CATALOG

S F O O T E Diameter Model No d2 CK S5 K1 K2 13 G1 l1 G2 EM G3 CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 D I M E N S

Table of Contents

7 (4) D-Z7/Z80 9 9 11 11 11 A B D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV 7 6 6 7 6 Some switches cannot be mounted.

A

S F O O T E Diameter Model No d2 CK S5 K1 K2 13 G1 l1 G2 EM G3 CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 D I M E N S

Table of Contents

D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65 + 50 (n2) D-G5

Compact Hydraulic Cylinder

FY FZ SS f Q B-rod C-rod B-rod C-rod 32 M10 x 1.25 52 58 38 16 32 15 37 31 3/8 39 141 11 11 11 40 88 109 182 25 to 1400 21.5 15 40 M10 x 1.25 52 52 65 45 12 32 15 36 30 3/8 42 141 11 11 11 46 95 118 182 25 to 1400 12 15 1/3.5 stroke 50 M10 x 1.25 55 52 76 52 15 40 19 43 35 1/2 46 155 13 14 13 58 115 145 198 25 to 1400 15 15 63 M12 x 1.5 65 55 90 63 15 42 19 43 35 1/2 52 163 15 18 15 65

5-Port Solenoid Valve

Yellow (73.2) With Residual Pressure Release Valve 58.5 5.3 PE PE LOCK FREE X X Vacuum Release Valve with Restrictor A B A B A B A B A B 3/5E 3/5E 92.6 1.7 4 A 4 A 4 A 4 A 4 A 31.8 15 30.2 11 60.5 (40.9) 1P 1P 2 B 2 B 2 B 2 B 2 B One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8, 5/16" (A/B port, side ported) (Fitting for the type with P/E ports on the U and/or D sides) ( )

5 Port Solenoid Valve Series SY3000/5000/7000/9000

R A A A A A B B B B B P One-touch fitting (P , R port) Applicable tubing O.D.: 10, 3/8" (L4) L3 D side U side 27.5 48.5 (4.9) (3.5) 8 B B PORT SOL.a PORT SOL.a 5.5 17 16 15 14 13 12 11 10 17 8 7 6 5 4 3 2 1 COM 8 7 6 5 4 3 2 1 COM 35 SOL.b SOL.b 16 15 14 13 12 11 10 9 114.3 A A A DIN rail 6 3 4 5 6 7 8 9 10 stations Stations n L1 L2 L3 L4 2 stations 160.5 150 126 17 9 285.5 275 254 15.5 273

Hydraulic

(mm) With rod boot Bore size (mm) Stroke range (mm) l e f B C F GA GB J M NA NB P R S T Q B-rod C-rod B-rod C-rod 32 58 38 16 32 15 M10 x 1.25 11 37 31 3/8 39 141 11 21.5 15 52 25 to 1400 40 65 45 12 32 15 M10 x 1.25 11 36 30 3/8 42 141 11 12 15 52 52 25 to 1400 1/3.5 stroke 50 76 52 15 40 19 M10 x 1.25 11 43 35 1/2 46 155 13 15 15 52 55 25 to 1400 63 90 63 15 42 19 M12 x 1.5 14 43 35 1

Compact Cylinder

17.5 21 B 5.5 5 6.5 7 6 8.5 11.5 14.5 18 24 A 5 8 8 8 9.5 13.5 11.5 14 18 21.5 B 6 5.5 7 7.5 6.5 9 12 15 18.5 24.5 B 11 10.5 12 12.5 11.5 14 17 20 23.5 29.5 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 3 2.5 4 4.5 3.5 6 9 12 15.5 21.5 A 9 7 9.5 13.5 17 B 4.5 7.5 10.5 14 20 A 10 13 13 13 14.5 18.5 16.5 19 23 26.5 A 2 5 5 5.5 6.5 10.5 8.5 11 14 18.5 A 6 9 9 9.5 10.5 14.5 12.5 15 18 22.5 12 16 20 25

AC Servo Motor Driver (Network card type ）

Model A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 Clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 Clamp B: 1pc. B 45 11 25 11.

NCQ2/CQ2

model D-A73 D-A80 D-A79W D-A9 D-A9 V D-F7NTL D-P3DW A 12.5 16 14 16.5 19.5 22.5 A 8.5 12 10 12.5 15.5 18.5 B 16.5 22.5 25.5 24.5 30.5 37 B 20.5 26.5 29.5 28.5 34.5 41 A 9.5 13 11 13.5 16.5 19.5 B 17.5 23.5 26.5 25.5 31.5 38 A 10 13.5 11.5 14 17 20 B 18 24 27 26 32 38.5 B 23 29 32 31 37 43.5 A 7 10.5 8.5 11 14 17 B 15 21 24 23 29 35.5 B 11 17 19.5 18.5 24.5 31 A 15 18.5 16.5 19 22 25 A 3

Table of Contents

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

Table of Contents

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-1-10 to 15-1-11 for Precautions on every series.

