1

15, 30, 45, 60 10 3.53 6.86 16 6.86 14.2 16 15, 30, 45, 60, 75, 100, 125, 150 * Manufacture of intermediate strokes at 1 mm intervals is possible.

Air Cylinder Series MB

1000 32 40 50 63 80 100 37.5 37.5 37.5 37.5 37.5 37.5 25 25 25 25 25 25 23 23 25 25 29 29 54 56 64 64 68 76 36 41 51 51 56 61 12.5 12.5 12.5 12.5 12.5 12.5 50 50 50 50 50 50 75 75 75 75 75 75 100 100 100 100 100 100 125 125 125 125 125 125 150 150 150 150 175 175 200 200 125 20 27 82 75 10 30 40 60 80 100 120 140 160 180 200 (mm) h Bore size (mm) 51 to 100 1 to 50 101 to 150 151 to 200

Electric Actuators

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Table of Contents

Bore size/Stroke (mm) 10 (25), 50, 75, 100 16 (25), 50, 75, 100, 125, 150, 175, 200 20 (25), 50, 75, 100, 125, 150, 175, 200 25 (25), 50, 75, 100, 125, 150, 175, 200 (25), (50), 75, 100, 125, 150, 175, 200 End lock 32 R End lock Note1) For the strokes indicated in the parentheses of the 10, 16 and 25, shock absorbers are to be mounted on both sides of the plate.

Table of Contents

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

ZP

Bolt Bolt tightening torque ZP (40/50) H ZP (40/50) HB 0.7 to 0.9 Nm 40, 50 M3 x 8 ZP (63/80) H ZP (63/80) HB 0.9 to 1.1 Nm 63, 80 M4 x 8 100, 125 ZP (100/125) H ZP (100/125) HB 2.3 to 2.7 Nm M5 x 10 Assemble parts with recommended tightening torque.

Made to Order

50 to 600 100 to 2000 50 to 600 601 to 1000 2001 to 5000 (Up to 3000 for 16) 10 to 100 20, 25, 32 110, 120, 125, 150, 175, 200 601 to 1500 (Up to 1000 for 16) 80, 90, 100, 110, 120, 125, 150 110, 120, 125, 150 110, 120, 125, 150, 175, 200 MY3A MY3B MY3M 16, 20, 25, 32, 40, 50, 63 2001 to 3000 100 to 2000 10 to 75 10 CXS 2001 to 3000 100 to 2000 16, 25, 40, 63 10 to 100 15 CY3B 2001 to 3000

Stability of suction position,

to 125)(UM/BM)lJB (10/30/50) q Stopper Form/Diameter Part no.

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

CATALOG

15 20 25 32 B O R E S I Z E / S TA N D A R D S T R O K E ( M M) B O R E S I Z E / L O N G S T R O K E ( M M) [XB11] 6 10, 20, 30, 40, 50 10 10, 20, 30, 40, 50 15 10, 20, 30, 40, 50 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 32 10, 20, 30, 40, 50, 75, 100 10 75, 100, 125, 150 15 75, 100, 125, 150 20 125, 150, 175, 200 25 125, 150, 175, 200 32 125, 150, 175, 200 Courtesy

Compact Cylinder

) Note 10) Note 10) Note 8) Note 9) Note 10) With boss on rod end (Standard) Note 11) 180 to 200: (p), for 125 to 160 only Note 12) The body shape is the same as the existing product.

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

A

15 20 25 32 B O R E S I Z E / S TA N D A R D S T R O K E ( M M) B O R E S I Z E / L O N G S T R O K E ( M M) [XB11] 6 10, 20, 30, 40, 50 10 10, 20, 30, 40, 50 15 10, 20, 30, 40, 50 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 32 10, 20, 30, 40, 50, 75, 100 10 75, 100, 125, 150 15 75, 100, 125, 150 20 125, 150, 175, 200 25 125, 150, 175, 200 32 125, 150, 175, 200 Courtesy

smcmaintenancepartslist

Seal kit includes a grease pack (32 to 50: 10 g, 63, 80: 20 g, 100, 125: 30 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) 27 Air Cylinder/Double Rod Series MBW Replacement Procedure is 32, 40, 50, 63 80, 100, 125 P.284 Construction !3 !4 !2 !6 !

Compact Hydraulic Cylinder

-125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175

NCQ2/CQ2

Applicable stroke: Available in 5 mm intervals T Q G A + Stroke B + Stroke With switch: 20, 25 Without switch: 20 to 32 With switch: 32 Series (N)CQ2 B A T Q G 50 stroke or less 75, 100 stroke 125 to 300 stroke 50 stroke or less 75, 100 stroke 50 stroke or less 125 stroke or more 100 stroke or less 125 stroke or more 125 to 300 stroke Bore size (mm) 20 25 32 40 50 63 80 100 10 10 10 10 10

Air Cylinder

st 101 to 125 st 126 to 150 st 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 10 84.5 92 104 116 89.5 97 109 121 16 86.5 95 107 119 125 149 167 179 94.5 103 115 127 133 157 175 187 -X Technical Data 87 Air Cylinder: Non-rotating Rod Type Double Acting, Single Rod CJ2K Series 10, 16 RoHS How to Order B CJ2K 60 16 Z CDJ2K B Z M9BW 60 16

10

125 40 56 41 23 12.5 25 37.5 50 75 100 125 50 64 51 25 12.5 25 37.5 50 75 100 125 150 63 64 51 25 12.5 25 37.5 50 75 100 125 150 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 100 76 61 29 12.5 25 37.5 50 75 100 125 150 175 200 125 82 75 27 10 20 30 40 60 80 100 120 140 160 180 200 [mm] Rubber Bumper Bore size [mm] h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401