Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: Standard / With rod detent function, Environment, Applications: Standard / Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1 to 1.0～, Cushion: Rubber bumper at both ends, Port thread

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: Standard / With rod detent function, Environment, Applications: Standard / Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1 to 1.0～, Cushion: Rubber bumper at both ends, Port thread

Bore Size: 63mm, Port Type: NPT, Stroke: 30mm, Auto Switch: -, Lead Wire or Prewired Connector: -

Bore Size: 63mm, Port Type: NPT, Stroke: 50mm, Auto Switch: -, Lead Wire or Prewired Connector: -

Bore Size: 63mm, Port Type: TN (NPT), Stroke: 30mm

Bore Size: 63mm, Port Type: TN (NPT), Stroke: 50mm

Bore Size: 63mm, Port Type: NPT, Stroke: 30mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 1m

Bore Size: 63mm, Port Type: TN (NPT), Stroke: 30mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: M (1m)

1

to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 6 5.5 12 21 25 39 D-M9l D-M9lW/M9lWV D-M9lA/M9lAV 10 6 13 20.5 32.5 44.5 16 6.5 12.5 21 33 45 51 75 93 105 6 5.5 12 12 21 25 39 D-M9lV 10 6 13 13 20.5 32.5 44.5 16 6.5 12.5 12.5 21 33 45 51 75 93 105 6 1.5 8 17 21 35 Band mounting D-A9l 10 2 9 16.5 28.5 40.5 16 2.5 8.5 17 29 41 47 71 89

Compact Cylinder

Without auto switch With auto switch Without auto switch With auto switch Bore size (mm) Stroke range (mm) Stroke range (mm) Bore size (mm) L L1 L L1 LD LG LH LT A 62.2 72.2 75 85 88 98 B 36 46 43.5 53.5 53 63 LS 10 20 13.5 23.5 19 29 A B LS A 53 63 64.5 74.5 76 86 A 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 63 8 33.5 72.2 46

NCQ2/CQ2

to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Dimensions except A, L and L1 are the same as rod side flange style.

CQ2

W/o auto switch With auto switch A 62.2 72.2 75 85 88 98 W/o auto switch With auto switch A 53 63 64.5 74.5 76 86 Bore (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Bore (mm) L1 L LX LT LS LH LG LD L L1 B 36 46 43.5 53.5 53 63 A B A 33.5 8 72.2 46 63 18 95 3.2 20 46 5 11 43.5 63 63 43.5 10 85

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

162 23 12.5 80 119.5 53.5 18 101.5 10 27 38 28 56 10 100 142 63 22 120 13 31 45 32 64 12 Double clevis bracket material: Cast iron Rod Side Flange Style Bore size (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Without auto switch With auto switch A 54 64 63.5 73.5 75 85 Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Bore size (mm) L1 N RR

Table of Contents

Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Smooth Cylinder/Low Speed Cylinder

B A B LS 46 56 53.5 63.5 63 73 20 30 23.5 33.5 29 39 72.2 82.2 85 95 98 108 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 82.2 43.5 30 18 56 11 LH LY Special cap bolt 80 95 63.5 33.5 53.5 20 13 100 73 39 108 53.5 22 13 LT LG LX LZ 4 x LD Y X Y X LS + Stroke Bore size (mm) Stroke range (mm) LT LH Y LZ LG X LX LY A + Stroke 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 3.2

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Electric Actuators

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

162 23 12.5 80 119.5 53.5 18 101.5 10 27 38 28 56 10 100 142 63 22 120 13 31 45 32 64 12 Double clevis bracket material: Cast iron Rod Side Flange Style Bore size (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Without auto switch With auto switch A 54 64 63.5 73.5 75 85 Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Bore size (mm) L1 N RR

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

2

Applicable air dryer Capacity Type Inlet voltage Outlet voltage A B C D E F Weight IDF-TR500-1 IDF1E-10 to 8E-10 IDU3E-10, 4E-10, 8E-10 78 94 100 64 75 4.2 x 7 (Long hole) 1.5 kg 100 VAC (50 Hz) 100, 110 VAC (60 Hz) 110 VAC (50 Hz) 110 to 120 VAC (60 Hz) Singlephase Singleturn 500 VA IDF-TR1000-1 IDF11E-10, 15E1-10 IDU6E-10, 11E-10, 15E1-10 104 122 134 75 114 4.2 x 9 (Long hole) 4 kg 1 kVA