5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Double Double Double Double Double Double Double Single Single Single Single Single Single Single Single Single Single SI unit SI unit A B A B A B A B A B A B A B A B A B A B A A A A B A A B A 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 0 1 2 3 7 8 4 5 9 11 6 10 11 Mixed wiring is available as an option. Use the manifold specification sheet to specify this.

VFS

[dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Weight (kg) Plug-in Non plug-in VF 2.6 2.8 2.6 2.8 2.5 2.7 2.6 2.9 2.7 2.9 2.8 3.1 2.8 3.1 2.3 2.6 2.3 2.4 2.7 2.8 3 8 0.20 0.22 0.20 0.22 0.14 0.22 0.15 0.15 0.22 0.22 VFS4110 11 12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000

AC Servo Motor Driver

No-fuse breaker Fuse (Note 2) Current Voltage Driver Magnetic contactor Voltage (Note 1) Current Not using power factor improving AC Using power factor improving reactor AC Class [A] [V] reactor LECSB-S5 30A frame 5A 30A frame 5A 10 300V S-N10 LECSB2-S7 30A frame 5A 30A frame 5A 10 240V T LECSB1-S7 30A frame 10A 30A frame 10A 15 LECSB2-S8 30A frame 10A 30A frame 5A 15 Note 1.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Type A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 clamp B: 1pc. B 45 11 27 11.

AC Servo Motor Driver (CC-Link Type ）

A L 3 7 # 0 0 P B 1 0 P B 1 1 P B 1 2 P B 1 6 P o s 0 0 1 Point table error details For the point table No.1 position data error Point table No. with error Error item Pos: position data Spd: speed Acc: acceleration time constant Dec: deceleration time constant Dwl: dwell Aux: auxiliary function 10 15 11. OUTLINE DRAWINGS 11.

VFR

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

AC Servo Motor Driver (CC-Link Type ）

[Unit: mm] E D A C F Logo etc, are indicated here. 39.0 23.8 5.2 B 12.7 Each type of dimension Connector Shell kit A B C D E F 10150-3000PE 10350-52A0-008 41.1 52.4 18.0 14.0 17.0 46.5 Applicable wire size: AWG24~30 11 5 11. OUTLINE DRAWINGS (2) SCR connector system (Sumitomo 3M Limited) Receptacle : 36210-0100PL Shell kit : 36310-3200-008 39.5 34.8 22.4 11.0 11 6 12.

3

Analog Output Flow rate/Analog output Fluid temperature/Analog output A B B Output Output A C Voltage output 0.6 V 1 V 04/20/40 11 21 C D C Current output 2.4 mA 4 mA 1 V 1.5 V 6 mA 1.4 V 5.6 mA 1.5 V 5.9 mA 5 V Voltage output 4 mA 20 mA Current output C D The values of B vary according to the range.

JXCx-OMT0023

Type A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 clamp B: 1pc. B 45 11 21 11.

VFS4000-OMY0001

B VFS4 3 400 A A B B 1.25-3.5M1.25Y-3L1.25Y-3M COMCOMCOM COMVFS300040005000 AZ683-56A 20VFS4000500010 0.6Nm /01C COM AB VVFS2000-30A-1 1.5m VVFS2000-30A-2 3m 206837-11 VVFS2000-30A-3 5m 206138-11 * VVFS2000-30A-4 7m 66101-224 AMB * VVFS2000-30A-5 10m VCTF24 0.75mm 2 * VVFS2000-30A-6 15m * VVFS2000-30A-7 20m * 10 No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

AC Servo Motor Driver (Network card type ）

Model A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 Clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 Clamp B: 1pc. B 45 11 25 11.

