High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Table of Contents

Gripping point L (mm) DMHZJ2-16D/11-MHZ2-16D 2050 Pressure 0.7 MPa Pressure 0.7 MPa Gripping force (N) 40 0.6 MPa 0.5 MPa 0.6 MPa 0.5 MPa 0.4 MPa 30 0.4 MPa 0.3 MPa 0.2 MPa 0.3 MPa 20 0.2 MPa 10 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-20D/11-MHZ2-20D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa 0.5 MPa 40 0.4 MPa 0.4 MPa 30 0.3 MPa 0.3 MPa 20

Table of Contents

30-27 D-F59/F5P/J59/J51 Grommet CX Tie-rod Terminal conduit D-G39C/K39C D-M9N/M9P/M9B D8-30-28 D-M9NV/M9PV/M9BV 8-30-29 D-F8N/F8P/F8B -X 8-30-31 D-F9G/F9H Direct Grommet D-Y59A/Y59B/Y7P 208-30-30 D-Y69A/Y69B /Y7PV 8-30-32 D-Y7G/7H Data D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 8-30-33 Band Grommet D-G59W/G5PW/K59W 8-30-34 2-color indication D-F79W/F7PW/J79W 8-30-35 Solid State Switch Rail Grommet

Compact Hydraulic Cylinder

37 31 3/8 39 130 11 11 88 40 109 30 40 23 15 M10 x 1.25 25 to 1400 65 69 45 12 21 15 11 36 30 3/8 42 130 11 11 95 46 118 30 52 52 1/3.5 stroke 50 28 15 M10 x 1.25 25 to 1400 76 85 52 15 27 19 11 43 35 1/2 46 142 14 13 115 58 145 30 55 52 63 30 20 M12 x 1.5 25 to 1500 65 90 98 63 15 27 19 14 43 35 1/2 52 148 18 15 132 65 165 35 55 80 35 20 M16 x 1.5 25 to 1800 80 110 118 80 17 22 22 16 44

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Table of Contents

30-27 D-F59/F5P/J59/J51 Grommet CX Tie-rod Terminal conduit D-G39C/K39C D-M9N/M9P/M9B D8-30-28 D-M9NV/M9PV/M9BV 8-30-29 D-F8N/F8P/F8B -X 8-30-31 D-F9G/F9H Direct Grommet D-Y59A/Y59B/Y7P 208-30-30 D-Y69A/Y69B /Y7PV 8-30-32 D-Y7G/7H Data D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 8-30-33 Band Grommet D-G59W/G5PW/K59W 8-30-34 2-color indication D-F79W/F7PW/J79W 8-30-35 Solid State Switch Rail Grommet

NCQ2/CQ2

Spring Extend C D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 x 55L C D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Cylinder model Mounting bolt part no.

Table of Contents

7 4 5 19 18 11 10 6 MVGQ 15 17.5 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 M4 x 0.7 20.4 39 Rc1/8 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

ISO Cylinder

DA DA C0.5 R sphere DA 30 C 30 DA C A H C A H A H T W1 H Symbol: A19 Symbol: A18 Symbol: A17 Symbol: A16 DA AL MM 30 MM 30 MM 30 MM 30 H A H A H A A C H Symbol: A23 Symbol: A22 Symbol: A21 Symbol: A20 DA 30 30 L RD MM MM 30 DA MM 30 DB DB T A H A T C B A H A L K H W H Symbol: A27 Symbol: A26 Symbol: A25 Symbol: A24 DA 30 MM DA 30 MM MM MM AL H LB K A L A H AL H AL L K H Symbol: A30 Symbol

NCG/CG1

26 31 38 47 58 72 89 110 6 8 10 14 18 18 22 26 5 6 6 8 11 11 13 16 5 5.5 5.5 6 7 7 10 10 14 16.5 20 26 32 38 50 60 18 22 22 30 35 35 40 40 35 40 40 50 58 58 71 71 69(77) 69(77) 71(79) 78(87) 90(102) 90(102) 108(122) 108(122) 11 11 11 12 13 13 13 17 17 19 27 27 32 41 10(12) M4 x 0.7 depth 7 M8 x 1.25 Rc 1/8 106(114) 11 11 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 Up

Free Mount Cylinder

40 10 11 14 16 20 24 22 24 32 40 50 62 17 18 25 30 38 48 3 4 6 8 10 12 8 8 8 8 10 12 7 7 7 9 10 11 20.5 22 28 33 43.5 51.5 11 12 13 16 20 24 9 12 17 20 22 29 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 16.5 16.5 Note) 19 21.5 23 Without auto switch With auto switch Bore size (mm) 6 10 16 20 25 32 NN P Q QA R Y T S 33 36 30 36 40 42 Z 51 57 56 65 73 84 S 33 36 40 46

