1

Base gasket (for metal base and sub-plate) SY70M-11-1A SY50M-11-1A SY30M-11-1A w plug-in VZ1000-11-4VZ1000-11-4VZ1000-11-1e Refer to page 239. DIN rail Clamp bracket assembly (for metal base) Part numbers shown on the left are for the clamp bracket assembly for one manifold (two sets of clamp brackets).

A

M14x1.5 44 18 87 10 16.5 9 4 6.6 30 60 3 54 71 50 144 M18x1.5 55 14 102 17.5 22 11 5 9 40 67 4.5 66 86 58 169.5 M18x1.5 69 14 102 17.5 22 13 5 11 45 67 4.5 82 106 58 169.5 M22x1.5 80 38 122 20 28.5 14 6 11 55 74 4.5 100 125 71 202.5 M26x1.5 100 12 122 20 30 16 6 14 65 74 6 120 150 71 206 D I M E N S I O N S C L E V I S (S E E A C C E S S O R I E S F O R R E C E I V I N G P I V O T B R A

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sensitive workpieces Allows rapid transfer of impact Maximum speed (600 mm/s) m/s 2 or less (REA) or 15 m/s 2 or less (REB) Throughput dramatically increased (Maximum speed: 600 mm/s) RE A B Series REB introduced with a maximum speed of 600 mm/s.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

rate: 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

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30 to 800 mm/s 30 to 700 mm/s 30 to 600 mm/s Precautions MX Bumper is standard on both ends Cushion Port size M5 x 0.8 Rc 1/8 Be sure to read before handling.

CA2

size (mm) 40 50 63 80 100 Stroke range up to 500 up to 600 up to 600 up to 750 up to 750 B B1 C A AL D E F G H H1 J K KA M MM N S S ZZ 156 169 180 214 225 ZZ 146 159 170 204 215 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 6 7 7 10 10 14 18 18 22 26 11 11 14

Air Cylinder Series MB

P RF S MM V W WL ZZ S ZZ 32 40 50 63 80 100 to 500 to 500 to 600 to 600 to 800 to 800 15 19 19 19 23 23 27 27 31.5 31.5 38 38 35 40 43.5 43.5 56 56 1/8 1/4 1/4 3/8 3/8 1/2 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 11 11 11 11 21 21 92 97 106 106 132 132 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 24 24 24 24 40 40 143 152 168 168 208 208 100 110 118 118 150 150 151 165 180 180

4/5 Port Solenoid Valve

11 11 11 2-2.6 (For mounting) 2-2.6 (For mounting) 2-2.6 (For mounting) 20 20 20 2-2.6 (For mounting) (2.3) (2.3) 20 (2.3) 23 23 23 23 27 Refer to back page 11 for dimentions with connector cable. 28 Series SYJ5000 2 Position Double [ ]: AC G H Grommet (G), (H): SYJ5220-M5 Built-in one-touch fitting: SYJ5220G H C4, N3 C6, N7 G: Approx. 300 H: Approx. 600 (Lead wire length) 87.2 [91.6] 43

V100

AC voltage valves there is no S option.

15

Lead 20: LEYG32A 30 30 20 20 0 0 0 200 600 1000 1400 1200 Speed [mm/s] 0 200 600 1000 1400 Speed [mm/s] 866 A Model Selection LEYG Series Motorless Type * These graphs show an example of when the standard motor is mounted.

Electric Actuator/Slider Type

Model L A B n D E LEFS32 S -100 295 106 230 4 LEFS32 S -200 395 206 330 6 2 300 LEFS32 S -300 495 306 430 6 2 300 LEFS32 S -400 595 406 530 8 3 450 LEFS32 S -500 695 506 630 10 4 600 LEFS32 S -600 795 606 730 10 4 600 LEFS32 S -700 895 706 830 12 5 750 LEFS32 S -800 995 806 930 14 6 900 26 Series LEFS Dimensions: Ball Screw Drive Motor right side parallel type: LEFS40R With lock: LEFS40

Air Cylinder Series CA2

(mm) A Bore size (mm) AL B B1 C D E F G H1 J KA M MM Without rod boot With rod boot 40 50 63 20 to 500 Up to 500 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 14 11 M14 x 1.5 20 to 600 Up to 600 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 18 11 M18 x 1.5 20 to 600 Up to 600 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 18 14 M18 x 1.5 Without rod boot With rod boot P Bore size (mm) 40 50 63 S N H ZZ d e

