This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, MICROSPEED, D/ACT, CLN RM, ACTUATOR, CQSX MICROSPEED CYL, H5, 20MM CQSX DBL ACT CLEAN ROOM, .00000 lb

1

Base gasket (for metal base and sub-plate) SY70M-11-1A SY50M-11-1A SY30M-11-1A w plug-in VZ1000-11-4VZ1000-11-4VZ1000-11-1e Refer to page 239. DIN rail Clamp bracket assembly (for metal base) Part numbers shown on the left are for the clamp bracket assembly for one manifold (two sets of clamp brackets).

Smooth Cylinder/Low Speed Cylinder

9.5 11 27 9.5 1.5 0 32 0.5 11 9.5 2.5 Note 1) [ ]: Denotes the values of D-A93.

Table of Contents

8h9 8h9 10h9 12h9 14h9 B 54 62 74 92 112 CA 9.5 10.5 11.5 13 14 AD 24 26 31 37 46 CB 19 19 26.5 28 31 AA 63 66 80 91 108 AC 3 3 3 4 5 K 9 9 10 11 12 Model MHSJ3-32D MHSJ3-40D MHSJ3-50D MHSJ3-63D MHSJ3-80D 0 0.036 0 0.036 0 0.036 0 0.043 0 0.043 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 VA 4H9 4H9 5H9 6H9 6H9 Q 11 12 14 17 20 YB 8 8 10 12 12 SC 7 7 8 8 8 WB 2 2 2 2.5 3 SB 8 8 9.5 11 11

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

-45D -50D CQ2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B80-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B100

CQ2

11 20 77 116 134 53.5 80 73.5 53.5 43.5 M12 X 1.75 18 100 117 11 11 22 94 136 154 53.5 100 85 63 43.5 M12 X 1.75 22 Refer to p.2.3-18 for rod end nut and optional brackets.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

-45D -50D CQ2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B80-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B100

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

92 112 AD 24 26 31 37 46 M 2 2 2 3 4 AA 63 66 80 91 108 AC 3 3 3 4 5 K 9 9 10 11 12 54 57 70 79 93 0 -0.036 0 -0.036 0 -0.036 0 -0.043 0 -0.043 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 MHSHJ3-32D MHSHJ3-40D MHSHJ3-50D MHSHJ3-63D MHSHJ3-80D 8h9 8h9 10h9 12h9 14h9 UA M5 x 0.8 M5 x 0.8 M6 x 1 SB 8 8 9.5 11 11 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5

Compact Cylinder

11 99 134 20 53.5 77 100 100 64 12 43.5 M12 x 1.75 22 85 63 117 136 11 11 154 22 53.5 94 For details about the rod end nut and accessory brackets, refer to page 19.

NCQ2/CQ2

CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D 40

Compact Hydraulic Cylinder

6.5 9.5 11 15.5 14.5 15 12 8 12 9.5 11 10 8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 8 12 9.5 11 10 8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 CH2F (mm) Auto switch model Bore size (mm) 32 40 50 63 80 100 D-M9m/M9mV D-M9mW/M9mWV D-M9mAL/M9mAVL D-F5m/J5m/F59F D-F5mW/J59W D-F5BAL/F5NTL D-G5m

Hydraulic

11 11 40 88 109 21 M10 x 1.25 37 136 30 11 25 to 800 0.13 0.18 40 65 45 12 42 3/8 11 11 11 46 95 118 21 M10 x 1.25 36 136 30 11 25 to 800 0.2 50 76 52 15 46 1/2 14 13 11 58 115 145 27 M10 x 1.25 43 150 30 13 25 to 800 0.15 63 90 63 15 52 1/2 18 15 14 65 132 165 27 M12 x 1.5 43 156 35 15 25 to 800 0.2 80 110 80 17 65 3/4 18 18 16 87 155 190 22 M16 x 1.5 44 166 35 18 25 to 1000 0.3 0.18 100

CLQ

-40D -40D -40D -45D -45D -45D -45D -50D -50D -50D -50D -75D -75D -75D CDLQB25-5D -100D -100D -100D M10 x 125l x 130l x 135l x 140l x 145l x 150l x 155l x 160l x 165l x 190l x 215l -10D CDLQB40-10D CDLQB63-10D CDLQB100-10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D 8.5 -30D -30D -30D -30D -35D -35D -35D -35D 16.5 15.5 8.5 -40D -40D -40D -40D -45D -45D -45D -45D -50D -50D

Compact Cylinder with Lock Series CLQ

-40D -40D -40D -45D -45D -45D -45D -50D -50D -50D -50D -75D -75D -75D CDLQB25-5D -100D -100D -100D M10 x 125l x 130l x 135l x 140l x 145l x 150l x 155l x 160l x 165l x 190l x 215l -10D CDLQB40-10D CDLQB63-10D CDLQB100-10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D 8.5 -30D -30D -30D -30D -35D -35D -35D -35D 16.5 15.5 8.5 -40D -40D -40D -40D -45D -45D -45D -45D -50D -50D

Compact Cylinder with Lock Series CLQ

CLJ2 CLQB: Without Auto Switch CLM2 Cylinder model Cylinder model Cylinder model Cylinder model Mounting bolt size CLQB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Mounting bolt size Mounting bolt size CLQB50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D Mounting

CLQ

x 125l x 150l 16.5 15.5 8.5 -40D -40D -40D -40D x 130l x 155l -45D -45D -45D -45D x 135l x 160l -50D -50D -50D -50D x 140l x 165l -75D -75D -75D x 165l x 190l -100D -100D -100D x 190l x 215l 9-10-11 11 Series CLQ Construction: 20 to 32 i o !

CATALOG

0~0.025 2 MHS3-50D 55 52 3 70 9 20 35 41 11 17 31 28 6 37.5 9 24 10 4H9 0~0.03 2 MHS3-63D 66 62 4 86 12 22 43 51 15 23 38 34.5 7 44 11 28 11 6H9 0~0.03 3 MHS3-80D 82 77 5 106 13.5 27 53.5 63.5 21.5 31.5 47.5 43.5 8 56 12 32 12 8H9 0~0.036 4 Part No NA NB O P Q R SA SB SC TA TB UA UB VA MHS3-32D 14 8H9 -0.036~0 4.5 M5x0.8 11 44 4.5 8 9 M4x0.7 8 M4x0.7 6 3H9 0~0.025 MHS3-40D 16 8h9 -0.036~0

A

52 3 70 9 20 35 41 11 17 31 28 6 37.5 9 24 10 4H9 0~0.03 2 MHS3-63D 66 62 4 86 12 22 43 51 15 23 38 34.5 7 44 11 28 11 6H9 0~0.03 3 MHS3-80D 82 77 5 106 13.5 27 53.5 63.5 21.5 31.5 47.5 43.5 8 56 12 32 12 8H9 0~0.036 4 Part No NA NB O P Q R SA SB SC TA TB UA UB VA MHS3-32D 14 8H9 -0.036~0 4.5 M5x0.8 11 44 4.5 8 9 M4x0.7 8 M4x0.7 6 3H9 0~0.025 MHS3-40D 16 8h9 -0.036~0 4.5 M5x0.8 12 53 5.5

Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 82 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 84 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 98 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 102 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22 11

Table of Contents

50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.