Magnet: Built-in, Mounting: Front Flange, Tube Material: Aluminum Tube, Model Selection: Standard, Bore Size: 40mm, Thread: NPT, Stroke: 400mm, Suffix: w/o Gaiter w/Cushion Both Sides, Auto Switch: J59W--Solid State, 2-color Indication, 2 Wire, Lead Wire or Prewired Connector: 3m, Number: -

Clean Series: 10 (Relief Type), Magnet: D (Built-in), Series: A2 (Standard), Mounting: F (Front Flange), Bore Size: 40mm, Port Thread: TN (NPT), Stroke: 250mm

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05 to 1, Specification: Built-in magnet, Port thread type: NPT, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05 to 1, Specification: Built-in magnet, Port thread type: NPT, Auto Switches: Without

1

x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

Electric Actuator/Slider Type

800 800 800 800 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 L2 Y Me 400 400 400 400 m 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60 80 0 10 5 15 20 30 25 0 10 5 15 20 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Me L3 [mm] L3 [mm] L3 [mm] L3 [mm] 600 600 600 600 m L3 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 20 40 60 80 0 10

Electric Actuators

L1 (mm) 400 a = 1000 Pitching Yawing Vertical Vertical m a a = 2000 200 a = 3000 L1 Mep 0 5 10 20 15 Transfer load m (kg) 600 a = 2000 a = 1000 L3 (mm) 400 a = 3000 a 200 L3 Mey 0 5 10 20 15 Transfer load m (kg) Refer to page 145 for deflection data. 82 Non-standard Motor/Vertical Mount Specification Series LJ1H30 Dimensions/LJ1H303PA(X10) Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth

Table of Contents

Stroke (mm) Up to 10 Up to 30 Up to 50 Up to 75 Up to 100 Max. speed (mm/s) Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 (5) (6) (7) 6 10 15 Selection graph (8) (9) (10) (11) (12) (13) (14) (15) 20 25 32 The maximum speeds for 6 to 32 are: 6, 10: Up to 800 mm/s; 15, 20: Up to 700 mm/s; 25, 32: Up to 600 mm/s Caution

2

Applicable air dryer Capacity Type Inlet voltage Outlet voltage A B C D E F Weight IDF-TR500-3 IDF1E-10 to 8E-10 IDU3E-10, 4E-10, 8E-10 500 VA 380, 400, 415 VAC (50 Hz) 380 to 420 VAC (60 Hz) 15 kg IDF11E-10, 15E1-10 IDU6E-10, 11E-10, 15E1-10 Singlephase Singleturn 1 kVA 100 VAC (50 Hz) 110 VAC (60 Hz) IDF-TR1000-3 230 207 190 210 160 9 IDF1E-10 to 8E-10 IDU3E-10, 4E-10, 8E-10 IDF-TR500-4

Table of Contents

Positioning distance (mm) 500 250 100 10 1 10 50.3 25.3 10.3 1.3 0.4 100 5.4 2.9 1.4 0.5 0.4 Speed (mm/s) 200 2.9 1.7 0.9 0.5 0.4 400 1.7 1.1 0.7 0.5 0.4 Values will vary slightly depending on the operating conditions.

Electric Actuator

Specific Product Precautions 10 10 Lead 16: LEFS32A 0 0 Speed: V [mm/s] 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Speed: V [mm/s] Vertical LEFS40/Ball Screw Drive Horizontal 60 60 Lead 10 50 50 Work load: W [kg] Work load: W [kg] 40 40 Lead 20 30 30 20 20 Lead 10 10 10 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] 3 Series LEF SpeedWork

LJ1H

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

500 LAT 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LZ 1500 1500 1500 LC3F2 Mey 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] m Wall Y L5 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0

Table of Contents

speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution Load weight (kg) Load weight (kg) 1.

Battery-less

20 30 40 50 0 0 0 0 5 10 15 20 25 30 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 Horizontal/Bottom 800 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 Y 400 400 400 400 Mer m 200 200 200 200 0 0 0 0 0 2 4 6 8 10 12 14 0 10 20 30 40 50 0 10 20 30 40 50 60 0 5 10 15 20 25 30 Work load [kg] Work load [

CATALOG

32 6 36.5 41.5 10 44 54 8.5 13.5 16 5,10 16 8 5.4 35.5 40.5 5, 10 38 8 39 44 10.5 46 56 9.5 14.5 20 5, 10 20 10 7 36.5 41.5 5, 10 47 7 41 46 11 47.5 57.5 10 15 25 5, 10 25 12 10 37.5 42.5 5, 10 52 12 42.5 47.5 10.5 50 50 12 17 32 5, 10 32 16 13.3 38 43 5, 10 45 13 45 50 11 56.5 66.5 12 17 40 5, 10 40 16 18.3 44.5 41.5 5, 10 52 13 51.5 56.5 10.5 68.5 88.5 18 28 50 10, 20 50 20 17.6 50.5 60.5

Environment

0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg]

15

0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LZ 1500 1500 1500 LC3F2 Mey 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] m Wall Y L5 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 10

A

32 6 36.5 41.5 10 44 54 8.5 13.5 16 5,10 16 8 5.4 35.5 40.5 5, 10 38 8 39 44 10.5 46 56 9.5 14.5 20 5, 10 20 10 7 36.5 41.5 5, 10 47 7 41 46 11 47.5 57.5 10 15 25 5, 10 25 12 10 37.5 42.5 5, 10 52 12 42.5 47.5 10.5 50 50 12 17 32 5, 10 32 16 13.3 38 43 5, 10 45 13 45 50 11 56.5 66.5 12 17 40 5, 10 40 16 18.3 44.5 41.5 5, 10 52 13 51.5 56.5 10.5 68.5 88.5 18 28 50 10, 20 50 20 17.6 50.5 60.5

Mechanically Jointed Rodless Cylinder Series MY1

10 10 100 200 300 400 500 1000 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed mm/s Piston speed mm/s Piston speed mm/s MY1HT/m1 MY1HT/m2 MY1HT/m3 1000 1000 1000 500 500 500 300 300 300 MY1HT63 MY1HT63 Load mass kg Load mass kg Load mass kg MY1HT63 100 100 100 MY1HT50 MY1HT50 50 50 50 MY1HT50 40 40 40 30 30 30 D20 20 20 -X 10 10 10 Individual -X 100 200 300 400 500 1000 100