Electric Actuator

10: 11-LEFS16AA 0 0 0 100 200 300 400 500 600 700 800 900 0 100 200 300 400 500 600 700 800 900 Speed: V [mm/s] Speed: V [mm/s] 11-LEFS25A/Ball Screw Drive Horizontal Vertical 20 20 Lead 6: 11-LEFS25AB 15 15 Work load: W [kg] Work load: W [kg] Lead 12: 11-LEFS25AA 10 10 5 5 Lead 6: 11-LEFS25AB Lead 12: 11-LEFS25AA 0 0 0 100 200 300 400 500 600 700 800 900 0 100 200 300 400 500 600 700 800

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100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 CEP1 Max. 500 mm/s of high speed transfer is possible.

CATALOG

20UNF 0.49 1.65 Z 50 100 150 200 300 400 500 3.02 3.23 3.52 4.00 3.04 3.25 3.54 4.02 4.44 5.06 5.83 D I M E N S I O N S ( I N C H) N O N-R O TAT I N G S I N G L E A C T I N G S P R I N G E X T E N D R O D S I D E F L A N G E T Y P E NCJ2KF_-_T A C C E S S O R I E S S E E N E X T P A G E S Z 50 400 500 100 150 200 300 50 100 300 400 500 150 200 Bore Size A BA BB CA CB F MM NN NA NB FX FY

AC Servo Motor Driver (Pulse input type/Positioning type ）

OPTIONS AND PERIPHERAL EQUIPMENT . 11-2 11.1 Cable/connector sets . 11-2 11.1.1 Combinations of cable/connector sets . 11-3 11.1.2 STO cable . 11-6 11.1.3 Encoder cable/connector sets . 11-7 11.1.4 Motor cables . 11-9 11.1.5 Lock cables . 11-10 11.2 Regenerative options . 11-11 11.2.1 Combination and regenerative power . 11-11 11.2.2 Parameter setting . 11-11 11.2.3 Selection of regenerative

A

100 100mm S T R O K E S T R O K E 20, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 20, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 D I M E N S I O N S S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

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of 500 mm/s, use graph (2).

Air Slide Table

fluid temperatures 10 to 60C IN 75 15 23 30 38 45 53 50 to 500 mm/s (Metal stopper with bumper: 50 to 300 mm/s) (Metal stopper: 50 to 200 mm/s) 12 6 OUT 226 45 68 90 113 136 158 Operating speed range (Average operating speed) IN 170 34 51 68 85 102 119 16 6 OUT 402 80 121 161 201 241 281 in the standard stroke table on page 11: 50 to 300 mm/s IN 346 69 104 138 173 207 242 Cushion (Without

MY1

For detailed selection procedures, refer to pages 8-11-92 and 8-11-93. 10 10 10 100 200 300 400 500 1000 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) 8-11-90 8-11-91 87 Series MY1HT Model Selection Following are the steps for selecting the most suitable Series MY1 to your application. Calculation of Guide Load Factor 1.

Mechanically Jointed Rodless Cylinder Series MY1

500 1000 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed mm/s Piston speed mm/s Piston speed mm/s Technical data 1041 Series MY1HT Model Selection Following are the steps for selecting the most suitable Series MY1HT to your application.

Air Cylinder Series MB

P RF S MM V W WL ZZ S ZZ 32 40 50 63 80 100 to 500 to 500 to 600 to 600 to 800 to 800 15 19 19 19 23 23 27 27 31.5 31.5 38 38 35 40 43.5 43.5 56 56 1/8 1/4 1/4 3/8 3/8 1/2 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 11 11 11 11 21 21 92 97 106 106 132 132 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 24 24 24 24 40 40 143 152 168 168 208 208 100 110 118 118 150 150 151 165 180 180

Slider Type Ball Screw Drive/11-LEFS Series

Note 4) When the suction flow rate is 0 L/min, the particle concentration is measured during operation without suction. 510 A Particle Generation Characteristics 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Particle Generation Characteristics Step Motor (Servo/24 VDC), Servo Motor (24 VDC) 11-LEFS16 Speed 500 mm/s 11-LEFS25 Speed 500 mm/s 10 10 LEF

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Fixed 4% F .S.

JXCx-OMT0023

11 11.

Air Cylinder Series CM2

Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Minimum operating pressure 0.08 MPa Maximum piston speed: 500 mm/s It can be used at 50 to 500 mm/s provided that it is within the allowable kinetic energy range.

15

1000 1000 L3 [mm] L3 [mm] L3 [mm] m 25AL3 Z 500 500 500 LEC 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] LEC S 1500 1500 1500 LEC SS-T LEC Y L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X Motorless Motorless 500 500 500 LAT 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LZ 1500 1500 1500

Electric Actuator/Slider Type

6: LEFS25B 10 10 Lead 12: LEFS25A 5 5 Lead 12: LEFS25A 0 0 0 100 200 300 400 500 600 Speed: V [mm/s] 0 100 200 300 400 500 600 Speed: V [mm/s] LEFS32/Ball Screw Drive Horizontal Vertical 50 50 Lead 8: LEFS32B 40 40 Work load: W [kg] Work load: W [kg] 30 30 Lead 16: LEFS32A Lead 8: LEFS32B 20 20 10 10 Lead 16: LEFS32A 0 0 Speed: V [mm/s] 0 100 200 300 400 500 600 0 100 200 300 400 500 600

Magnetically Coupled Rodless Cylinder

speed mm/s Piston speed mm/s (1Nm = 0.74 ftlb) 4 CY1F/m1 5 CY1F/m2 6 CY1F/m3 7 CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm

CA2

size (mm) 40 50 63 80 100 Stroke range up to 500 up to 600 up to 600 up to 750 up to 750 B B1 C A AL D E F G H H1 J K KA M MM N S S ZZ 156 169 180 214 225 ZZ 146 159 170 204 215 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 6 7 7 10 10 14 18 18 22 26 11 11 14

Air Cylinder Series CA2

(mm) A Bore size (mm) AL B B1 C D E F G H1 J KA M MM Without rod boot With rod boot 40 50 63 20 to 500 Up to 500 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 14 11 M14 x 1.5 20 to 600 Up to 600 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 18 11 M18 x 1.5 20 to 600 Up to 600 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 18 14 M18 x 1.5 Without rod boot With rod boot P Bore size (mm) 40 50 63 S N H ZZ d e

Electric Actuator

200 400 100 500 600 00 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] LEY25 LEY25 30.1 77.2 Lead 3: LEY25AC 26.5 66.1 Lead 3: LEY25C Vertical work load [lb] Vertical work load [lb] 22.0 55.1 17.6 44.1 Lead 6: LEY25AB Lead 6: LEY25B 13.2 33.0 8.8 22.0 Lead 12: LEY25AA Lead 12: LEY25A 4.4 11.0 0 0 300 200 400 100 500 600 0 0 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] Allowable Lateral