (EXH1) R1, R2 EXH outlet EA, EB Lead wire JIS symbol Single solenoid Socket Hook 1: P (SUP) 2: B (CYL.1) 3: R2 (EXH.1) 4: A (CYL.2) 5: R1 (EXH.2) 1: P 2: B 3: R2 4: A 5: R1 Plug Connector Lead Wire Length 1: P 4: A 2: B 5: R1 3: R2 Standard length is 300 mm, but the following

VQ4000

light 50 11 (12.5) 11 (12.5) 2 4 4(A) port 2(B) port 24.6 38 48 4 2 B A 24.6 A B 38 48 14 12 5 3 1 B A 30 45 14 3 5 1 12 2-5.6 Mounting hole Manual override 2-5.6 Mounting hole 45 30 Manual override 14.5 27 30.5 32 41.5 91.5 129 79 PE X PE X 32 41.5 30.5 27 R1 R2 P R2 R1 14.5 P 19.5 19.5 (21) (21) Rc 1/8 External pilot port Rc 1/8 PE port Rc 1/8 PE port 19.5 (21) 19.5 (21) 31 31 5-Rc 1/4