ZP

5 11 16 17 2.5 2.5 ZPT10CT 10 11 0.8 ZPT08U-B-A8 8 9 1 ZPT13CT 13 14 Dimensions by Stroke 1 16 17 F: M3 x 0.5 F: M5 x 0.8 E G H J G H D Model J ZPT 6-B-A8 46 18 15 44 ZPT10-B-A8 79 23 77 84 3 6 5 8 ZPT15-B-A8 28 43 82 ZPT25-B-A8 94 38 92 13-11-10 Series ZPT Vacuum Pad: Vertical Vacuum Entry with Buffer Connection Female thread (Buffer) Pad Form Flat/Flat with ribs/Deep Vacuum Entry Port

AC Servo Motor Driver (Pulse input type/Positioning type ）

Model A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 Clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 Clamp B: 1pc. B 45 11 24 11.

4/5 Port Solenoid Valve

20 15 5 A A B B 20 1 5 15 (Pitch) P = 10.5 M5 x 0.8 (A, B port) A A 17.5 One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" (Pitch) P = 10.5 18 1.5 SS5YJ3-32, S32Stations -M5 Station n L1 L2 Station 2 41.5 33.5 Station 20 230.5 222.5 3 52 44 4 62.5 54.5 5 73 65 6 83.5 75.5 7 94 86 8 104.5 96.5 9 115 107 10 125.5 117.5 11 136 128 12 146.5 138.5 13 157 149 14 167.5 159.5 15 178

Smooth Cylinder/Low Speed Cylinder

15 17.5 20.5 23.5 B 9 12 15.5 18.5 23 29.5 A B A 18 21.5 19 21.5 24.5 27.5 B 13 16 19.5 22.5 27 33.5 B 15.5 19 16.5 19 22 25 A 20.5 24 21.5 24 27 30 A A B 15.5 18.5 22 25 29.5 36 B A B 32 40 50 63 80 100 10 13 16.5 19.5 24 30.5 7.5 10.5 14 17 21.5 28 3.5 6.5 9.5 12.5 17 24 15 18.5 16 18.5 21.5 24.5 10.5 13.5 17 20 24.5 31 12.5 16 13.5 16 19 22 8 11.5 9.5 12 15 18 MQ RHC RZQ Note) Adjust

Table of Contents

DRail mounting Direct mounting 20D-A7H/A80H D-A73C/A80C D-F7BAL/F7BAVL D-F7/J79 D-F7V/J79C D-F7W/F79F D-F7WV D-J79W D-M9 D-M9V D-F9W D-F9WV D-F9BA D-A7/A80 D-A79W D-A9 D-A9V Bore size (mm) D 8 10.5 13.5 16.5 C 11 15 13 15.5 D 9 11.5 14.5 17.5 C 12 16 14 16.5 D 5 7.5 10.5 13.5 C 8 12 10 12.5 B 3.5 6 9 12 A 6.5 10.5 8.5 11 B 6.5 9 12 15 A 9.5 13.5 11.5 14 B 6 8.5 11.5 14.5 A 9 13 11 13.5 32

Electric Actuator

[mm] M4 x 0.7 thread depth 8 (F.G. terminal) 7.5 +0.030 0 5H9 ( ) depth 5 n x 5.5 6 60 150 B D x 150 (=E) 15 15 E [mm] Model L 441 471 541 571 641 671 741 771 A B n D Model L 841 871 941 971 1041 1071 1141 1171 A B n D E 11-LEFS32;;-100-; 11-LEFS32;;-100B-; 11-LEFS32;;-200-; 11-LEFS32;;-200B-; 11-LEFS32;;-300-; 11-LEFS32;;-300B-; 11-LEFS32;;-400-; 11-LEFS32;;-400B-; 11-LEFS32;;-500-; 11-LEFS32

ZP

B A B Model 11 14 ZP3-T13B;15-B5 ZP3-T13B;20-B5 ZP3-T10B;15-B5 ZP3-T10B;20-B5 40.5 48 59 66.5 13.3 16.4 15.3 16.4 40.5 48 59 66.5 13.5 16.6 15.5 16.6 Lateral Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."