Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

V Model PP Q QQ R 4-M5 x 0.8 thread depth 4.5 4-Rc 1/8 thread depth 6.5 4-Rc 1/8 thread depth 6.5 8-M4 x 0.7 thread depth 5.5 8-M5 x 0.8 thread depth 7.5 8-M5 x 0.8 thread depth 7.5 2-M6 x 1.0 thread depth 10 2-M8 x 1.25 thread depth 12 2-M8 x 1.25 thread depth 12 M6 x 1.0 x 12l M8 x 1.25 x 6l CXS20 8 7.75 9.5 6.5 12.5 M6 x 1.0 45 M6 x 1.0 x 14l M8 x 1.25 x 6l CXS25 8.5 13 9 9 15 M6 x 1.0

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

PA3000/5000/PAX1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

LX

/Without Motor Brake Series LXS Dimensions/LXSH2BD Scale: 25% F G x I 5H9 +0.030 0 depth 5 +0.030 0 depth 5 D-5.1 through 5H9 10 7.5 E-M5 thread depth 10 Refer to Cross section C-C, bottom view. 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 13 15 Stroke + 127 3.5 (5) 0.5 46.5 2-

Process Pump Series PA3000/5000/PAX1000 Series PB1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

1

T.T. 12 10 1 (P) 10.5 (37.1) (47.6) (A) 2 3 port 30 12 10 1 (P) 3 (R) 17 44 2 x 4.6 mounting hole 25.4 2 x M5 x 0.8 depth 4 14 8.5 * 0.5 MPa supply F.O.F.* 13 N P .T. 3.2 mm O.T. 2.3 mm T.T. 5.5 mm One way roller lever VM123-M5-02A VM133-M5-02A VM123-M5-02SA VM133-M5-02SA 10 Polyacetal or hard steel roller 46.5 29.2 (A) 2 Symbol 2 port 8 P.T. O.T. T.T.

Smooth Cylinder/Low Speed Cylinder

8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 M5 x 0.8 Female thread Male thread Rod end thread Note) Only 5 stroke comes with M5 x 0.8 in the case of no auto switch on 32. +1.0 0 mm Stroke tolerance Port size Vacuum port, Relief port M5 x 0.8 M5 x 0.8 1296 Clean Series Low Speed Cylinder Series 10-, 11-CM2X 10-,11CM2X Series How to Order Clean Series 10 11 Relief type

smcmaintenancepartslist

M3 x 0.5 x L M2.5 x 0.45 x 6L M5 x 0.8 x L M3 x 0.5 x 10L M5 x 0.8 x L M4 x 0.7 x 10L M5 x 0.8 x L Without auto switch 12 With auto switch Without auto switch 16 With auto switch Without auto switch 20 With auto switch Without auto switch 25 With auto switch 32 40 50 63 M4 x 0.7 x 4L Truncated cone point M4 x 0.7 x 6L Truncated cone point M4 x 0.7 x 6L Truncated cone point L: Length of

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8

Air Slide Table

M5 x 0.8 4.4 4 9 MXQ12B M6 x 1 7.4 7 12 MXQ16B M6 x 1 7.4 10 15 MXQ20B M8 x 1.25 18 14 20 MXQ8C M4 x 0.7 2.1 6 9 MXQ12C M5 x 0.8 4.4 8 12 3.

2 Phase Stepper Motor/Without Motor Brake Series LXS

E-M5 thread depth 10 6 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch U N x P 20 5 N C 1 0.2 (5.1) 10 5.8

JIS Standard Hydraulic Cylinder

8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 8 12 9.5 11 10 8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 CHM CHS CH2 CH2 CHA CH2F (mm) Auto switch model Bore size (mm) 32 Related Products 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59/F59F

Actuation: 1 (Single Type), Body: 5 (Base Mounted), Option: V (Vacuum), Voltage: 6 (12 VDC), Electrical Entry: L (L Plug Connector, w/Lead Wire; with Light/Surge Voltage Suppressor), Port Size: M5

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC12V, Specification: Standard, Valve Type: 4-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Open, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0~0.7, Driving Type: Linear Motion Poppet, Pilot Air Supply: Internal

Mechanical Valves Series NVM, NVFM, NVZNI

(5 Kgf/cm2) A B c D E F G A B c D E F G 4.25 (108) 2.20 (56) 1.32 :33.51 0.91 1.23l o.24 (6) 0.81 :20.5) 0.39 (10) 4.43 112.5 2.38 '60.5)1.32 33_5' 0.91 (231 o.24 (6) 0.81 (20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parentheses Series NVM MECHANICAL VALVES DIMENSIONS NVM220-N02-30 230-N02-30 NVM220-N02-32 230-N022 F , O , F 1 1 4 6 l b s ( 5 2 k 9 ) P T 0 2 1 6 i n ( 5 S

IIIIIII

(5 Kgf/cm2) A B c D E F G A B c D E F G 4.25 (108) 2.20 (56) 1.32 :33.51 0.91 1.23l o.24 (6) 0.81 :20.5) 0.39 (10) 4.43 112.5 2.38 '60.5)1.32 33_5' 0.91 (231 o.24 (6) 0.81 (20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parentheses Series NVM MECHANICAL VALVES DIMENSIONS NVM220-N02-30 230-N02-30 NVM220-N02-32 230-N022 F , O , F 1 1 4 6 l b s ( 5 2 k 9 ) P T 0 2 1 6 i n ( 5 S m

ITV0000

/min (ANR) (Supply pressure: 0.6MPa) 6l/min (ANR) (Supply pressure: 0.6MPa) Maximum flow rate 24VDC 10%, 12 to 15VDC Voltage Current consumption Power supply Power supply voltage 24VDC type: 0.12A or less Power supply voltage 12 to 15VDC type: 0.18A or less Voltage type 0 to 5VDC, 0 to 10VDC Input signal Current type 4 to 20mADC, 0 to 20mADC Voltage type Approx. 10k Input impedance Current

2

(mm) Weight (g) Nylon Urethane 3.2 M5 x 0.8 KQ2U23-M5l 10 7.1 33.8 30.8 13.3 7.1 5.2 6 3.2 2.2 2.2 1.8 5.8 P D 4 M5 x 0.8 KQ2U04-M5l 10 8.2 33.9 30.9 13.3 8.2 5.7 6 3.2 2.2 2.2 1.8 6.7 M6 x 1.0 KQ2U04-M6l 10 8.2 34.9 30.9 13.3 8.2 5.7 6 3.2 2.2 2.2 3 6.6 M 6 M5 x 0.8 KQ2U06-M5l 12 10.4 35 32 13.3 10.4 6.8 6 3.2 2.2 2.2 1.8 10 M6 x 1.0 KQ2U06-M6l 12 10.4 36 32 13.3 10.4 6.8 6 3.2 2.2 2.2 3

MXS

62 48 26 6 1 N-M5 X 0.8 thread 6 deep (Helisert) 6 12 37.5 (With stroke adjuster at extension end) Stroke adjuster at retraction end Stroke adjuster at extension end KA 21 NA-M5 X 0.8 thread 5.5 deep 10 21 5.5 K 10 5.5 9.5 12 6 12 5.5 J 10 Max. 13.5 (With stroke adjuster at retraction end) I Operating port 2-M5 X 0.8 11 3 2-M5 X 0.8 thread 5.5 deep 5H9 4 deep +0.030 0 HA GA 5H9 4 deep +0.030