Table of Contents

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

Dual Rod Cylinder Series CXSJ/CXS

A C Auto Switch Proper Mounting Position D-M9, D-M9W D-M9AVL D-A93 D-A90, D-A96 D-M9V, D-M9WV Bore size (mm) A B C D A B C D A B C D A B C D CXSJ15 to 32 B D 6 10 15 20 25 32 15.5 13.5 5.5 15.5 11 8 19.5 0.5 9.5 9.5 19.5 0.5 11.5 7.5 25.5 23.5 3 25.5 21 5.5 29.5 3 19.5 7 29.5 3 21.5 5 31.5 6 29.5 4 31.5 6 27 1.5 35.5 10 25.5 0 35.5 10 27.5 2 39 9 37 7 39 9 34.5 4.5 43 13 33 3 43 13 35

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

ball Snap ring B Housing Piston rod A Piston rod B Rod cover Head cover Plate Piston A Piston B Bumper A Magnet Bumper bolt Hexagon nut Bumper B Hexagon socket head cap screw Hexagon socket head set screw Snap ring Bumper holder (2) Nickel plated (1) Hard anodized Chromated Chromated Nickel plated Hard chrome plated Nickel plated Nickel plated Nickel plated Note 2) Aluminum alloy for CXSL6

Standard Combinations

Metal bowl B B B B B Dimensions B B N.C.: Gray N.O.: Black B 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 17 Width across flats 17 Standard specifications Bracket mount Model Port size A B C D P E F G H1 H2 J K L L M (1) (1) (1) (1) ACG20 ACG30 ACG40 1/8, 1/4 126 87 36 60 28.5 41.5 43 30 24 5.5 3.2 1/4, 3/8 167 115 41 80 30 55 57 41 35 35

smcmaintenancepartslist

Contents Bore size (mm) Seal Kit List Description Material Note No. 20 25 32 40 50 63 80 100 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS MGP63-B-PS MGP80-B-PS MGP100-B-PS @4 @5 @6 @7 #5 #6 $4 $5 Piston seal NBR Set of left nos. @4, @5, @6, @7, #5, $4, $5 Rod seal NBR Gasket A NBR Gasket B NBR Set of left nos. @4, @5, @6, @7, #5, #6, $4, $5 Set of left nos. @4, @5, @6, @7, #5, $4

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Description Material 1 Bracket Steel strip 2 Cross recessed round head screw Steel wire 3 Clasp Steel strip 8 Cassette 9 Seal NBR 10 O-ring NBR 11 O-ring NBR 12 Bonnet A POM 13 Bonnet B POM 14 Gear PPS 15 Indicator gear POM 16 Clip Stainless steel 1 The AS3002FS-11, AS4002FS-11, AS4002FS-13 are made of stainless steel. 9 Related Equipment Holder for Speed Controller TMH Series Specifications

IIIIIII

Smm) '75 PSIG (5 Kgf/cm2) -75 PSIG (5 Kgflcmz) A B c D E F G H J 4.29 (109) 3.01 76.5) 0.96 e4.51 't.28 32.5'l 0.06 {1.5) 0.12 (3) 1.54 (39) 1.20 (30.51 0.24 (6) 11 46 lbs, (5 2 0 216 in (5 5mm) 0 039 in (1mm) A B c D E F G H J K 3.88 o A q 3.01 76.5) 0.96 e4.5) 0.87 Q2l 0.06 (1.s) 0.12 (3) 1.57 (40) 0.96 t24.5) 1.20 t30.5) 0.24 (6) Millimeters in Parentheses Millimeters in Parentheses NVM220

Mechanical Valves Series NVM, NVFM, NVZNI

Smm) '75 PSIG (5 Kgf/cm2) -75 PSIG (5 Kgflcmz) A B c D E F G H J 4.29 (109) 3.01 76.5) 0.96 e4.51 't.28 32.5'l 0.06 {1.5) 0.12 (3) 1.54 (39) 1.20 (30.51 0.24 (6) 11 46 lbs, (5 2 0 216 in (5 5mm) 0 039 in (1mm) A B c D E F G H J K 3.88 o A q 3.01 76.5) 0.96 e4.5) 0.87 Q2l 0.06 (1.s) 0.12 (3) 1.57 (40) 0.96 t24.5) 1.20 t30.5) 0.24 (6) Millimeters in Parentheses Millimeters in Parentheses NVM220

HRX-OM-I051

60A 30A Communication connector The communication connectors are to be prepared under your responsibility, referring to the following table.