Air Cylinder Series CM2

15 24 9 62 14 13 5 20 M8 x 1.25 M20 x 1.5 133 142 15.5 10.5 8 1 25 22 9 30 25 10 19 10 13 8 45 8 30 15 30 9 62 14 17 6 26 5.5 M26 x 1.5 137 146 M10 x 1.25 19.5 10.5 33.5 8 1 32 22 9 30 25 10 19 12 13 8 45 10 30 15 9 64 14 17 6 26 5.5 M26 x 1.5 139 148 M10 x 1.25 19.5 10.5 37.5 34.5 4 1 40 24 10 11 11 38 15 30 14 16 50 12 39 88 18 22 8 21 7 M32 x 2 32 M14 x 1.5 177 188 13.5 46.5 42.5 41.2

Compact Cylinder

D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 C Mounting bolt part no.

Smooth Cylinder/Low Speed Cylinder

45 8 30 15 30 9 62 14 22 26 0 0.033 32 34.5 37.5 5.5 M10 x 1.25 19.5 17 10.5 6 M26 x 1.5 139 148 9 30 25 10 19 12 13 8 45 10 30 15 9 64 14 22 26 0 0.039 40 21 41.2 7 M14 x 1.5 21.5 M32 x 2 42.5 46.5 22 13.5 8 177 188 10 38 15 30 14 16 11 50 12 39 11 88 18 24 32 Clevis pin and snap ring (cotter pin for bore size 40) are shipped together.

Air Cylinder Series MB

Bore size (mm) Z Z B DA DB DL DU DC DX DE DR DO DT DS DH DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 32 40 50 63 80 100 125 32 40 50 63 80 100 125 33 33 45 45 65 65 75 46 52 65 75 95 114 136 32 32 43 43 64 64 78 22 22 30 30 45 45 60 10 10 11.5 11.5 14 14 15 44 44 60 60 86 86 110 14 14 20 20 30 30 32 62 62 81 81 111 111 136 6.6 6.6 9 9 11 11 13.5 15 15 18 18 22 22

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

Note) The counterbore configuration differs only for the mounting hole section between the auto switch mounting grooves. (16, 20 only) (mm) H 7 8 7.8 G 30.5 32 34.2 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 EC 8.5 9 10 EO 13.5 14 16 DC 18.5 21 24 DO 23.5 26 30 BA 30 36 42 BD 12 16 19 CB 14 14 16.5 BB 40 45 52 NB BC 30.6 36.6 42.6 NA 8 11 13 AD 28 29 31.5 K 4 5 6 AA 43.5 46 49 AB 40.5 43 46 J

Free Mount Cylinder Series CU

20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting single rod M5 x 0.8 6 10 16 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 5, 10, 15, 20, 25, 30 11-/22-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 11-/22-CDU25 25 Suction flow rate of vacuum suction type (Reference values) Specifications Size Suction flow rate l/min (ANR) 6 10 16/20/25 Bore size (mm) Item 6 10/16 20/25 6 10 12 1.05MPa 0.7MPa 0.12MPa

Air Cylinder

M8 x 1.25 24 M20 x 1.5 1/8 9 62 14 133 142 25 22 19.5 17 9 30 25 10 19 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 30 M10 x 1.25 30 M26 x 1.5 1/8 9 62 14 137 146 32 22 19.5 17 9 30 25 10 19 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 30 M10 x 1.25 34.5 M26 x 1.5 1/8 9 64 14 139 148 40 24 21 22 10 38 41.2 15 30 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 39 M14 x 1.5 42.5 M32 x 2 1/4 11 88 18 177 188

5

M8 x 1.25 24 M20 x 1.5 1/8 9 62 14 133 142 25 22 19.5 17 9 30 25 10 19 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 30 M10 x 1.25 30 M26 x 1.5 1/8 9 62 14 137 146 D32 22 19.5 17 9 30 25 10 19 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 30 M10 x 1.25 34.5 M26 x 1.5 1/8 9 64 14 139 148 40 24 21 22 10 38 41.2 15 30 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 39 M14 x 1.5 42.5 M32 x 2 1/4 11 88 18 177 188

Electric Actuator/Slider Type

, 50, 100, 150, 200, 250, 300 30, 50, 100, 150, 200, 250, 300 30, 50, 100, 150, 200, 250, 300 Work load [kg] Horizontal Note 2) 18 50 50 30 60 60 30 60 60 Vertical 7 15 29 7 17 35 10 22 44 Pushing force lbf [N] Note 3) (Set value: 45 to 90%) Max. speed [mm/s] 900 450 225 1200 600 300 1000 500 250 Pushing speed [mm/s] Note 4) 35 or less 30 or less 30 or less Max. acceleration/deceleration