Slider Type Ball Screw Drive/11-LEFS Series

11-LEFS32ll-450l 791 821 456 580 8 3 450 11-LEFS32ll-500l 841 871 506 630 10 4 600 11-LEFS32ll-550l 891 921 556 680 10 4 600 11-LEFS32ll-600l 941 971 606 730 10 4 600 11-LEFS32ll-650l 991 1021 656 780 12 5 750 11-LEFS32ll-700l 1041 1071 706 830 12 5 750 11-LEFS32ll-750l 1091 1121 756 880 12 5 750 11-LEFS32ll-800l 1141 1171 806 930 14 6 900 525 11-LEFS Series AC Servo Motor Clean Room Specification

CL

X 1.25 M12 X 1.75 M12 X 1.75 Trunnion/CLAWT (mm) Stroke range A Bore (mm) 40 50 63 80 100 D LZ BP E BN K C KA B GC B1 GD F AL BQ GA GB J H1 GL GR W/o rod boot 25 X 500 25 X 600 32 X 600 41 X 750 45 X 750 W/ rod boot 25 X 500 25 X 600 32 X 600 41 X 750 45 X 750 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 22 27 27 32 41 8 11 11 13 16 M8 X 1.25 M8 X 1.25 96 108 115 129 140 6 7 7 11 11 44 52 64

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Horizontal mounting Cylinder MY1HT50-600 Average operating speed a 700 mm/s Mounting orientation Vertical mounting CusionShock absorber ( = 1/100) 2. Wall mounting z y P. 8-11-36 P. 8-11-6 MY1HT50-600 x y x z Wd: Workpiece (500 g) x 3. Ceiling mounting 4.

Combination Cylinder

to 600 to 750 to 750 to 1000 to 1000 to 1200 W/ rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000 30 to 1000 30 to 1200 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 69 78 84 92 100 141.5 150 167 44 52 64 78 92 115 128 144 16 20 20 25 30 36 36 40 40 50 55 65 80 90 90 90 32 40 40 52 52 6.5 6.0 6.0 8.0 8.0 43 43 43 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16

Battery-less

[mm/s] Speed [mm/s] LEYG40M L mE LEYG40M L mE for acceleration/deceleration: 2000 mm/s2 100 60 Lead 4: LEYG40M L EC Lead 4: LEYG40M L EC 90 51 Horizontal work load [kg] 80 Vertical work load [kg] Lead 8: LEYG40M L EB 70 40 60 Lead 16: LEYG40M L EA 50 Lead 8: LEYG40M L EB 25 40 20 20 11 Lead 16: LEYG40M L EA 0 0 0 300 400 500 200 100 600 0 300 400 500 200 100 600 Speed [mm/s] Speed [mm/s]

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700 600 500 400 300 200 100 Horizontal actuation VQ7-6-FG-S-RA02 0 1000 900 800 700 600 500 400 300 200 100 0 VQ7-6-FG-S-RA03 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

Electric Actuators

150 200 250 300 350 400 450 500 10kg 8kg 18kg 16kg 14kg Speed (mm/s) Speed (mm/s) Model Mounting orientation LJ1H30 12kg Load movement direction 10kg 600 14kg 400 L1 (mm) L3 (mm) 12kg 20kg 50 100 a = 1000 16kg 18kg 20kg Pitching Yawing Vertical Vertical m a a = 3000 a = 2000 200 100 200 300 400 500 600 0 100 200 300 400 500 600 0 L1 Mep Stroke (mm) Stroke (mm) 0 5 10 20 15 Transfer load

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

[mm/s] Speed [mm/s] LEY32DV7 (Motor mounting position: In-line) Vertical Horizontal 60 80 Lead 4: LEY32DC Lead 4: LEY32DC 50 Regenerative resistor area 60 Lead 8: LEY32DB 40 Work load [kg] Work load [kg] Lead 8: LEY32DB 30 40 Lead 16: LEY32DA 20 Lead 16: LEY32DA 20 10 0 0 0 200 400 600 800 1000 1200 0 200 400 600 800 1000 1200 Speed [mm/s] Speed [mm/s] Regenerative resistor area Applicable