CATALOG

32 6 36.5 41.5 10 44 54 8.5 13.5 16 5,10 16 8 5.4 35.5 40.5 5, 10 38 8 39 44 10.5 46 56 9.5 14.5 20 5, 10 20 10 7 36.5 41.5 5, 10 47 7 41 46 11 47.5 57.5 10 15 25 5, 10 25 12 10 37.5 42.5 5, 10 52 12 42.5 47.5 10.5 50 50 12 17 32 5, 10 32 16 13.3 38 43 5, 10 45 13 45 50 11 56.5 66.5 12 17 40 5, 10 40 16 18.3 44.5 41.5 5, 10 52 13 51.5 56.5 10.5 68.5 88.5 18 28 50 10, 20 50 20 17.6 50.5 60.5

V

The minimum quantity to order is 10 pieces.

Stations: 12 Stations, Port Size: C4 (ø4 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: N (Name Plate)

Stations: 12 Stations, Port Size: ø4 One-touch Fitting, Kit Name: D-sub Connector 25 Pin, Electrical Entry: Upper, Cable Length: w/o Cable 25 Pin, Option 1: None, Option 2: DIN Rail Mounting, Option 3: Name Plate, Option 4: -, Option 5: -, CE Compliant: -

Stations: 12 Stations, Port Size: C4 (ø4 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin)

Stations: 12 Stations, Port Size: ø4 One-touch Fitting, Kit Name: D-sub Connector 25 Pin, Electrical Entry: Upper, Cable Length: w/o Cable 25 Pin, Option 1: -, Option 2: -, Option 3: -, Option 4: -, Option 5: -, CE Compliant: -

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

-VV5Q11-SB08C6-D 1 set (SB kit, 8-station manifold part no.) 10-VQ1100-51 4 sets (Single type part no.)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

-VV5Q11-SB08C6-D 1 set (SB kit, 8-station manifold part no.) 10-VQ1100-51 4 sets (Single type part no.)

Series VQ Base Mounted Metal Seal/Rubber Seal

AXT661-14AN-10 3 pcs.

High Vacuum Angle Valve

Flange type Symbol Nil KF(NW) K(DN) D Leakage (Pam3/s or less) Note) Symbol Changed part Quantity Valve open/closed Valve open Valve closed Mounting position Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 External Type XLA Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 None A B C A B C r 2-1 8-1 o 8-2 XL XL 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 2-1 8-1 1.3 x 10-9 (FKM) r o 8-2 XLQ Note) Values at normal temperature

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Critical pressure 0.6 0.5 Sonic 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 JSXD30 Port size 1/4 JSXD30 Port sizes 3/8, 1/2 JSXD40 Port size 3/8 JSXD40 Port size 1/2 JSXD50 Port size 3/4 JSXD60 Port size 1 10 1000 2000 3000 10 1000 2000 3000 4000 15 2000 4000 6000 8000 15 2500 5000 7500 10 20 5000 10 15000 25 5000 10 15000 20 Flow rate Q [L/min (ANR)] For Air (Orifice diameter: 35 mm, 40 mm, 50 mm

Aluminum High Vacuum Angle Valve

Flange type Symbol Nil KF(NW) K(DN) D Leakage (Pam3/s or less) Note) Symbol Changed part Quantity Valve open/closed Valve open Valve closed Mounting position Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 External Type XLA Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 None A B C A B C r 2-1 8-1 o 8-2 XL XL 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 2-1 8-1 1.3 x 10-9 (FKM) r o 8-2 XLQ Note) Values at normal temperature

XL

-6 {760 to 7.5 x 10-9} Operating pressure Pa {Torr} Conductance l/s Note 1) 5 14 45 80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas transmission Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas transmission {Torr l/s} External Operating time s Note 2) 0.05 0.1 0.21 0.24 0.26 0.28 Flange type KF (NW), K (DN) KF (NW) Body: Aluminum

High Vacuum Angle Valve, XL Series

-6 {760 to 7.5 x 10-9} Operating pressure Pa {Torr} Conductance l/s Note 1) 5 14 45 80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas transmission Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas transmission {Torr l/s} External Operating time s Note 2) 0.05 0.1 0.21 0.24 0.26 0.28 Flange type KF (NW), K (DN) KF (NW) Body: Aluminum

Stations: 12 Stations, Port Size: C4 (ø4 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: B (Back Pressure Check Valve for All Stations)

Stations: 12 Stations, Port Size: C4 (ø4 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: B (Back Pressure Check Valve for All Stations), Option 2: None, Option 3: N (Name Plate)

Stations: 12 Stations, Port Size: C4 (ø4 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting)

Stations: 12 Stations, Port Size: C4 (ø4 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: N (Name Plate), Option 4: R (External Pilot), Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 12 Stations, Port Size: C4 (ø4 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 12 Stations, Port Size: C4 (ø4 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: None, Option 3: N (Name Plate)