Magnet: D (Built-in), Mounting: Basic Style, Bore Size: 25mm, Piping: NPT, Stroke: 100mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: D (Built-in), Mounting: Basic Style, Bore Size: 25mm, Piping: NPT, Stroke: 250mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in Magnet, Mounting: B [Basic (Double-side Bossed)], Bore Size: 25mm, Thread: NPT, Stroke: 200mm, Rod End Thread: Male Rod End, Auto Switch: -, Lead Wire or Prewired Connector: -

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Low Speed, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.025～1.0, Specification: Built-in magnet, Port thread type

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SY Saves and . space energy EX600 New New SY3000 SY5000 SY7000 VM XT34 10 mm 15 mm 18 mm 2, 3.2, 4, 6, 8 fittings are connectable. Type M10/M11 manifold At 300 mm/s 4, 6, 8 fittings are connectable. 32 At 300 mm/s Existing 6, 8, 10, 12 fittings are connectable.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

1/4 18 18 28 56 L plug connector (L): 10-SY5140(R)-L-02 M plug connector (M): 10-SY5140(R)-M-02 DIN terminal (D): 10-SY5140(R)-D-02 M8 connector (WO) 10-SY5140(R)-WO-02 95.8[98] Approx. 300 (Lead wire length) Applicable cable O.D 3.5 to 7 83.4 75.9 MAX.10 104.9 65 50.6[57.6] 64.6 35.2 M8 x 1 49.5 55.1 37.6 (Lead wire length) Approx. 300 61.7[68.7] Pg7 105.8 86[88.2] 94.9 87.5 81 18 18 18

4/5 Port Solenoid Valve

M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): 10-SYJ3 43-L-M5 M plug connector (M): 10-SYJ3 43-M-M5 M8 Connector (WO): 10-SYJ3 43-WO-M5 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 41.5[48.5] 26.1 46 M8 x 1 28.5 52.6[59.6] Approx. 300 (Lead wire length) 55.8 32.6 49.3 111.5[115.9] R1 P R2 R1 P R2 R1 P R2 91.9[96.3] 10 10 10 10 10 10 28 28 28 109.7 14 14 14 5 5 5 37.6[39.8

V100

port) VP 35.6 28.5 26.1 X R P S070 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23

Table of Contents

Allowable driving force Fn (N) H H MTS 500 H H 300 10 L 200 MY 3.

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-10 1035 540 510 31 487 617 10 INDEX 300 44 Series IDF/IDU Dimensions [Dust-protecting filter set] (A) (20) (20) (B) (10) (IDF-FL200, 201) (IDF-FL202 to 214) (IDU-FL210 to 218) Dimensions (mm) Dimensions (mm) Part no.

Table of Contents

MGF40 MGF40 20MGF40 MGF40 10 10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph (4) v = 150 mm/s or less v = 200 mm/s or less Graph (7) Graph (8) 20 300 300 200 200 MGF100 MGF100 20 100 100

Electric Actuator/Slider Type

6: LEFS25B 10 10 Lead 12: LEFS25A 5 5 Lead 12: LEFS25A 0 0 0 100 200 300 400 500 600 Speed: V [mm/s] 0 100 200 300 400 500 600 Speed: V [mm/s] LEFS32/Ball Screw Drive Horizontal Vertical 50 50 Lead 8: LEFS32B 40 40 Work load: W [kg] Work load: W [kg] 30 30 Lead 16: LEFS32A Lead 8: LEFS32B 20 20 10 10 Lead 16: LEFS32A 0 0 Speed: V [mm/s] 0 100 200 300 400 500 600 0 100 200 300 400 500 600

Table of Contents

65.3 18 24 9 28 Up to 300 15 13 5 M8 x 1.25 20 0 0.033 45 13 30 10 5.5 19.5 10 70.5 22 30 9 33.5 Up to 300 15 17 6 M10 x 1.25 26 0 0.033 -X 45 13 30 12 5.5 19.5 10 76.5 22 34.5 9 37.5 Up to 300 15 17 6 M10 x 1.25 26 0 0.033 50 16 39 14 7 21 15 84.5 24 42.5 10 46.5 Up to 300 21.5 22 8 M14 x 1.5 32 0 0.039 20ZZ Z U S RR QY Q NN Bore size (mm) 20 25 32 40 Data 142 133 14 62 9 14 19.8 M20 x

Electric Actuators

work piece center of gravity (mm) 100 L1 0 10 30 20 Transfer load m (kg) 300 L2 200 Mer m Rolling Yawing 100 L2 0 10 30 20 Mer Transfer load m (kg) m 300 a = 1000 a = 500 200 a = 2000 L3 100 m Mey a 0 10 30 20 Transfer load m (kg) Refer to page 145 for deflection data. 98 Non-standard Motor/Horizontal Mount Specification Series LJ1S30 Dimensions/LJ1S303SC(X10) Scale: 10% 4-M8 x 1.25 thread

CATALOG

5.5 20 25 39 28 3.2 35.8 42 16 28 47.6 35 93 114 25 ~300 19.5 22 45.5 10 14 2 12 12 31 5 8 M10x1.25 29 18 69 11 10 -0.025 -0.047 10 5.5 25 30 43 33 3.2 39.8 42 20 28 53 40 98 119 32 ~300 19.5 22 54 12 18 2 12 11 38 5.5 10 M10x1.25 36 18 71 10 12 -0.032 -0.059 10 6.6 32 35 54.5 40 4.5 49.4 48 22 28 67.7 40 101 125 40 ~300 27 30 63.5 16 25 2 13 12 47 6 14 M14x1.5 44 18 78 10 14 -0.032 -0.059

Air Slide Table

100 120 0 50 100 150 200 250 300 L3: Overhang Allowable range: 120 mm L3: Overhang Allowable range: 300 mm Allowable overhang L [mm] Allowable overhang L [mm] MXQ25(A)-10, 20, 30, 40Z MXQ25(A)-50, 75Z 10 10 V = mm/s V = mm/s V = 100 9 9 V = 100 8 8 Load mass m [kg] Load mass m [kg] 7 7 6 6 V = 200 5 5 V = 200 4 4 V = 300 V = 300 3 3 2 2 V = 500 V = 500 1 1 0 0 0 10 20 30 40 50 60 70 80 0

Table of Contents

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

hole 36 (EA, EB port) 1/8 39.4 L plug connector (L): 10-SY7120-L(-F2) C8, N9 C10, N11 M plug connector (M): 10-SY7120-M(-F2) C8, N9 C10, N11 DIN terminal (D, Y): 10-SY7120(-F2) C8, N9 C10, N11 M8 connector (WO): 10-SY7120-WO(-F2) C8, N9 C10, N11 D Y Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 110 [112.2] 66 58.5 47.2 Max. 10 16.1 31.5 [38.5] 32.1 19 36 M8 x 1 Approx. 300

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): 10-SYJ3 43-L-M5 M plug connector (M): 10-SYJ3 43-M-M5 M8 Connector (WO): 10-SYJ3 43-WO-M5 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 41.5[48.5] 26.1 46 M8 x 1 28.5 52.6[59.6] Approx. 300 (Lead wire length) 55.8 32.6 49.3 111.5[115.9] R1 P R2 R1 P R2 R1 P R2 91.9[96.3] 10 10 10 10 10 10 28 28 28 109.7 14 14 14 5 5 5 37.6[39.8

Battery-less

30 to 570 20 to 380 10 to 190 [mm/s] Up to 450 10 to 700 5 to 360 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 Actuator specifications 451 to 500 10 to 600 5 to 300 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10