CATALOG

32 6 36.5 41.5 10 44 54 8.5 13.5 16 5,10 16 8 5.4 35.5 40.5 5, 10 38 8 39 44 10.5 46 56 9.5 14.5 20 5, 10 20 10 7 36.5 41.5 5, 10 47 7 41 46 11 47.5 57.5 10 15 25 5, 10 25 12 10 37.5 42.5 5, 10 52 12 42.5 47.5 10.5 50 50 12 17 32 5, 10 32 16 13.3 38 43 5, 10 45 13 45 50 11 56.5 66.5 12 17 40 5, 10 40 16 18.3 44.5 41.5 5, 10 52 13 51.5 56.5 10.5 68.5 88.5 18 28 50 10, 20 50 20 17.6 50.5 60.5

V

The minimum quantity to order is 10 pieces.

Stations: 4 Stations, Port Size: C4 (ø4 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: N (Name Plate)

Stations: 4 Stations, Port Size: ø4 One-touch Fitting, Kit Name: D-sub Connector 25 Pin, Electrical Entry: Upper, Cable Length: w/o Cable 25 Pin, Option 1: None, Option 2: DIN Rail Mounting, Option 3: Name Plate, Option 4: -, Option 5: -, CE Compliant: -

Stations: 4 Stations, Port Size: C4 (ø4 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin)

Stations: 4 Stations, Port Size: ø4 One-touch Fitting, Kit Name: D-sub Connector 25 Pin, Electrical Entry: Upper, Cable Length: w/o Cable 25 Pin, Option 1: -, Option 2: -, Option 3: -, Option 4: -, Option 5: -, CE Compliant: -

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

-VV5Q11-SB08C6-D 1 set (SB kit, 8-station manifold part no.) 10-VQ1100-51 4 sets (Single type part no.)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

-VV5Q11-SB08C6-D 1 set (SB kit, 8-station manifold part no.) 10-VQ1100-51 4 sets (Single type part no.)

Series VQ Base Mounted Metal Seal/Rubber Seal

AXT661-14AN-10 3 pcs.

High Vacuum Angle Valve

Flange type Symbol Nil KF(NW) K(DN) D Leakage (Pam3/s or less) Note) Symbol Changed part Quantity Valve open/closed Valve open Valve closed Mounting position Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 External Type XLA Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 None A B C A B C r 2-1 8-1 o 8-2 XL XL 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 2-1 8-1 1.3 x 10-9 (FKM) r o 8-2 XLQ Note) Values at normal temperature

Stations: 4 Stations, Port Size: C4 (ø4 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting)

Stations: 4 Stations, Port Size: C4 (ø4 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: N (Name Plate), Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 4 Stations, Port Size: C4 (ø4 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 4 Stations, Port Size: C4 (ø4 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: None, Option 3: N (Name Plate)

Stations: 4 Stations, Port Size: C4 (ø4 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: None, Option 3: N (Name Plate), Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 4 Stations, Port Size: C4 (ø4 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: None, Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 4 Stations, Port Size: C4 (ø4 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: None, Option 3: N (Name Plate), Option 4: R (External Pilot), Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 4 Stations, Port Size: C4 (ø4 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: B (Back Pressure Check Valve for All Stations), Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 4 Stations, Port Size: C4 (ø4 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: None, Option 3: None, Option 4: None, Option 5: None, CE Compliant: Q (CE Compliant)

Stations: 4 Stations, Port Size: ø4 One-touch Fitting, Kit Name: D-sub Connector 25 Pin, Electrical Entry: Upper, Cable Length: w/o Cable 25 Pin, Option 1: None, Option 2: DIN Rail Mounting, Option 3: -, Option 4: -, Option 5: -, CE Compliant: -